US4618934A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ultrasonic microscope apparatus
Assignee: Toshiba Corp
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Filing: 1983-12-27
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Granted: 1986-10-21
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Expires: 2003-12-27
Abstract
Abstract An integrated circuit is operated under predetermined conditions. The operating integrated circuit is scanned by an ultrasonic beam. Ultrasonic images obtained by the scanning operation are stored into memories, mutually computed, and finally displayed by a color display.
Inventors
- 👤 Masashi Nagase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:46
CPC Classifications
G; G01; G01S; G01S15/00; G01S15/88; G01S15/89; G01S15/8906; G01N; G01N29/00; G01N29/04; G01N29/06; G01N29/0609; G01S7/00; G01S7/52; G01S7/52017; G01S7/52053; G01S7/52057; G01S7/52071
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
76 words
An ultrasonic microscope apparatus comprising: means for varying the operating conditions of an integrated circuit; means for obtaining ultrasonic images of said integrated circuit by scanning said circuit with an ultrasonic beam; memory means for individually storing said ultrasonic images; means for calculating difference values for corresponding portions of said stored ultrasonic images produced for different operating conditions of said circuit; and means for displaying said difference values to provide information regarding defects in said circuit.
Claim 2
Dependent Claim
76 words
An ultrasonic microscope apparatus comprising: means for varying the operating conditions of an integrated circuit; means for obtaining ultrasonic images of said integrated circuit by scanning said circuit with an ultrasonic beam; memory means for individually storing said ultrasonic images; means for calculating difference values for corresponding portions of said stored ultrasonic images produced for different operating conditions of said circuit; and means for displaying said difference values to provide information regarding defects in said circuit.
Claim 3
Dependent Claim
16 words
An ultrasonic microscope apparatus according to claim 1, further comprising means for heating said integrated circuit.
Claim 4
Dependent Claim
16 words
An ultrasonic microscope apparatus according to claim 2, in which said heating means is a laser.
Claim 5
Dependent Claim
16 words
An ultrasonic microscope apparatus according to claim 1, further comprising means for cooling said integrated circuit.
Claim 6
Dependent Claim
19 words
An ultrasonic microscope apparatus according to claim 4, in which said cooling means blows gas toward said integrated circuit.
Claim 7
Dependent Claim
24 words
An ultrasonic microscope apparatus according to claim 1, in which said ultrasonic image is converted into digital signals and stored in said memory means.
Claim 8
Dependent Claim
24 words
An ultrasonic microscope apparatus according to claim 1, in which the calculation of said difference values is executed by a high speed arithmetic unit.
Claim 9
Dependent Claim
37 words
An ultrasonic microscope apparatus according to claim 1, further comprising a control unit which controls said means for varying the operating conditions of said integrated circuit to provide changes in the electrical operating conditions of said circuit.
Claim 10
Dependent Claim
24 words
An ultrasonic microscope apparatus according to claim 8, in which said control means further includes means for varying the operating temperature of said circuit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-20 | 1990-04-21 | 1990-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-20 | 1994-04-21 | 1994-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-20 | 1998-04-21 | 1998-10-21 | $7700.00 | Window Closed / Lapsed |