Patent US4630093A successfully refreshed from Google Patents.
US4630093A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer of semiconductors
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1984-11-20
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Granted: 1986-12-16
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Expires: 2004-11-20
Abstract
Abstract Identification of the front surface and whether the front surface has a mesa direction for wafers of compound semiconductors belonging to group III-V have a crystalline structure of the zinc blende type. The wafer has asymmetric peripheral edge with regard to a middle plane to denote the front surface. Another asymmetry as well as the edge asymmetry determines the front surface and the mesa direction on the surface. The other asymmetry is an orientation flat in a circular wafer. The asymmetry of the peripheral edge is given by the half round whose curvature changes in the direction of the thickness, two slanting parts whose lengths are different or a slanting part or a perpendicular part which are formed in succession in the direction of the thickness on the peripheral edge and so on.
Inventors
- 👤 Jun Yamaguchi
- 👤 Osamu Shikatani
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:34
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/128; H10D; H10D62/00; H10D62/10; H10D62/117; H10P90/126; H10P90/18; H10W; H10W46/00; H10W46/201; Y; Y10; Y10S; Y10S148/00; Y10S148/161; Y10S438/00; Y10S438/975; Y10T; Y10T428/00; Y10T428/21; Y10T428/219
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
55 words
A semiconductor wafer comprising: a group III-V compound crystal having a front and rear surface and an asymmetric peripheral edge, said edge being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface.
Claim 2
Dependent Claim
55 words
A semiconductor wafer comprising: a group III-V compound crystal having a front and rear surface and an asymmetric peripheral edge, said edge being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface.
Claim 3
Dependent Claim
75 words
A semiconductor wafer comprising: a group III-V compound crystal having generally circular front and rear surfaces with an orientation flat along a cleavage plane of the crystal and an asymmetric peripheral edge, said edge being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
Claim 4
Dependent Claim
75 words
A semiconductor wafer comprising: a group III-V compound crystal having generally circular front and rear surfaces with an orientation flat along a cleavage plane of the crystal and an asymmetric peripheral edge, said edge being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
Claim 5
Dependent Claim
66 words
A semiconductor wafer comprising: a group III-V compound crystal having generally square front and rear surfaces with one to three asymmetric peripheral edges, said edges being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
Claim 6
Dependent Claim
66 words
A semiconductor wafer comprising: a group III-V compound crystal having generally square front and rear surfaces with one to three asymmetric peripheral edges, said edges being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
Claim 7
Dependent Claim
65 words
A semiconductor wafer comprising: a group III-V compound crystal having rectangular front and rear surfaces with one to four asymmetric peripheral edges, said edges being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
Claim 8
Dependent Claim
65 words
A semiconductor wafer comprising: a group III-V compound crystal having rectangular front and rear surfaces with one to four asymmetric peripheral edges, said edges being asymmetric with regard to a middle plane parallel to and equidistant from said front surface and said rear surface, wherein the structure of said wafer permits easy determination of said front surface and the mesa direction on said front surface.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-15 | 1990-06-16 | 1990-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-15 | 1994-06-16 | 1994-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-15 | 1998-06-16 | 1998-12-16 | $7700.00 | Window Closed / Lapsed |