US4625224A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film transistor having polycrystalline silicon layer with 0.01 to 5 atomic % chlorine
Assignee: Canon Inc
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Filing: 1983-01-10
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Granted: 1986-11-25
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Expires: 2003-01-10
Abstract
Abstract A semiconductor element having a main part of a polycrystalline silicon semiconductor layer containing 0.01 to 5 atomic % of chlorine atoms.
Inventors
- 👤 Katsumi Nakagawa
- 👤 Toshiyuki Komatsu
- 👤 Yoshiyuki Osada
- 👤 Satoshi Omata
- 👤 Yutaka Hirai
- 👤 Takashi Nakagiri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 22:48
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/674; H10D30/6741; H10D30/6729; H10D30/673; H10D30/6731; H10D30/6743; H10D30/6745; H10D62/00; H10D62/40
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
56 words
A semiconductor element which comprises as a main part a polycrystalline silicon semiconductor layer containing 0.01 to 5 atomic % of chlorine atoms, said semiconductor layer having an X-ray diffraction pattern or an electron beam diffraction pattern of which the diffraction intensity at the (220) plane is 30% or more based on the total diffraction intensity.
Claim 2
Dependent Claim
56 words
A semiconductor element which comprises as a main part a polycrystalline silicon semiconductor layer containing 0.01 to 5 atomic % of chlorine atoms, said semiconductor layer having an X-ray diffraction pattern or an electron beam diffraction pattern of which the diffraction intensity at the (220) plane is 30% or more based on the total diffraction intensity.
Claim 3
Dependent Claim
19 words
A semiconductor element according to claim 1, having an effective carrier mobility of more than 1 cm 2 /V-sec.
Claim 4
Dependent Claim
23 words
A semiconductor element according to claim 1, wherein the maximum surface uneveness of the polycrystalline silicon semiconductor layer is 800 Å or less.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-24 | 1990-05-26 | 1990-11-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-24 | 1994-05-26 | 1994-11-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-24 | 1998-05-26 | 1998-11-25 | $7700.00 | Window Closed / Lapsed |