Method and apparatus for producing x-ray pulses

Claim 1

A method for producing x-rays comprising the steps of: discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and ionizing the shell to yield a compressed volume of plasma which radiates x-rays.

Claim 2

A method for producing x-rays comprising the steps of: discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and ionizing the shell to yield a compressed volume of plasma which radiates x-rays.

Claim 4

A method for replicating a pattern onto an x-ray sensitive substrate comprising the steps of: discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; ionizing the gas shell to yield a dense compressed volume of plasma which radiates x-rays; and directing the x-rays through a mask and onto a resist-coated substrate to expose the resist and fix the pattern thereon.

Claim 5

A method for replicating a pattern onto an x-ray sensitive substrate comprising the steps of: discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; ionizing the gas shell to yield a dense compressed volume of plasma which radiates x-rays; and directing the x-rays through a mask and onto a resist-coated substrate to expose the resist and fix the pattern thereon.

Claim 8

An apparatus for producing x-rays comprising: means for discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and means for ionizing the shell to yield a dense volume of plasma which radiates x-rays.

Claim 9

An apparatus for producing x-rays comprising: means for discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and means for ionizing the shell to yield a dense volume of plasma which radiates x-rays.

Claim 14

An apparatus for producing x-rays comprising: a cathode electrode having a tubular body with a hemispherical head at one end thereof; a cylindrical anode electrode surrounding the head and body of said cathode electrode; a first pair of laterally spaced conductive plates each in contact with said anode electrode; a second pair of laterally spaced conductive plates, each underlying a separate one of said first pair of conductive plates and each being in contact with said cathode electrode, said first and second plates transmitting a voltage to said electrodes; a pair of insulator means, each separating one of said first pair of plates from one of said second pair of plates a plurality of inclined passages arranged in the top of said anode electrode; and a fast-acting gas valve mounted on the top of said anode electrode for discharging a stream of gas through each of the plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; means for transmitting a voltage to the anode and cathode electrodes to create an electric field therebetween to ionize the gas shell.

Claim 15

An apparatus for producing x-rays comprising: a cathode electrode having a tubular body with a hemispherical head at one end thereof; a cylindrical anode electrode surrounding the head and body of said cathode electrode; a first pair of laterally spaced conductive plates each in contact with said anode electrode; a second pair of laterally spaced conductive plates, each underlying a separate one of said first pair of conductive plates and each being in contact with said cathode electrode, said first and second plates transmitting a voltage to said electrodes; a pair of insulator means, each separating one of said first pair of plates from one of said second pair of plates a plurality of inclined passages arranged in the top of said anode electrode; and a fast-acting gas valve mounted on the top of said anode electrode for discharging a stream of gas through each of the plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; means for transmitting a voltage to the anode and cathode electrodes to create an electric field therebetween to ionize the gas shell.

Claim 16

An apparatus for producing x-rays comprising: a cylindrical anode electrode; a tubular cathode electrode concentric within, and surrounded by said anode electrode, said cathode electrode having a hemispherical head provided with a plurality of inclined openings therethrough; a fast-acting gas valve for discharging a gas through the plurality of inclined openings in the cathode electrode to produce a plurality of inclined gas streams between the anode and cathode electrodes, the inclined gas streams forming the outline of a shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and means for transmitting a voltage to the anode and cathode electrodes to create an electric field therebetween to ionize the gas shell, so as to transform the shell into a sheath of plasma which implodes, yielding a compressed volume of plasma which radiates x-rays.

Claim 17

An apparatus for producing x-rays comprising: a cylindrical anode electrode; a tubular cathode electrode concentric within, and surrounded by said anode electrode, said cathode electrode having a hemispherical head provided with a plurality of inclined openings therethrough; a fast-acting gas valve for discharging a gas through the plurality of inclined openings in the cathode electrode to produce a plurality of inclined gas streams between the anode and cathode electrodes, the inclined gas streams forming the outline of a shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; and means for transmitting a voltage to the anode and cathode electrodes to create an electric field therebetween to ionize the gas shell, so as to transform the shell into a sheath of plasma which implodes, yielding a compressed volume of plasma which radiates x-rays.

Claim 18

An apparatus for replicating a pattern onto a substrate having a resist coating thereon comprising: a housing; a baffle chamber mounted at one end of said housing for mounting an x-ray sensitive substrate; a plasma x-ray source mounted to the other end of said housing in registration with said baffle chamber for producing x-rays which are directed into said baffle chamber said x-ray source including: means for discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; means for ionizing the gas shell to yield a dense line of plasma which radiates x-rays; and a mask contained within said baffle chamber and interposed between said x-ray source and said substrate for selectively passing x-rays therethrough and onto the resist coating on said substrate.

Claim 19

An apparatus for replicating a pattern onto a substrate having a resist coating thereon comprising: a housing; a baffle chamber mounted at one end of said housing for mounting an x-ray sensitive substrate; a plasma x-ray source mounted to the other end of said housing in registration with said baffle chamber for producing x-rays which are directed into said baffle chamber said x-ray source including: means for discharging a gas through each of a plurality of inclined passageways to produce a plurality of inclined gas streams which form a gas shell whose surface is traversed by each of the inclined streams at a predefined angle relative to a longitudinal path along the surface which is parallel to the axis of the shell; means for ionizing the gas shell to yield a dense line of plasma which radiates x-rays; and a mask contained within said baffle chamber and interposed between said x-ray source and said substrate for selectively passing x-rays therethrough and onto the resist coating on said substrate.