Illumination optical arrangement

Claim 2

An illumination optical arrangement comprising: (a) light source means emitting a coherent light beam; and (b) means for forming a substantially incoherent light source from said coherent light beam, said incoherent light source forming means including means for periodically deflecting said coherent light beam and scanning a predetermined scanning area by said coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through said predetermined scanning area to a plurality of different secondary scanning areas, each of said plurality of secondary scanning areas being scanned by said periodically deflected coherent light beam.

Claim 3

An illumination optical arrangement according to claim 1, wherein said optical means includes means for forming a plurality of images of said light source means at a time from said coherent light beam passed through said predetermined scanning area.

Claim 4

An illumination optical arrangement according to claim 2, wherein said optical means includes fly-eye lens means.

Claim 5

An illumination optical arrangement according to claim 1, wherein said optical means directs the coherent light beam passed through said predetermined scanning area to said plurality of secondary scanning areas in succession in accordance with the phase of the periodical deflection of said coherent light beam.

Claim 6

An illumination optical arrangement according to claim 4, wherein said optical means includes a light-transmitting post-like member havng an entrance surface opposed to said predetermined scanning area, an exit surface substantially parallel to said entrance surface, and a side surface connecting said entrance surface and said exit surface together, and said coherent light beam is inner-surface-reflected at a position corresponding to the phase of said side surface.

Claim 7

An illumination optical arrangement comprising: (a) light source means emitting a coherent light beam; and (b) means for forming a substantially incoherent light source from said coherent light beam, said incoherent light source forming means including optical means having a multiplicity of optical paths through which parts of said coherent light beam pass respectively and forming a multiplicity of corresponding secondary light sources, and optical path difference forming means provided between said light source means and said secondary light source forming optical means for making differences between the optical path lengths of said multiplicity of optical paths.

Claim 8

An illumination optical arrangement comprising: (a) light source means emitting a coherent light beam; and (b) means for forming a substantially incoherent light source from said coherent light beam, said incoherent light source forming means including optical means having a multiplicity of optical paths through which parts of said coherent light beam pass respectively and forming a multiplicity of corresponding secondary light sources, and optical path difference forming means provided between said light source means and said secondary light source forming optical means for making differences between the optical path lengths of said multiplicity of optical paths.

Claim 9

An illumination optical arrangement according to claim 6, wherein said optical path difference forming means includes an optical member provided with an entrance surface having a multiplicity of entrance areas through which parts of said coherent light beam passes respectively and an exit surface having a multiplicity of exit areas corresponding to said entrance areas, and the optical path lengths from said multiplicity of entrance areas to said multiplicity of exit areas differ from one another.

Claim 10

An illumination optical arrangement according to claim 7, wherein said optical member includes a staircase prism having a multiplicity of post-like prism elements in which the distances between the entrance surfaces and the exit surfaces differ from one another.

Claim 11

An illumination optical arrangement according to claim 7, wherein said optical member includes an optical fiber having a multiplicity of fiber bundles different in length.

Claim 12

An illumination optical arrangement according to claim 6, wherein said incoherent light source forming means further includes means for selectively adjusting the transmission factors of said optical paths to correct the difference in the transmission factor of said coherent light beam between said multiplicity of optical paths.

Claim 13

An illumination optical arrangement according to claim 10, wherein said adjusting means includes optical filter means acting so as to reduce the transmission factors of the optical paths having relatively short optical path lengths, of said multiplicity of optical paths.

Claim 14

An illumination optical arrangement in an apparatus for projecting a pattern on an object onto a projection surface by an objective lens, comprising: (a) light source means emitting a coherent light beam; (b) means for forming a substantially incoherent light source from said coherent light beam, said incoherent light source forming means including means for periodically deflecting said coherent light beam and scanning a predetermined scanning area by said coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through said predetermined scanning area to a plurality of different secondary scanning areas, each of said plurality of secondary scanning areas being scanned by said periodically deflected coherent light beam; and (c) condensing lens means provided to direct the light beam passed through said plurality of secondary scanning areas to the pupil of said objective lens, said secondary scanning areas and the pupil of said objective lens being in a substantially conjugate relationship with respect to said condensing lens means.

Claim 15

An illumination optical arrangement in an apparatus for projecting a pattern on an object onto a projection surface by an objective lens, comprising: (a) light source means emitting a coherent light beam; (b) means for forming a substantially incoherent light source from said coherent light beam, said incoherent light source forming means including means for periodically deflecting said coherent light beam and scanning a predetermined scanning area by said coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through said predetermined scanning area to a plurality of different secondary scanning areas, each of said plurality of secondary scanning areas being scanned by said periodically deflected coherent light beam; and (c) condensing lens means provided to direct the light beam passed through said plurality of secondary scanning areas to the pupil of said objective lens, said secondary scanning areas and the pupil of said objective lens being in a substantially conjugate relationship with respect to said condensing lens means.