Programable mask or reticle with opaque portions on electrodes

Claim 1

A liquid crystal mask, capable for use in an optical system effective for imagewise exposing photoresists, said mask comprising first and second spaced parallel transparent plate means for supporting thin film deposition of selected materials; respective first and second arrays of parallel, transparent and independently electrically addressable electrodes, said electrodes being thin film deposited with respect to the inner faces of said respective first and second plate means, said respective plate means arranged such that the electrodes in said first array are generally perpendicular to the electrodes in said second array; said second plate having deposited on each electrode a plurality of portions of permanently opaque material each portion having only one opening and each not in contact with other portions of permanently opaque material and each disposed about the periphery of said electrodes so as to form a plurality of spaced transparent openings along and within the length of the electrodes thereon; and liquid crystal material maintained between said respective plate means, whereby the selective voltage addressing of particular crossed pairs of electrodes in said first and second plate means causes a potential difference therebetween, which darkens an adjacent region of said liquid crystal material.

Claim 11

A method for treating a photoresist which comprises: (a) providing a semiconductor wafer having a photoresist material coated thereon; and (b) providing a liquid crystal mask, capable of selectively imagewise exposing photoresists by means of a suitable light source directed therethrough, said mask comprising first and second spaced parallel transparent plate means for supporting thin film deposition of selected materials; respective first and second arrays of parallel, transparent and independently electrically addressable electrodes, said electrodes being thin film deposited with respect to the inner faces of said respective first and second plate means, said respective plate means arranged such that the electrodes in said first array are generally perpendicular to the electrodes in said second array; said second plate having deposited on each electrode a plurality of a portions of permanently opaque material each portion having only one opening and each not in contact with other portions of permanently opaque material and each disposed about the periphery of said electrodes so as to form a plurality of spaced transparent openings along and within the length of the electrodes thereon; and liquid crystal material maintained between said respective plate means, whereby the selective voltage addressing of particular crossed pairs of electrodes in said first and second plate means causes a potential difference therebetween, which darkens an adjacent region of said liquid crystal material; and (c) conducting a light source through said mask thereby casting an image upon the photoresist material; and (d) etching away the non-image portion of the photoresist.

Claim 12

A method for treating a photoresist which comprises: (a) providing a semiconductor wafer having a photoresist material coated thereon; and (b) providing a liquid crystal mask, capable of selectively imagewise exposing photoresists by means of a suitable light source directed therethrough, said mask comprising first and second spaced parallel transparent plate means for supporting thin film deposition of selected materials; respective first and second arrays of parallel, transparent and independently electrically addressable electrodes, said electrodes being thin film deposited with respect to the inner faces of said respective first and second plate means, said respective plate means arranged such that the electrodes in said first array are generally perpendicular to the electrodes in said second array; said second plate having deposited on each electrode a plurality of a portions of permanently opaque material each portion having only one opening and each not in contact with other portions of permanently opaque material and each disposed about the periphery of said electrodes so as to form a plurality of spaced transparent openings along and within the length of the electrodes thereon; and liquid crystal material maintained between said respective plate means, whereby the selective voltage addressing of particular crossed pairs of electrodes in said first and second plate means causes a potential difference therebetween, which darkens an adjacent region of said liquid crystal material; and (c) conducting a light source through said mask thereby casting an image upon the photoresist material; and (d) etching away the non-image portion of the photoresist.