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US4624857A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for automatic control of galvanic deposition of copper coatings in galvanic acid copper baths

Assignee: Atotech Deutschland GmbH and Co KG
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Filing: 1985-02-04
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Granted: 1986-11-25
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Expires: 2005-02-04
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Abstract

Abstract In a method for an automatic control of the galvanic deposition of copper coatings in acid copper bath by measuring a maximal current density and a continual dosing of gloss additives to the bath, the maximal current density is measured by cyclically measuring an actual voltage in the bath and compensating for eventual deviations of the actual voltage from the nominal value by an automatic dosing of the additives by means of dosing devices.

Inventors

  • 👤 Wolfgang Dahms

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 11:07
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/416; G01N27/42; C; C25; C25D; C25D21/00; C25D21/12

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 126 words
In a method for a full-automatic control of the galvanic deposition of copper coatings in acid galvanic baths by measuring a maximal current density and a continual automatic addition of dosed gloss additives and a determination of deviations of an actual voltage from a nominal voltage value, the improvement comprising the steps of measuring the maximal current density by cyclically measuring an actual voltage, and eventually compensating for deviations of the actual voltage from the nominal value by means of electronic dosing devices, wherein a function generator is used in said measuring step, said function generator cyclically varying a potential between a reference electrode and a rotating platinum disc electrode between voltage points -0.2 V and +1.8 V and with a velocity of 100 m V/sec.
Claim 2
Dependent Claim 126 words
In a method for a full-automatic control of the galvanic deposition of copper coatings in acid galvanic baths by measuring a maximal current density and a continual automatic addition of dosed gloss additives and a determination of deviations of an actual voltage from a nominal voltage value, the improvement comprising the steps of measuring the maximal current density by cyclically measuring an actual voltage, and eventually compensating for deviations of the actual voltage from the nominal value by means of electronic dosing devices, wherein a function generator is used in said measuring step, said function generator cyclically varying a potential between a reference electrode and a rotating platinum disc electrode between voltage points -0.2 V and +1.8 V and with a velocity of 100 m V/sec.
Claim 3
Dependent Claim 46 words
The method as defined in claim 1, and utilized for producing copper coatings with possible best physical qualities independently from the materials of anodes and cathodes utilized in the bath, for strengthening conductive paths of contact switches and for depositing metal layers on conductors or non-conductors.
Claim 4
Dependent Claim 16 words
The method as defined in claim 1, wherein said reference electrode is a silver/silver chloride electrode.
Claim 5
Dependent Claim 20 words
The method as defined in claim 3, wherein said nominal value is -0.3 V relative to said silver/silver chloride electrode.
Claim 6
Dependent Claim 43 words
The method as defined in claim 1, further including the step of examining of the nominal value by an electronic control device which, upon the determination of deviations from a nominal value to define a dosing impulse, sets a dosing pump into operation.
Claim 7
Dependent Claim 31 words
The method as defined in claim 1, wherein said electronic control devices include a comparator which compares voltages generated at maximum by a potentiostat during the period of about two cycles.
Claim 8
Dependent Claim 14 words
The method as defined in claim 6, wherein said period is about 1 min.
Claim 9
Dependent Claim 35 words
The method as defined in claim 1, wherein, after the addition of dosed gloss additives a waiting time of about two minutes is maintained for stabilizing the bath, before a further measuring is carried out.
Claim 10
Dependent Claim 18 words
The method as defined in claim 1, wherein the copper coatings, having pH-value≦1, are applied in the method.
Claim 11
Dependent Claim 16 words
The method as defined in claim 1, wherein usual shiny coatings are utilized as gloss additives.

References Cited (Backward Citations)

US3506546A Cited
US3969928A Cited
US4181582A Cited
US4350717A Cited
US4331702A Cited
US4315518A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-11-24 1990-05-26 1990-11-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-11-24 1994-05-26 1994-11-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-11-24 1998-05-26 1998-11-25 $7700.00 Window Closed / Lapsed

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