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US4654292A
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US
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Photoresist composition containing a pyrazole compound anti-halation agent
Assignee: Zeon Corp
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Filing: 1985-09-17
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Granted: 1987-03-31
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Expires: 2005-09-17
Abstract
Abstract A photoresist composition comprising a conjugated diene polymer or its cyclized product, a photocuring agent soluble in an organic solvent and a pyrazole compound having a skeleton represented by the following formula. ##STR1## Also provided is a method of forming a photoresist pattern using the aforesaid composition.
Inventors
- 👤 Masayuki Oie
- 👤 Satoshi Ogawa
- 👤 Sadao Sugimoto
- 👤 Masahiro Yamazaki
- 👤 Katsuhiro Fujino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
69 words
A photoresist composition comprising conjugated diene polymer or its cyclized product, a photocuring agent soluble in an organic solvent and a pyrazole compound represented by the general formula ##STR4## wherein R 1 is an alkyl, aryl or substituted aryl group, R 2 is hydrogen or an alkyl group, R 3 is an aryl or substituted aryl group, and R 4 is hydrogen, or a hydroxyl, alkyl or aryl group.
Claim 2
Dependent Claim
69 words
A photoresist composition comprising conjugated diene polymer or its cyclized product, a photocuring agent soluble in an organic solvent and a pyrazole compound represented by the general formula ##STR4## wherein R 1 is an alkyl, aryl or substituted aryl group, R 2 is hydrogen or an alkyl group, R 3 is an aryl or substituted aryl group, and R 4 is hydrogen, or a hydroxyl, alkyl or aryl group.
Claim 3
Dependent Claim
24 words
The composition of claim 1 wherein the conjugated diene polymer is selected from the group consisting of natural rubber, polyisoprene, isoprene/styrene copolymer and polybutadiene.
Claim 4
Dependent Claim
13 words
The composition of claim 1 wherein the photocuring agent is an azide compound.
Claim 5
Dependent Claim
24 words
The composition of claim 1 wherein the azide compound is selected from the group consisting of 4,4'-diazidostilbene, p-phenylenebisazide, 4,4'-diazidobenzophenone, 4,4'-diazidochalcone, 2,6-bis(4'-azidobezal)cyclohexanone, 2,6-bis(4'-azidobenzal)-4methylcyclohexanone and 4,4'-diazidodiphenyl.
Claim 6
Dependent Claim
18 words
The composition of claim 1 wherein the pyrazole compound is selected from the group consisting of 5-methyl-1-phenyl-4-phenylazopyrazole, 5-ethyl-3-methyl-1-phenyl-4-phenylazopyrazole,
Claim 7
Dependent Claim
13 words
5-dimethyl-1-phenyl-4-(2,5-dichlorophenylazo)-parazole, 1-phenyl-4-phenylazo-5-oxypyrazole, 3-methyl-1-phenyl-4-phenylazo-5-oxypyrazole, 1-phenyl-4-(2,5-dichlorophenylazo)-5-oxypyrazole, 1-ethyl-3-methyl-4-(4-chloro-2-methylphenylazo)-5-oxypyrazole, 3-methyl-1-p-tolyl-4-(2-methoxy-4-nitrophenylazo)-5-oxypyrazole, 3-ethyl-1-phenyl-4-(4-methoxy-2-nitrophenylazo)-5-oxypyrazole, 3-methyl-1-phenyl-4(2,4,5-trichlorophenylazo)-5-oxypyrazole, 3-methyl-1-phenyl-4-(4-chloro-2-nitrophenylazo)-5-oxypyrazole, 1-p-dimethylaminophenyl-3-methyl-4-phenylazo-5-oxypyrazole, 1-p-dimethylaminophenyl-3-methyl-4-(4-methyl-2-chlorophenylazo)-5-oxypyrzole, and 1-p-dimethylaminophenyl-3-methyl-4-(4-methyl-2-nitrophenylazo-5-oxypyrazole
Claim 8
Dependent Claim
13 words
5-dimethyl-1-phenyl-4-(2,5-dichlorophenylazo)-parazole, 1-phenyl-4-phenylazo-5-oxypyrazole, 3-methyl-1-phenyl-4-phenylazo-5-oxypyrazole, 1-phenyl-4-(2,5-dichlorophenylazo)-5-oxypyrazole, 1-ethyl-3-methyl-4-(4-chloro-2-methylphenylazo)-5-oxypyrazole, 3-methyl-1-p-tolyl-4-(2-methoxy-4-nitrophenylazo)-5-oxypyrazole, 3-ethyl-1-phenyl-4-(4-methoxy-2-nitrophenylazo)-5-oxypyrazole, 3-methyl-1-phenyl-4(2,4,5-trichlorophenylazo)-5-oxypyrazole, 3-methyl-1-phenyl-4-(4-chloro-2-nitrophenylazo)-5-oxypyrazole, 1-p-dimethylaminophenyl-3-methyl-4-phenylazo-5-oxypyrazole, 1-p-dimethylaminophenyl-3-methyl-4-(4-methyl-2-chlorophenylazo)-5-oxypyrzole, and 1-p-dimethylaminophenyl-3-methyl-4-(4-methyl-2-nitrophenylazo-5-oxypyrazole
Claim 9
Dependent Claim
32 words
The composition of claim 1 which comprises from 1.0 to 10.0 parts by weight, per 100 parts by weight of the conjugated diene polymer or its cyclized product, of the pyrazole compound.
Claim 10
Dependent Claim
32 words
The composition of claim 1 which comprises from 3.0 to 5.0 parts by weight, per 100 parts by weight of the conjugated diene polymer or its cyclized product, of the pyrazole compound.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-30 | 1990-09-29 | 1991-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-30 | 1994-09-29 | 1995-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-30 | 1998-09-29 | 1999-03-31 | $7700.00 | Window Closed / Lapsed |