Digital pressure transducer and corrections circuitry system

Claim 1

A digital pressure measuring system, comprising: a vibrating cylinder pressure transducer having a vibrating cylinder located between a vacuum reference chamber and an input pressure chamber wherein said vibrating cylinder has resonant frequency induced electromagnetic coils and wherein the change in resonant frequency provides a measurement of the input pressure of said input pressure chamber; pickup coil means provided to detect the resonant frequency of said vibrating cylinder; drive means including a means to excite said electromagnetic coils and a means to measure and shape the output of said pickup coil means in order to provide a raw frequency output wherein said drive means further includes a means for feeding back said raw frequency output to said means to excite said electromagnetic coil wherein said input pressure is related to said raw frequency (F) by the characterizing equation P=K 0 +K 1 F 2 +K 2 F 4 ; diode means for providing a voltage output indicative of the temperature of said transducer; signal conditioning means for amplifying the output of said diode means to provide a diode junction voltage (V d ) wherein K 0 , K 1 and K 2 are related to said voltage V d by K 0 =C 00 +C 01 V d +C 02 V d 2 +C 03 V d 3 +C 04 V d 4 , K 1 =C 10 +C 11 V d +C 12 V d 2 +C 13 V d 3 +C 14 V d 4 and K 2 =C 20 +C 21 V d +C 22 V d 2 +C 23 V d 3 +C 24 V d 4 with C 00 -C 04 , C 10 -C 14 , C 20 -C 24 being predetermined constant unique to said vibration transducers; processor compensation means connected to receive said junction voltage V d and said raw frequency output F in order to provide an error corrected digital input pressure measurement, said compensation means comprising: microcomputer means including an analog/digital converter for receiving said output junction voltage V d and outputting a digital equivalent of said voltage V d , said microcomputer further including an EPROM storing said predetermined constants; counter means including a first counter means receiving said raw frequency output and outputting a first signal after receiving a predetermined number of periods of said raw frequency, a second counter means for receiving said raw frequency output and counting pulses from a temperature compensated oscillator means until said first signal is output from said first counter means to thereby provide an accurate count of said raw frequency; and arithmetic processor means for calculating and processing said characterizing equation; wherein said system further comprises a compensator input/output means for outputting the results of said calculation and processing of said characterizing equation in order to provide an accurate, error corrected digital measurement output of said input pressure.