Patent US4624728A successfully refreshed from Google Patents.
US4624728A
Expired / Lapsed
US
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Pin lift plasma processing
Assignee: Motorola Solutions Inc
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Filing: 1985-06-11
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Granted: 1986-11-25
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Expires: 2005-06-11
Abstract
Abstract A wafer is supported on pins within a plasma reactor, allowing the plasma to act on both sides of the wafer. Various processes are disclosed for pins-up and pins-down condition. If conductive pins are used, they are preferably flattened. The wafer is preferably biased negatively with respect to the plasma.
Inventors
- 👤 Roger M. Bithell
- 👤 Harry Slomowitz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:36
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; H10P72/30; H10P72/33; H10P72/3306
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
71 words
A parallel plate parallel reactor comprising: a lower electrode for receiving a semiconductor wafer; means for causing a glow discharge within said reactor, adjacent said lower electrode; a plurality of pins within said lower electrode for engaging said semiconductor wafer; and control means for extending said pins during said plasma discharge to lift said wafer into said discharge and to provide access to both sides of said wafer for said discharge.
Claim 2
Dependent Claim
71 words
A parallel plate parallel reactor comprising: a lower electrode for receiving a semiconductor wafer; means for causing a glow discharge within said reactor, adjacent said lower electrode; a plurality of pins within said lower electrode for engaging said semiconductor wafer; and control means for extending said pins during said plasma discharge to lift said wafer into said discharge and to provide access to both sides of said wafer for said discharge.
Claim 3
Dependent Claim
18 words
The apparatus as set forth in claim 1 wherein said pins electrically disconnect said wafer from said electrode.
Claim 4
Dependent Claim
18 words
The apparatus as set forth in claim 1 wherein said pins electrically connect said wafer and said electrode.
Claim 5
Dependent Claim
17 words
The apparatus as set forth in claim 2 wherein said electrode comprises insulating sleeves surrounding said pins.
Claim 6
Dependent Claim
17 words
The apparatus as set forth in claim 1 wherein said electrode comprises sleeve means surrounding said pins.
References Cited (Backward Citations)
US4551192A
Cited
US4547247A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-24 | 1990-05-26 | 1990-11-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-24 | 1994-05-26 | 1994-11-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-24 | 1998-05-26 | 1998-11-25 | $7700.00 | Window Closed / Lapsed |