Pulsed electromagnetic radiation source having a barrier for discharged debris

Claim 2

A pulsed electromagnetic radiation source of the type wherein the generation of an electromagnetic radiation pulse also simultaneously discharges physical debris in the radiated direction, the improvement comprising: a shutter located in the path of the electromagnetic radiation and sufficiently far from the source of said radiation such that a pulse of electromagnetic radiation and the simultaneousely discharged debris arrive at said shutter at different times due to an inherent difference in propagation velocity; and means for synchronizing generation of an electromagnetic radiation pulse with movement of said shutter such that said shutter is open when the electromagnetic pulse arrives at said shutter and thereby passes said electromagnetic radiation pulse and is closed when the simultaneously discharged debris arrives at said shutter and thereby blocks propagation of said debris.

Claim 3

A pulsed electromagnetic radiation source as defined in claim 1 wherein the wavelength of generated electromagnetic radiation is within the range of from about 1 Angstrom to about 2000 Angstroms.

Claim 4

A pulsed electromagnetic radiation source as defined in claim 2 wherein the wavelength of generated electromagnetic radiation is within the microcircuit lithography x-ray range of about 6 Angstroms to about 24 Angstroms.

Claim 5

A pulsed electromagnetic radiation source as defined in claim 2 wherein the wavelength of generated electromagnetic radiation is within the microcircuit lithography ultraviolet range of about 600 Angstroms to about 2000 Angstroms.

Claim 6

A pulsed electromagnetic radiation source as defined in claim 1 wherein the electromagnetic radiation is generated by a plasma.

Claim 7

A pulsed electromagnetic radiation source as defined in claim 1 wherein the electromagnetic radiation is generated by laser beam impact with a target surface.

Claim 8

A pulsed electromagnetic radiation source as defined in claim 1 wherein the electromagnetic radiation is generated by a spark discharge through a gas.

Claim 9

A pulsed electromagnetic radiation source as defined in claim 1 wherein said shutter comprises a rotatable disk having at least one opening therein for passing electromagnetic radiation.

Claim 10

A pulsed electromgnetic radiation source as defined in claim 8 wherein said opening is a rectangular notch at the edge of said disk.

Claim 11

A pulsed electromagnetic radiation source as defined in claim 8 wherein said disk carries a timing mark for synchronizing the generation of an electromagnetic radiation pulse with said disk as said disk rotates.

Claim 12

A pulsed electromagnetic radiation source as defined in claim 10 wherein said timing mark is an aperture, a light beam being passed by said aperture to a detector when said aperture is in a predefined position.

Claim 13

A barrier for debris discharged from a pulsed electromagnetic radiation source, comprising: a shutter located in the path of the electromagnetic radiation and sufficiently far from the source of said radiation such that a pulse of electromagnetic radiation and simultaneously discharged debris become separated from each other and arrive at said shutter at different times due to an inherent difference in propagation speed; and means for synchronizing generation of an electromagnetic radiation pulse with movement of said shutter such that said shutter is open when the electromagnetic pulse arrives at said shutter, said shutter thereby passing said electromagnetic radiation pulse and said shutter is closed when the simultaneously discharged debris arrives at said shutter, said shutter thereby blocking propagation of said debris.

Claim 14

A barrier for debris discharged from a pulsed electromagnetic radiation source, comprising: a shutter located in the path of the electromagnetic radiation and sufficiently far from the source of said radiation such that a pulse of electromagnetic radiation and simultaneously discharged debris become separated from each other and arrive at said shutter at different times due to an inherent difference in propagation speed; and means for synchronizing generation of an electromagnetic radiation pulse with movement of said shutter such that said shutter is open when the electromagnetic pulse arrives at said shutter, said shutter thereby passing said electromagnetic radiation pulse and said shutter is closed when the simultaneously discharged debris arrives at said shutter, said shutter thereby blocking propagation of said debris.

Claim 15

Microcircuit lithography apparatus of the type wherein a microcircuit wafer may be exposed through an adjacent mask to electromagnetic radiation coming from a pulsed source, the improvement comprising a barrier for debris discharged from the pulsed electromagnetic radiation source, said barrier comprising: a shutter located between the electromagnetic radiation source and the mask and sufficiently far from the source of said radiation such that a pulse of electromagnetic radiation and simultaneously discharged debris become separated from each other and arrive at said shutter at different times due to an inherent difference in propagation speed; and means for synchronizing generation of an electromagnetic radiation pulse with movement of said shutter such that said shutter is open when the electromagnetic pulse arrives at said shutter, said shutter thereby passing said electromagnetic radiation pulse to said mask and said shutter is closed when the simultaneously discharged debris arrives at said shutter, said shutter thereby blocking propagation of said debris to said mask.

Claim 16

Microcircuit lithography apparatus of the type wherein a microcircuit wafer may be exposed through an adjacent mask to electromagnetic radiation coming from a pulsed source, the improvement comprising a barrier for debris discharged from the pulsed electromagnetic radiation source, said barrier comprising: a shutter located between the electromagnetic radiation source and the mask and sufficiently far from the source of said radiation such that a pulse of electromagnetic radiation and simultaneously discharged debris become separated from each other and arrive at said shutter at different times due to an inherent difference in propagation speed; and means for synchronizing generation of an electromagnetic radiation pulse with movement of said shutter such that said shutter is open when the electromagnetic pulse arrives at said shutter, said shutter thereby passing said electromagnetic radiation pulse to said mask and said shutter is closed when the simultaneously discharged debris arrives at said shutter, said shutter thereby blocking propagation of said debris to said mask.