Patent US1401052A successfully refreshed from Google Patents.
Patent US4641257A successfully refreshed from Google Patents.
US4641257A
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Measurement method and apparatus for alignment
Assignee: Canon Inc
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Filing: 1984-07-02
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Granted: 1987-02-03
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Expires: 2004-07-02
Abstract
Abstract A measurement apparatus, includes a detector for detecting marks of plural objects to produce a series of signals; a peak detector for detecting peak values of the signals; a device for determining a slice level for each of the peak values detected by the peak detector; and a comparator for sequentially comparing the signals with respective slice levels determined by the slice level determining device and determining an interval between the marks on the basis of the comparison.
Inventors
- 👤 Naoki Ayata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:38
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7088
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
107 words
A measurement apparatus, comprising: detecting means for detecting a mark on each of a plurality of objects and for producing a signal having a peak value in response to the detection of each of the marks, so as to form a series of signals; peak detecting means for detecting the peak values of the signals; means for determining a slice level for each of the peak values detected by said peak detecting means; and means for sequentially comparing the signals with their respective slive levels, as determined by said slice level determining means, and for determining an interval between the marks on the basis of the comparison.
Claim 2
Dependent Claim
107 words
A measurement apparatus, comprising: detecting means for detecting a mark on each of a plurality of objects and for producing a signal having a peak value in response to the detection of each of the marks, so as to form a series of signals; peak detecting means for detecting the peak values of the signals; means for determining a slice level for each of the peak values detected by said peak detecting means; and means for sequentially comparing the signals with their respective slive levels, as determined by said slice level determining means, and for determining an interval between the marks on the basis of the comparison.
Claim 3
Dependent Claim
34 words
An apparatus according to claim 1, wherein the detecting means is adapted to detect a plurality of marks on a mask having an integrated circuit pattern and a plurality of marks on a wafer.
Claim 4
Dependent Claim
23 words
An apparatus according to claim 1, further comprising means for aligning the objects in accordance with the interval determined by said comparing means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-02 | 1990-08-04 | 1991-02-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-02 | 1994-08-04 | 1995-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-02 | 1998-08-04 | 1999-02-03 | $7700.00 | Window Closed / Lapsed |