← Back to Patent Explorer
US4428980A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for forming an inhomogeneous optical layer

Assignee: Ulvac Seimaku KK
•
Filing: 1983-05-03
•
Granted: 1984-01-31
•
Expires: 2003-05-03
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract An inhomogeneous optical layer is formed on a surface of a substrate in a vacuum coater, in which the substrate is moved along a travelling path having path sections and two substances are evaporated from their respective sources and both of the substances are deposited on a common surface section of the surface. In such an operation, the deposition rate of each of the substances is varied monotoneously along the path in each of the path section in order that, in a layer formed by the deposition on the substrate, the content of each of the substances is varied monotonously in the direction of thickness. If the refractive index of one of the substances is different from that of the other of the substances, the resultant refractive index in the layer is varied monotoneously in the direction of the thickness of the layer.

Inventors

  • 👤 Kazuo Nakamura
  • 👤 Hirotsugu Mizorogi
  • 👤 Akihiko Isao

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 05:59
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/02; C23C14/027; C23C14/22; C23C14/56; C23C14/562; G; G02; G02B; G02B1/00; G02B1/10

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 76 words
A method for forming an inhomogeneous optical layer on a surface of a substrate, in which, while the substrate is moved along a travelling path having a path section or a number of path sections, two different evaporation substances evaporated from their respective source means is deposited on said surface with the deposition rate of each of these substances being varied monotonously along the travelling path in the path section or each of the path sections.
Claim 2
Independent Claim 76 words
A method for forming an inhomogeneous optical layer on a surface of a substrate, in which, while the substrate is moved along a travelling path having a path section or a number of path sections, two different evaporation substances evaporated from their respective source means is deposited on said surface with the deposition rate of each of these substances being varied monotonously along the travelling path in the path section or each of the path sections.
Claim 3
Dependent Claim 66 words
A method according to claim 1 in which the incident angle and the flight length of each of the evaporation substances are varied monotonously along the travelling path in the path section or each of the path sections in order that the deposition rate of each of these substances is varied monotonously along the travelling path in the path section or each of the path sections.

References Cited (Backward Citations)

US3520716A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1987-01-30 1987-08-01 1988-01-31 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1991-01-30 1991-08-01 1992-01-31 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1995-01-30 1995-08-01 1996-01-31 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag