US4659228A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Aligning apparatus
Assignee: Canon Inc
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Filing: 1985-09-09
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Granted: 1987-04-21
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Expires: 2005-09-09
Abstract
Abstract Disclosed is an aligning apparatus in which two bodies such as a semiconductor mask and a wafer having elongate (or bar-like) alignment marks are scanned by a bar-like beam having an elongate irradiating area and further scanned by the bar-like beam with the direction of inclination thereof changed, and the positional relation between the two bodies is detected, whereby alignment of the two bodies is achieved. The bar-like beam is formed by an anamorphic optical system (for example, a cylindrical lens or the like). The bar-like beam scans the alignment marks through a beam scanning system, and the inclination of the beam is changed by beam inclination changing element at a desired time, for example, after the first cycle of scanning has been terminated, and then scanning is effected again.
Inventors
- 👤 Masao Totsuka
- 👤 Akiyoshi Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:15
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
211 words
An aligning apparatus for achieving a predetermined positional alignment of two bodies by scanning first and second bar-like alignment marks provided thereon which are inclined in first and second directions, respectively, relative to a single scanning line, said first and second directions differing from each other, said apparatus comprising: beam generating means for sequentially generating two kinds of bar-like beams which are inclined in said first and second directions, respectively, relative to the scanning lines; beam scanning means for scanning said bar-like beams along the scanning line; means for detecting said bar-like marks, said detecting means outputting first signals corresponding to said first bar-like marks provided on said two bodies when said bar-like beam inclined in said first direction is scanned along the scanning line and outputting second signals corresponding to said second bar-like marks provided on said two bodies when said bar-like beam inclined in said second direction is scanned along the scanning line; means for discriminating an amount of deviation between said two bodies based on said first and second signals; and means for moving at least one of said two bodies relative to the other body in accordance with the amount of deviation discriminated by said discriminating means to achieve the predetermined positional alignment of said two bodies.
Claim 2
Dependent Claim
211 words
An aligning apparatus for achieving a predetermined positional alignment of two bodies by scanning first and second bar-like alignment marks provided thereon which are inclined in first and second directions, respectively, relative to a single scanning line, said first and second directions differing from each other, said apparatus comprising: beam generating means for sequentially generating two kinds of bar-like beams which are inclined in said first and second directions, respectively, relative to the scanning lines; beam scanning means for scanning said bar-like beams along the scanning line; means for detecting said bar-like marks, said detecting means outputting first signals corresponding to said first bar-like marks provided on said two bodies when said bar-like beam inclined in said first direction is scanned along the scanning line and outputting second signals corresponding to said second bar-like marks provided on said two bodies when said bar-like beam inclined in said second direction is scanned along the scanning line; means for discriminating an amount of deviation between said two bodies based on said first and second signals; and means for moving at least one of said two bodies relative to the other body in accordance with the amount of deviation discriminated by said discriminating means to achieve the predetermined positional alignment of said two bodies.
Claim 3
Dependent Claim
51 words
An aligning apparatus according to claim 1, wherein said beam generating means comprises changing means for interchanging between two conditions in one of which said bar-like beam inclined in said first direction can be generated and in other of which said bar-like beam inclined in said second direction can be generated.
Claim 4
Dependent Claim
26 words
An aligning apparatus according to claim 1, wherein each said bar-like beam is about the same as one said bar-like mark in its width and length.
Claim 5
Dependent Claim
40 words
An aligning apparatus according to claim 1, wherein said beam generating means comprises a beam source, an anmorphic optical system for changing the beam from the beam source to the bar-like beam and means for rotating the anamorphic optical system.
Claim 6
Dependent Claim
93 words
An aligning apparatus according to claim 1, wherein said beam generating means comprises a beam source, a first anamorphic optical system for changing the beam from the beam source to the bar-like beam inclined in the first direction relative to the scanning line, a second anamorphic optical system for changing the beam from the beam source to the bar-like beam inclined in the second direction relative to the scanning line and means for selectively causing the beam from the beam source to pass through one of the first and second anamorphic optical systems.
Claim 7
Dependent Claim
42 words
An aligning apparatus according to claim 5, wherein said causing means movably supports said first and second anamorphic optical systems to position one of said first and second anamorphic optical systems in the optical path of the beam from said beam source.
Claim 8
Dependent Claim
85 words
An aligning apparatus according to claim 5, wherein said beam source generates a polarized beam and said causing means comprises a λ/2 plate selectably mountable in the optical path of the beam from said beam source for changing a direction of polarization of the beam from said beam source and a polarizing beam splitter for directing the beam from said beam source to one of said first and second anamorphic optical systems depending upon the selective mounting of said λ/2 plate in the optical path.
Claim 9
Dependent Claim
54 words
An aligning apparatus according to claim 7, wherein said causing means movably supports the λ/2 plate and an optical glass, the optical thickness of which is equal to that of the λ/2 plate, to position of the λ/2 plate and the optical glass in the optical path of the beam from the beam source.
Claim 10
Dependent Claim
42 words
An aligning apparatus according to claim 7, wherein said beam generating means comprises a λ/2 plate for coinciding a direction of polarization of the beam from the first anamorphic optical system with that of the beam from the second anamorphic optical system.
Claim 11
Dependent Claim
53 words
An aligning apparatus according to claim 1, wherein said beam generating means comprises a beam source, a plurality of cylindrical lenses the directions of generatrices of which are different from each other, and means for selectively positioning one of said cylindrical lenses in the optical path of the beam from said beam source.
Claim 12
Dependent Claim
175 words
An aligning method for achieving a predetermined positional alignment of two bodies by scanning first and second bar-like alignment marks provided thereon which are inclined in first and second directions, respectively, relative to a single scanning line, said first and second directions differing from each other, comprising the steps of: sequentially generating two kinds of bar-like beams which are inclined in said first and second directions, respectively, relative to the scanning line; obtaining first signals corresponding to said first bar-like marks provided on said two bodies by scanning the bar-like beam inclined in said first direction along the scanning line; obtaining second signals corresponding to said second bar-like marks provided on said two bodies by scanning the bar-like beam inclined in said second direction along the scanning line; discriminating an amount of deviation between said two bodies based on said first and second signals; and moving at least one of said two bodies relative to the other body in accordance with the amount of deviation to achieve the predetermined positional alignment of said two bodies.
Claim 13
Dependent Claim
175 words
An aligning method for achieving a predetermined positional alignment of two bodies by scanning first and second bar-like alignment marks provided thereon which are inclined in first and second directions, respectively, relative to a single scanning line, said first and second directions differing from each other, comprising the steps of: sequentially generating two kinds of bar-like beams which are inclined in said first and second directions, respectively, relative to the scanning line; obtaining first signals corresponding to said first bar-like marks provided on said two bodies by scanning the bar-like beam inclined in said first direction along the scanning line; obtaining second signals corresponding to said second bar-like marks provided on said two bodies by scanning the bar-like beam inclined in said second direction along the scanning line; discriminating an amount of deviation between said two bodies based on said first and second signals; and moving at least one of said two bodies relative to the other body in accordance with the amount of deviation to achieve the predetermined positional alignment of said two bodies.
Claim 14
Dependent Claim
22 words
An aligning method according to claim 11, wherein generations of said two kinds of bar-like beams are in turn carried out sequentially.
Claim 15
Dependent Claim
42 words
An aligning method according to claim 12, wherein the interchanging between generations of said two kinds of bar-like beams is carried out during the period from the ending of one scanning to the commencing of another scanning which follows said one scanning.
Claim 16
Dependent Claim
41 words
An aligning method according to claim 12, wherein a plurality of scannings of the bar-like beam inclined in said first direction are carried out and a plurality of scannings of the bar-like beam inclined in said second direction are carried out.
Claim 17
Dependent Claim
26 words
An aligning method according to claim 14, wherein the scannings of the two kinds of bar-like beams are carried out the same plurality of times, respectively.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-04-20 | 1990-10-20 | 1991-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-04-20 | 1994-10-20 | 1995-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-04-20 | 1998-10-20 | 1999-04-21 | $7700.00 | Window Closed / Lapsed |