US4651009A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Contact exposure apparatus
Assignee: Canon Inc
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Filing: 1985-03-06
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Granted: 1987-03-17
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Expires: 2005-03-06
Abstract
Abstract An apparatus wherein a first thin member and a second thin member, the first thin member bearing a pattern, and the second thin member is exposed to the pattern of the first thin member. It includes a vacuum line for discharging a gas existing between the first thin member and the second thin member without close-contact therebetween, and a device for bringing the first and second members into proximity close-contact with each other after said discharging means discharges the gas from between the first thin member and the second thin member.
Inventors
- 👤 Masao Totsuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/20; G03F7/2002; G03F7/2014
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
177 words
An apparatus wherein a first member bearing a pattern and a second member are placed in close contact facing each other and the second member is exposed to a pattern on the first member with radiation through the first member, said apparatus comprising: means for aligning the first and second members is a predetermined positional relation; means provided to cooperate with a first surface of the first member facing the second member for defining a first substantially gas-tight chamber; means provided to cooperate with a second surface of the first member not facing the second member for defining a second substantially gas-tight chamber which is independent of said first gas-tight chamber; and means for supplying a vacuum to said first and second gas-tight chambers, said vacuum supplying means being operative to maintain said first and second gas-tight chambers substantially at the same vacuum and then operative to reduce the vacuum in said second gas-tight chamber as compared with that in said first gas-tight chamber thereby bringing the first and second members into close contact with each other.
Claim 2
Independent Claim
177 words
An apparatus wherein a first member bearing a pattern and a second member are placed in close contact facing each other and the second member is exposed to a pattern on the first member with radiation through the first member, said apparatus comprising: means for aligning the first and second members is a predetermined positional relation; means provided to cooperate with a first surface of the first member facing the second member for defining a first substantially gas-tight chamber; means provided to cooperate with a second surface of the first member not facing the second member for defining a second substantially gas-tight chamber which is independent of said first gas-tight chamber; and means for supplying a vacuum to said first and second gas-tight chambers, said vacuum supplying means being operative to maintain said first and second gas-tight chambers substantially at the same vacuum and then operative to reduce the vacuum in said second gas-tight chamber as compared with that in said first gas-tight chamber thereby bringing the first and second members into close contact with each other.
Claim 3
Dependent Claim
25 words
An apparatus according to claim 1, wherein said vacuum supplying means supplies the vacuum to said first and second gas-tight chambers at the same time.
Claim 4
Dependent Claim
26 words
An apparatus according to claim 1, wherein said vacuum supplying means is operative to reduce the vacuum in said second chamber to an atmospheric pressure level.
Claim 5
Dependent Claim
49 words
An apparatus according to claim 1, wherein said aligning means includes a holder for holding the second member and wherein said apparatus further comprises means provided to cooperate with said holder for defining a third substantially gas-tight chamber which is independent of said first and said second gas-tight chambers.
Claim 6
Dependent Claim
37 words
An apparatus according to claim 4, wherein said vacuum supplying means is operative to supply a vacuum to said third gas-tight chamber at the same time as the vacuum supplied to said first and second gas-tight chambers.
Claim 7
Dependent Claim
37 words
An apparatus according to claim 1, wherein said first gas-tight chamber defining means has a transmitting portion for allowing passage of the radiation with which the second member is exposed to the pattern of the first member.
Claim 8
Dependent Claim
38 words
An apparatus according to claim 6, wherein said aligning means includes a holder for holding the first member and wherein said first gas-tight chamber defining means has an element for elastically forcing the first member to said holder.
Claim 9
Independent Claim
154 words
A method wherein a first member bearing a pattern and a second member are placed in close contact with each other and the second member is exposed to the pattern of the first member with radiation through the first member, said method comprising the steps of: aligning the first and second members in a predetermined positional relation; supplying a vacuum to a first substantially gas-tight chamber which includes a surface of the first member facing the second member and to a second substantially gas-tight chamber which is defined independently from said first gas-tight chamber which includes another surface of the first member not facing the second member, so that said first and said second gas-tight chambers are maintained substantially at the same vacuum; and reducing the vacuum in said second gas-tight chamber as compared with that in said first gas-tight chamber to bring the first and second members into close contact with each other.
Claim 10
Independent Claim
154 words
A method wherein a first member bearing a pattern and a second member are placed in close contact with each other and the second member is exposed to the pattern of the first member with radiation through the first member, said method comprising the steps of: aligning the first and second members in a predetermined positional relation; supplying a vacuum to a first substantially gas-tight chamber which includes a surface of the first member facing the second member and to a second substantially gas-tight chamber which is defined independently from said first gas-tight chamber which includes another surface of the first member not facing the second member, so that said first and said second gas-tight chambers are maintained substantially at the same vacuum; and reducing the vacuum in said second gas-tight chamber as compared with that in said first gas-tight chamber to bring the first and second members into close contact with each other.
Claim 11
Dependent Claim
31 words
A method according to claim 8, wherein said first and second gas-tight chambers are maintained substantially at the same vacuum while keeping a predetermined gap between the first and second members.
Claim 12
Dependent Claim
30 words
A method according to claim 9, wherein the first and second members are brought substantially into contact with each other prior to reducing the vacuum in said second gas-tight chamber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-16 | 1990-09-15 | 1991-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-16 | 1994-09-15 | 1995-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-16 | 1998-09-15 | 1999-03-17 | $7700.00 | Window Closed / Lapsed |