US4659591A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of coating tungsten preferentially orientated in the <111> direction on a substrate
Assignee: US Philips Corp
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Filing: 1985-11-14
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Granted: 1987-04-21
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Expires: 2005-11-14
Abstract
Abstract In the reactive deposition from a gaseous phase containing tungsten hexafluoride and hydrogen on a substrate at an overall pressure of 10 to 100 hPa (low-pressure CVD method) an inert carrier gas is enriched with a rare earth metal acetyl acetonate hydrate and is conducted across the substrate and the growing tungsten layer together with the reactive gases tungsten hexafluoride and hydrogen.
Inventors
- 👤 Georg F. Gartner
- 👤 Peter A. Janiel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:47
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/04; C; C23; C23C; C23C16/00; C23C16/06; C23C16/08; C23C16/14; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/60; C30B29/605
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
80 words
A method of manufacturing tugnsten oriented in the <111> direction comprising the steps of reactively depositing tungsten hexafluoride and hydrogen from a gaseous phase at an overall pressure of 10 to 100 hPa onto a substrate, enriching an inert carrier gas with a rare earth metal acetyl acetonate hydrate, and flowing said inert carrier gas and rare earth metal acetyl acetonate hydrate across said substrate and a growing tungsten layer together with said reactive gases of tungsten hexafluoride and hydrogen.
Claim 2
Independent Claim
80 words
A method of manufacturing tugnsten oriented in the <111> direction comprising the steps of reactively depositing tungsten hexafluoride and hydrogen from a gaseous phase at an overall pressure of 10 to 100 hPa onto a substrate, enriching an inert carrier gas with a rare earth metal acetyl acetonate hydrate, and flowing said inert carrier gas and rare earth metal acetyl acetonate hydrate across said substrate and a growing tungsten layer together with said reactive gases of tungsten hexafluoride and hydrogen.
Claim 3
Dependent Claim
18 words
A method as claimed in claim 1, characterized in that argon is used as an inert carrier gas.
Claim 4
Dependent Claim
27 words
A method as claimed in claim 1 or 2, characterized in that a samarium triacetyl acetonate trihydrate is used as a rare earth metal acetyl acetonate hydrate.
Claim 5
Dependent Claim
28 words
A method as claimed in claim 1 or 2, characterized in that the share of inert carrier gas in the gaseous phase is 5 to 40 vol. %.
Claim 6
Dependent Claim
31 words
A method as claimed in claim 1 or 2, characterized in that the share of rare earth metal acetyl acetonate hydrate in the gaseous phase is 0.05 to 1% by weight.
Claim 7
Dependent Claim
49 words
A method as claimed in claim 1, characterized in that the enrichment of the inert carrier gas with the rare earth metal acetyl acetonate hydrate is effected in a saturator whose temperature is 5° to 10° C. below the melting point of the rare earth metal acetyl acetonate hydrate.
Claim 8
Dependent Claim
23 words
A method as claimed in claim 1 or 6, characterized in that the rare earth metal acetyl acetonate hydrate is previously dehydrated partially.
Claim 9
Dependent Claim
48 words
A method as claimed in claim 1, characterized in that a second portion of the inert carrier gas or another inert carrier gas is enriched with a reactive compound of a dopant and is conducted across the substrate and the growing tungsten layer together with the other gases.
Claim 10
Dependent Claim
24 words
A method as claimed in claim 8, characterized in that a metal organic thorium compound is used as a reactive compound of the dopant.
Claim 11
Dependent Claim
47 words
A method as claimed in claim 1 or 8, characterized in that the supply of the carrier gas enriched with at least one of the rare earth metal acetyl acetonate hydrate and of the carrier gas enriched with the reactive compound of the dopant is temporarily interrupted.
Claim 12
Dependent Claim
32 words
A method as claimed in claim 10, characterized in that the supply is interrupted and continued for such a long period that partial layers of 0.5 to 5 μm thickness are obtained.
Claim 13
Dependent Claim
14 words
A method as claimed in claim 1, characterized in that said substrate is molybdenum.
Claim 14
Dependent Claim
29 words
A method as claimed in claim 4, characterized in that the share of rare earth metal acetyl acetonate hydrate in the gaseous phase is 0.05 to % by weight.
References Cited (Backward Citations)
US2208920A
Cited
US3635760A
Cited
US3620838A
Cited
US3894164A
Cited
JPS5314418A
Cited
US4374901A
Cited
US4524297A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-20 | 1990-10-20 | 1991-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-20 | 1994-10-20 | 1995-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-20 | 1998-10-20 | 1999-04-21 | $7700.00 | Window Closed / Lapsed |