US4629859A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Enhanced evaporation from a laser-heated target
Assignee: BP Corp North America Inc
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Filing: 1985-04-12
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Granted: 1986-12-16
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Expires: 2005-04-12
Abstract
Abstract The rate of evaporation of material from a laser-heated target is enhanced by coating the target with a layer of condensed substantially inert gas.
Inventors
- 👤 K. Virupaksha Reddy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 16:00
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/12; B23K26/123; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
66 words
A method for evaporating material from a target which comprises the steps of: (a) cooling a target and condensing a layer of substantially inert gas on said cooled target to produce a coated target; and (b) irradiating said coated target with coherent light of a wavelength which is absorbed by the target, wherein the intensity of said light is effective to evaporate material from said target.
Claim 2
Independent Claim
66 words
A method for evaporating material from a target which comprises the steps of: (a) cooling a target and condensing a layer of substantially inert gas on said cooled target to produce a coated target; and (b) irradiating said coated target with coherent light of a wavelength which is absorbed by the target, wherein the intensity of said light is effective to evaporate material from said target.
Claim 3
Dependent Claim
14 words
The method as set forth in claim 1 wherein said coherent light is pulsed.
Claim 4
Dependent Claim
34 words
The method as set forth in claim 2 wherein said target is comprised of a material having a thermal conductivity which is greater than about 1.00 W cm -1 K -1 at 25° C.
Claim 5
Dependent Claim
24 words
The method as set forth in claim 3 wherein said gas is selected from the group consisting of neon, argon, krypton, xenon and nitrogen.
Claim 6
Independent Claim
108 words
A method for depositing a film on a substrate which comprises the steps of: (a) cooling a target and condensing a layer of substantially inert gas on said cooled target to produce a coated target, wherein said target is comprised of a solid and said gas is selected from the group consisting of neon, argon, krypton, xenon and nitrogen; (b) irradiating said coated target with coherent light of a wavelength which is absorbed by the target, wherein the intensity of said light is effective to evaporate material from said target; and (c) condensing at least a portion of said evaporated target material as a film on a substrate.
Claim 7
Independent Claim
108 words
A method for depositing a film on a substrate which comprises the steps of: (a) cooling a target and condensing a layer of substantially inert gas on said cooled target to produce a coated target, wherein said target is comprised of a solid and said gas is selected from the group consisting of neon, argon, krypton, xenon and nitrogen; (b) irradiating said coated target with coherent light of a wavelength which is absorbed by the target, wherein the intensity of said light is effective to evaporate material from said target; and (c) condensing at least a portion of said evaporated target material as a film on a substrate.
Claim 8
Dependent Claim
14 words
The method as set forth in claim 5 wherein said coherent light is pulsed.
Claim 9
Dependent Claim
34 words
The method as set forth in claim 6 wherein said target is comprised of a material having a thermal conductivity which is greater than about 1.00 W cm -1 K -1 at 25° C.
Claim 10
Dependent Claim
26 words
The method as set forth in claim 7 wherein said target is comprised of a material which can be evaporated and condensed without substantial chemical decomposition.
Claim 11
Dependent Claim
26 words
The method as set forth in claim 8 wherein steps (b) and (c) are carried out at a pressure of about 10 -3 torr or lower.
Claim 12
Dependent Claim
27 words
The method as set forth in claim 9 wherein said layer of condensed gas has a thickness in the range from about 10 to about 10,000 nm.
Claim 13
Independent Claim
113 words
A method for depositing a silicon film on a substrate which comprises the steps of: (a) cooling a target and condensing a thin layer of substantially inert gas on said cooled target to produce a coated target, wherein said target is comprised of silicon and said gas is selected from the group consisting of neon, argon, krypton, xenon and nitrogen; (b) irradiating said coated target with coherent light of a wavelength in the range from about 190 to about 1000 nm, wherein the intensity of said light is effective to evaporate material from said target; and (c) condensing at least a portion of said evaporated target material as a film on a substrate.
Claim 14
Independent Claim
113 words
A method for depositing a silicon film on a substrate which comprises the steps of: (a) cooling a target and condensing a thin layer of substantially inert gas on said cooled target to produce a coated target, wherein said target is comprised of silicon and said gas is selected from the group consisting of neon, argon, krypton, xenon and nitrogen; (b) irradiating said coated target with coherent light of a wavelength in the range from about 190 to about 1000 nm, wherein the intensity of said light is effective to evaporate material from said target; and (c) condensing at least a portion of said evaporated target material as a film on a substrate.
Claim 15
Dependent Claim
20 words
The method as set forth in claim 11 wherein said target is cooled below the melting point of said gas.
Claim 16
Dependent Claim
27 words
The method as set forth in claim 12 wherein said layer of condensed gas has a thickness in the range from about 10 to about 10,000 nm.
Claim 17
Dependent Claim
14 words
The method as set forth in claim 12 wherein said coherent light is pulsed.
Claim 18
Dependent Claim
22 words
The method as set forth in claim 14 wherein the pulse repetition rate is from about 1 Hz to about 80 MHz.
Claim 19
Dependent Claim
26 words
The method as set forth in claim 14 wherein steps (b) and (c) are carried out at a pressure of about 10 -3 torr or lower.
Claim 20
Dependent Claim
26 words
The method as set forth in claim 16 wherein said target is comprised of a major proportion of silicon and a minor proportion of a dopant.
Claim 21
Dependent Claim
27 words
The method as set forth in claim 17 wherein said dopant comprises at least one material selected from the group consisting of hydrogen, carbon, boron and phosphorus.
Claim 22
Dependent Claim
27 words
The method as set forth in claim 16 which is carried out in an atmosphere which is substantially free of gases other than said substantially inert gas.
Claim 23
Dependent Claim
18 words
The method as set forth in claim 16 which is carried out in an atmosphere which comprises hydrogen.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-12-15 | 1990-06-16 | 1990-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-12-15 | 1994-06-16 | 1994-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-12-15 | 1998-06-16 | 1998-12-16 | $7700.00 | Window Closed / Lapsed |