US4634972A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for measuring low-frequency signal progressions with an electron probe inside integrated circuits
Assignee: Siemens AG
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Filing: 1984-07-20
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Granted: 1987-01-06
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Expires: 2004-07-20
Abstract
Abstract A method for measuring a low-frequency signal progression at a measuring point of a specimen by use of an electron probe. A load on the circuit is kept as low as possible by employing a pulsed electron probe during a search of the measuring points. The pulsed electron probe may also be employed for actual measurement. By providing a pulse repitition frequency of the electron probe which is independant of the operating frequency of the circuit specimen, a phase shift of the primary electron pulses relative to the low-frequency signal progression is not necessary for real time measurement of the low-frequency signal progression.
Inventors
- 👤 Peter Fazekas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:35
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/305
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
114 words
A method for measurement of a signal progression at a given operating frequency at measuring points of a circuit specimen by use of an electron probe, comprising the steps of: employing a pulsed electron probe during a search for the measuring points having the operating frequency signal progression thereon and also for actual measurement of the operating frequency signal progression at the measuring points; providing a pulse repetition frequency of said electron probe which is independent of the operating frequency of said circuit specimen; measuring resulting secondary electrons with a detecting spectrometer; and processing detected signals with a gate circuit, the gate circuit being triggered synchronously with the electron probe via a delay element.
Claim 2
Independent Claim
114 words
A method for measurement of a signal progression at a given operating frequency at measuring points of a circuit specimen by use of an electron probe, comprising the steps of: employing a pulsed electron probe during a search for the measuring points having the operating frequency signal progression thereon and also for actual measurement of the operating frequency signal progression at the measuring points; providing a pulse repetition frequency of said electron probe which is independent of the operating frequency of said circuit specimen; measuring resulting secondary electrons with a detecting spectrometer; and processing detected signals with a gate circuit, the gate circuit being triggered synchronously with the electron probe via a delay element.
Claim 3
Dependent Claim
36 words
A method according to claim 1 including the step of providing a pulse repetition frequency of said electron probe which is at least one order of magnitude higher than the operating frequency of said circuit specimen.
Claim 4
Dependent Claim
17 words
A method according to claim 1 including the step of recording test results with a storage oscilloscope.
Claim 5
Dependent Claim
17 words
A method according to claim 1 including the step of recording test results with a transient recorder.
Claim 6
Dependent Claim
17 words
A method according to claim 1 including the step of recording test results with a processing unit.
Claim 7
Dependent Claim
17 words
A method according to claim 1 including the step of recording test results with a logic analyzer.
Claim 8
Dependent Claim
17 words
A method according to claim 1 including the step of recording test results with an X-Y plotter.
Claim 9
Dependent Claim
62 words
A method according to claim 1 including the steps of employing a gate circuit for the signal processing, providing a control gain amplifier connected to an output of the gate circuit, and connecting a control loop from an output of the control gain amplifier to control the voltage at a retarding electrode of the spectrometer, said spectrometer comprising a retarding field spectrometer.
Claim 10
Independent Claim
122 words
A method for measurement of a relatively lower frequency signal progression of a measurement point of a circuit specimen with the use of an electron probe, comprising the steps of: employing a pulsed electron probe during a search for a measuring point and for measurement of the signal progression; measuring resulting secondary electrons with a detecting spectrometer; providing a pulse repetition frequency of the electron probe which is independent of and substantially higher than the low frequency of the signal progression at the measuring point of the circuit specimen; and employing a gate circuit with a sample and hold input connected to receive signals from the spectrometer, and said gate circuit being triggered synchronously with said electron probe via a delay element.
Claim 11
Independent Claim
122 words
A method for measurement of a relatively lower frequency signal progression of a measurement point of a circuit specimen with the use of an electron probe, comprising the steps of: employing a pulsed electron probe during a search for a measuring point and for measurement of the signal progression; measuring resulting secondary electrons with a detecting spectrometer; providing a pulse repetition frequency of the electron probe which is independent of and substantially higher than the low frequency of the signal progression at the measuring point of the circuit specimen; and employing a gate circuit with a sample and hold input connected to receive signals from the spectrometer, and said gate circuit being triggered synchronously with said electron probe via a delay element.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-05 | 1990-07-07 | 1991-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-05 | 1994-07-07 | 1995-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-05 | 1998-07-07 | 1999-01-06 | $7700.00 | Window Closed / Lapsed |