US4650744A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing semiconductor device
Assignee: NEC Electronics Corp
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Filing: 1985-07-17
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Granted: 1987-03-17
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Expires: 2005-07-17
Abstract
Abstract On a film to be etched by the isotropic etching method to form electrodes, wiring layers or the like, a first mask and a second mask are provided. The first mask is used for forming the electrodes, wiring layers or the like. The second mask is used for forming a checking pattern from the film to determine the progress of etching. The second mask comprises a plurality of straight lines of different widths and at least one mark pattern indicating one of the straight lines. Upon progress of the isotropic etching, parts of the film under the narrowest and narrower straight lines of the second mask are completely etched by side etching phenomenon which proceeds under the mask with parts of the film under wider straight lines being survived. The mark of the film transferred from the mark pattern of the second mask indicates the position under a predetermined one of the straight lines of the second mask. A worker can easily recognize whether or not the film exists at that position and determine the progress of etching.
Inventors
- 👤 Haruo Amano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 18:49
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P50/00; H10P50/71; H10W; H10W46/00; H10W46/501
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
219 words
A method of manufacturing a semiconductor device comprising the steps of forming a film on an element forming area of a semiconductor substrate via a first insulating layer and on an area of said semiconducor substrate outside said element forming area via a second insualting layer forming a first mask pattern on a first portion of said film positioned on said element forming area of said semiconductor substrate and a second mask pattern on a second portion of said film positioned on said area of said semiconductor substrate outside said element forming area, said second mask pattern including a plurality of stripes arranged in parallel with each other with predetermined intervals and at least one mark pattern indicating one of said stripes which covers a predetermined area of said second portion of said film, said stripes having different widths and being arrayed in the order from one with a wider width to one with a narrower width, conducting isotropic eteching on said first portion of said film by using said first mask pattern as a mask and on siad second portion of said film by using said second mask pattern as a mask, and inspecting whether said second portion of said film vanishes at said predetermined area indicated by said mark as a result of said isotropic etching process.
Claim 2
Independent Claim
219 words
A method of manufacturing a semiconductor device comprising the steps of forming a film on an element forming area of a semiconductor substrate via a first insulating layer and on an area of said semiconducor substrate outside said element forming area via a second insualting layer forming a first mask pattern on a first portion of said film positioned on said element forming area of said semiconductor substrate and a second mask pattern on a second portion of said film positioned on said area of said semiconductor substrate outside said element forming area, said second mask pattern including a plurality of stripes arranged in parallel with each other with predetermined intervals and at least one mark pattern indicating one of said stripes which covers a predetermined area of said second portion of said film, said stripes having different widths and being arrayed in the order from one with a wider width to one with a narrower width, conducting isotropic eteching on said first portion of said film by using said first mask pattern as a mask and on siad second portion of said film by using said second mask pattern as a mask, and inspecting whether said second portion of said film vanishes at said predetermined area indicated by said mark as a result of said isotropic etching process.
Claim 3
Dependent Claim
13 words
A method of claim 1, in which said mask is made of photo-resist.
Claim 4
Dependent Claim
14 words
A method of claim 1, in which said film is formed of polycrystalline silicon.
Claim 5
Dependent Claim
16 words
A method of claim 1, in which said film is formed of aluminum or aluminum alloy.
Claim 6
Dependent Claim
17 words
A method of claim 1, in which said isotropic etching is a wet etching using etching liquid.
Claim 7
Dependent Claim
17 words
A method of claim 1, in which said isotropic etching is a dry etching using etching gas.
Claim 8
Dependent Claim
21 words
A method of claim 1, in which a difference between the widths of adjacent stripes is 0.3 μm to 0.7 μm.
Claim 9
Independent Claim
150 words
A method of manufacturing a semiconductor device comprising the steps of forming a film on a semiconductor substrate; forming a mask pattern on said film, said mask pattern including a plurality of stripes arranged in parallel with each other at predetermined intervals and having gradually decreasing widths, a first reference mark indicating a first stripe among said plurality of strips, said first stripe being positioned on a first part of said film, and a second reference mark indicating a second stripe among said plurality of stripes, said second stripe being wider than said first stripe and positioned on a second part of said film; and conducting isotropic etching of said film by using said mask pattern as a mask such that said first part of said film indicated by said first reference mark vanishes and said second part of said film indicated by said second reference mark remains after etching.
Claim 10
Independent Claim
150 words
A method of manufacturing a semiconductor device comprising the steps of forming a film on a semiconductor substrate; forming a mask pattern on said film, said mask pattern including a plurality of stripes arranged in parallel with each other at predetermined intervals and having gradually decreasing widths, a first reference mark indicating a first stripe among said plurality of strips, said first stripe being positioned on a first part of said film, and a second reference mark indicating a second stripe among said plurality of stripes, said second stripe being wider than said first stripe and positioned on a second part of said film; and conducting isotropic etching of said film by using said mask pattern as a mask such that said first part of said film indicated by said first reference mark vanishes and said second part of said film indicated by said second reference mark remains after etching.
Claim 11
Dependent Claim
13 words
The method of claim 8, in which said mask is made of photo-resist.
Claim 12
Dependent Claim
14 words
The method of claim 8, in which said film is formed of polycrystalline silicon.
Claim 13
Dependent Claim
17 words
The method of claim 8, in which said film is formed of aluminum or an aluminum alloy.
Claim 14
Dependent Claim
17 words
The method of claim 8, in which said isotropic etching is a wet etching using etching liquid.
Claim 15
Dependent Claim
17 words
The method of claim 8, in which said isotropic etching is a dry etching using etching gas.
Claim 16
Dependent Claim
21 words
The method of claim 8, in which the difference between the widths of adjacent strips is 0.3 μm to 0.7 μm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-03-16 | 1990-09-15 | 1991-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-16 | 1994-09-15 | 1995-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-16 | 1998-09-15 | 1999-03-17 | $7700.00 | Window Closed / Lapsed |