US4649088A
Expired / Lapsed
US
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Antireflective film for photoelectric devices
Assignee: Mitsubishi Electric Corp
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Filing: 1985-02-22
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Granted: 1987-03-10
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Expires: 2005-02-22
Abstract
Abstract An antireflective film (7, 8) for photoelectric devices comprises at least a layer having a refractive index being the largest on the side abutting on the light receiving surface (2a) or the light emitting surface of a photoelectric device and continuously decreasing according to the distance outward from said side.
Inventors
- 👤 Kotaro Mitsui
- 👤 Mari Kato
- 👤 Takao Oda
- 👤 Susumu Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 05:56
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/315; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/24992
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
85 words
An antireflective film, for coating a light-receiving or a light-emitting photoelectric surface, characterized in that: said film contains at least one layer comprising a nitride, an oxynitride and an oxide of an element selected from the group consisting of tantalum, aluminum and silicon, such that in said layer the local oxygen content is smallest closest to said surface, the local nitrogen content is smallest farthest away from said surface, and the local oxygen-to-nitrogen ratio varies continuously with distance across the thickness of said layer therebetween.
Claim 2
Dependent Claim
85 words
An antireflective film, for coating a light-receiving or a light-emitting photoelectric surface, characterized in that: said film contains at least one layer comprising a nitride, an oxynitride and an oxide of an element selected from the group consisting of tantalum, aluminum and silicon, such that in said layer the local oxygen content is smallest closest to said surface, the local nitrogen content is smallest farthest away from said surface, and the local oxygen-to-nitrogen ratio varies continuously with distance across the thickness of said layer therebetween.
Claim 3
Dependent Claim
51 words
An antireflective film in accordance with claim 1, characterized in that: said antireflective film includes a first layer containing a nitride, an oxynitride, and an oxide of tantalum or aluminum on said surface and a second layer containing a nitride, an oxynitride and an oxide of silicon on said first layer.
Claim 4
Dependent Claim
27 words
An antireflective film in accordance with claim 2, characterized in that: said first layer and said second layer have the same reflectance in the interfacial region therebetween.
Claim 5
Dependent Claim
33 words
An antireflective film in accordance with claim 1, characterized in that: said local oxygen content closest to said surface is zero, and said local nitrogen content farthest away from said surface is zero.
Claim 6
Dependent Claim
51 words
An antireflective film in accordance with claim 4, characterized in that: said antireflective film includes a first layer containing a nitride, an oxynitride, and an oxide of tantalum or aluminum on said surface and a second layer containing a nitride, an oxynitride and an oxide of silicon on said first layer.
Claim 7
Dependent Claim
27 words
An antireflective film in accordance with claim 5, characterized in that: said first layer and said second layer have the same reflectance in the interfacial region therebetween.
Claim 8
Dependent Claim
90 words
An antireflective film, for a light-receiving or a light-emitting surface of a photoelectric device, comprising: at least one layer having a refractive index that is largest on the side abutting on said light-receiving or light-emitting surface and continuously decreasing with distance outwardly from said side across said antireflective film; wherein said antireflective film includes a first layer containing a nitride, an oxynitride, and an oxide of tantalum or aluminum on said surface and a second layer containing a nitride, an oxynitride and an oxide of silicon on said first layer.
Claim 9
Dependent Claim
90 words
An antireflective film, for a light-receiving or a light-emitting surface of a photoelectric device, comprising: at least one layer having a refractive index that is largest on the side abutting on said light-receiving or light-emitting surface and continuously decreasing with distance outwardly from said side across said antireflective film; wherein said antireflective film includes a first layer containing a nitride, an oxynitride, and an oxide of tantalum or aluminum on said surface and a second layer containing a nitride, an oxynitride and an oxide of silicon on said first layer.
Claim 10
Dependent Claim
66 words
An antireflective film, for a light-receiving or a light-emitting surface of a photoelectric device, comprising: at least one layer having a refractive index that is largest on the side abutting on said light-receiving or light-emitting surface and continuously decreasing with distance outwardly from said side across said antireflective film; wherein said first layer and said second layer have the same reflectance in the interfacial region therebetween.
Claim 11
Dependent Claim
66 words
An antireflective film, for a light-receiving or a light-emitting surface of a photoelectric device, comprising: at least one layer having a refractive index that is largest on the side abutting on said light-receiving or light-emitting surface and continuously decreasing with distance outwardly from said side across said antireflective film; wherein said first layer and said second layer have the same reflectance in the interfacial region therebetween.
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