Patent US4637342A successfully refreshed from Google Patents.
US4637342A
Expired / Lapsed
US
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Vacuum processing apparatus
Assignee: Canon Inc
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Filing: 1985-02-26
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Granted: 1987-01-20
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Expires: 2005-02-26
Abstract
Abstract A vacuum processing apparatus for applying a vacuum working process to a substrate to be processed by a plurality of processing steps comprises vacuum containers exclusively for use for processing disposed in place for each of the processing steps, and a vacuum container exclusively for use for conveyance movable between the vacuum containers exclusively for use for processing. The vacuum containers are provided with opening-closing gates which can be connected to each other. The substrate to be processed is transferably movable between the vacuum containers exclusively for use for processing and the vacuum container exclusively for use for conveyance.
Inventors
- 👤 Osamu Kamiya
- 👤 Yasutomo Fujiyama
- 👤 Kyosuke Ogawa
- 👤 Takashi Kurokawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 05:50
CPC Classifications
B; B01; B01J; B01J3/00; B01J3/006; C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; H; H01; H01J; H01J37/00; H01J37/02; H01J37/18
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
105 words
A vacuum processing apparatus for applying a vacuum working process to a substrate to be processed by a plurality of processing steps, characterized in that said apparatus comprises vacuum containers exclusively for use for processing disposed in place for each of said processing steps, and a vacuum container exclusively for use for conveyance movable between said vacuum containers exclusively for use for processing, said vacuum containers are provided with opening-closing gates which can be connected to each other, and said substrate to be processed is transferably movable between said vacuum containers exclusively for use for processing and said vacuum container exclusively for use for conveyance.
Claim 2
Dependent Claim
105 words
A vacuum processing apparatus for applying a vacuum working process to a substrate to be processed by a plurality of processing steps, characterized in that said apparatus comprises vacuum containers exclusively for use for processing disposed in place for each of said processing steps, and a vacuum container exclusively for use for conveyance movable between said vacuum containers exclusively for use for processing, said vacuum containers are provided with opening-closing gates which can be connected to each other, and said substrate to be processed is transferably movable between said vacuum containers exclusively for use for processing and said vacuum container exclusively for use for conveyance.
Claim 3
Dependent Claim
19 words
A vacuum processing apparatus according to claim 1, having a plurality of vacuum containers exclusively for use for processing.
Claim 4
Dependent Claim
30 words
A vacuum processing apparatus according to claim 1, having a plurality of vacuum containers exclusively for use for processing and a plurality of vacuum containers exclusively for use for conveyance.
Claim 5
Dependent Claim
23 words
A vacuum processing apparatus according to claim 1, wherein said vacuum containers exclusively for use for processing are for processing a formed film.
Claim 6
Dependent Claim
17 words
A vacuum processing apparatus according to claim 1, further having a container for receiving the unprocessed substrate.
Claim 7
Dependent Claim
42 words
A vacuum processing apparatus according to claim 1, further having a container exclusively for use for post-processing into which the processed substrate removed from said vacuum container exclusively for use for processing is received through said container exclusively for use for conveyance.
Claim 8
Dependent Claim
19 words
A vacuum processing apparatus according to claim 6, wherein said container exclusively for use for post-processing has cooling means.
Claim 9
Dependent Claim
20 words
A vacuum processing apparatus according to claim 1, wherein said vacuum container exclusively for use for conveyance is linearly movable.
Claim 10
Dependent Claim
20 words
A vacuum processing apparatus according to claim 1, wherein said vacuum container exclusively for use for conveyance is rotatively movable.
References Cited (Backward Citations)
US3915117A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-19 | 1990-07-21 | 1991-01-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-19 | 1994-07-21 | 1995-01-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-19 | 1998-07-21 | 1999-01-20 | $7700.00 | Window Closed / Lapsed |