US4646429A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making magnetic head
Assignee: Fujifilm Holdings Corp
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Filing: 1983-10-19
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Granted: 1987-03-03
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Expires: 2003-10-19
Abstract
Abstract A main magnetic pole of a magnetic head for perpendicular magnetization is made in a sputtering apparatus by continuously moving a shielding plate closely to a substrate in a space between the substrate and a target electrode standing face to face with each other, whereby the thickness of a soft-magnetic metal film formed on the substrate by sputtering is continuously changed.
Inventors
- 👤 Keiji Mori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 21:10
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/127; G11B5/1278; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044; H; H01; H01F; H01F41/00; H01F41/14; H01F41/18; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/4902; Y10T29/49021; Y10T29/49032; Y10T29/49036; Y10T29/49043; Y10T29/49048
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
106 words
A method of making a magnetic head in a sputtering apparatus comprising the steps of: sputtering a soft-magnetic metal film on a substrate spaced from and standing face to face to a target electrode and, simultaneously continuously moving a shielding plate closely to said substrate in a direction transverse to the substrate within the space between said substrate and said target electrode to progressively expose portions of said substrate as said sputtering occurs whereby said sputtered soft-magnetic metal film is formed with a thickness which changes continuously in the longitudinal direction across the substrate to make a magnetic pole of a magnetic head for perpendicular magnetization.
Claim 2
Independent Claim
106 words
A method of making a magnetic head in a sputtering apparatus comprising the steps of: sputtering a soft-magnetic metal film on a substrate spaced from and standing face to face to a target electrode and, simultaneously continuously moving a shielding plate closely to said substrate in a direction transverse to the substrate within the space between said substrate and said target electrode to progressively expose portions of said substrate as said sputtering occurs whereby said sputtered soft-magnetic metal film is formed with a thickness which changes continuously in the longitudinal direction across the substrate to make a magnetic pole of a magnetic head for perpendicular magnetization.
Claim 3
Dependent Claim
43 words
A method as defined in claim 1 further comprising the steps of fusing a low-melting point glass film sputtered on a second substrate to said sputtered soft-magnetic metal film formed on said first substrate, thereby to form a stack, and cutting said stack.
Claim 4
Dependent Claim
21 words
A method as defined in claim 1 wherein said shielding plate is provided with a plurality of rectangular openings perforated therethrough.
Claim 5
Dependent Claim
39 words
A method as defined in claim 1 wherein said step of continuously moving takes place at a speed that is a function of the different necessary film thicknesses at ends of said substrate divided by a normal sputtering rate.
Claim 6
Dependent Claim
34 words
A method as defined in claim 1 wherein the thickness of the sputtered metal film varies linearly from a maximum thickness t0 to a minimum thickness t1 as said shield moves across said substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-02 | 1990-09-01 | 1991-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-02 | 1994-09-01 | 1995-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-02 | 1998-09-01 | 1999-03-03 | $7700.00 | Window Closed / Lapsed |