CVD process for the production of a superconducting fiber bundle

Claim 2

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are uniformly distributed between the B1-structure niobium compound grains of the superconducting layer by depositing the insulating material from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 3

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are uniformly distributed between the B1-structure niobium compound grains of the superconducting layer by depositing the insulating material from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 4

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are uniformly distributed between the B1-structure niobium compound grains of the superconducting layer by depositing the insulating material from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 5

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase in the CVD reactor in the superconducting layer on all grain boundaries of the B1-structure niobium compound grains, independently of their spatial orientation, simultaneously with the niobium compound deposition.

Claim 6

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase in the CVD reactor in the superconducting layer on all grain boundaries of the B1-structure niobium compound grains, independently of their spatial orientation, simultaneously with the niobium compound deposition.

Claim 7

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase in the CVD reactor in the superconducting layer on all grain boundaries of the B1-structure niobium compound grains, independently of their spatial orientation, simultaneously with the niobium compound deposition.

Claim 8

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase in the CVD reactor in the superconducting layer on all grain boundaries of the B1-structure niobium compound grains, independently of their spatial orientation, simultaneously with the niobium compound deposition.

Claim 9

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer in which the grain boundaries are parallel to the surface of the respective carrier fiber, and wherein the niobium compound and the insulating material are deposited from the gaseous phase alternatingly.

Claim 10

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer in which the grain boundaries are parallel to the surface of the respective carrier fiber, and wherein the niobium compound and the insulating material are deposited from the gaseous phase alternatingly.

Claim 11

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer in which the grain boundaries are parallel to the surface of the respective carrier fiber, and wherein the niobium compound and the insulating material are deposited from the gaseous phase alternatingly.

Claim 12

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer in which the grain boundaries are parallel to the surface of the respective carrier fiber, and wherein the niobium compound and the insulating material are deposited from the gaseous phase alternatingly.

Claim 13

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer, and wherein the insulating material is deposited pulsewise from the gaseous phase in the CVD reactor while the niobium compound is deposited continuously.

Claim 14

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer, and wherein the insulating material is deposited pulsewise from the gaseous phase in the CVD reactor while the niobium compound is deposited continuously.

Claim 15

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer, and wherein the insulating material is deposited pulsewise from the gaseous phase in the CVD reactor while the niobium compound is deposited continuously.

Claim 16

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein precipitations of insulating material are deposited from the gaseous phase at grain boundaries of the B1-structure niobium compound grains with definite spatial orientation within the superconducting layer, and wherein the insulating material is deposited pulsewise from the gaseous phase in the CVD reactor while the niobium compound is deposited continuously.

Claim 17

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein an additional element is added to the superconductive material of niobium compound to increase its conductivity by depositing the element from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 18

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm, wherein an additional element is added to the superconductive material of niobium compound to increase its conductivity by depositing the element from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 19

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein an additional element is added to the superconductive material of niobium compound to increase its conductivity by depositing the element from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 20

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field, wherein an additional element is added to the superconductive material of niobium compound to increase its conductivity by depositing the element from the gaseous phase in the CVD reactor simultaneously with the niobium compound deposition.

Claim 21

Method according to claim 1, wherein after the superconducting layer is applied to the carrier fibers, the fibers are coated with a metal selected from the group consisting of high-purity copper and aluminum in a further process step immediately following thereon.

Claim 22

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm.

Claim 23

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of a niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a low total gas pressure of between 0.1 and 5 m bar, and during the deposition using plasma activation to effect grain size reduction to said grain size of between 3 and 50 nm.

Claim 24

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field.

Claim 25

Method for manufacturing a superconducting fiber bundle formed of a multiplicity of carrier fibers coated with a superconducting layer of niobium compound of niobium carbonitride of the general formula NbC x N y wherein x+y is equal to or less than 1, said superconductive layer of niobium compound having a fine grained B1-structure and a mean grain size between 3 and 50 nm, which comprises reacting niobium chloride, carbon and nitrogen compounds in a CVD (chemical vapor deposition) reactor to produce the niobium compound, depositing the niobium compound from the gaseous phase on the carrier fiber in the reactor to form a superconducting layer thereon, maintaining a total gas pressure below atmospheric pressure, and carrying out the deposition from the gaseous phase under the action of an ultrasonic field.