US4618477A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Uniform plasma for drill smear removal reactor
Assignee: International Business Machines Corp
•
Filing: 1985-01-17
•
Granted: 1986-10-21
•
Expires: 2005-01-17
Abstract
Abstract A system for generating a substantially uniform plasma for processing a substrate having two major surfaces. Each of the substrate major surfaces may have electrically conductive portions. Two electrodes are oppositely disposed with respect to one another on either side of the substrate. A first r.f. power source is electrically connected to the first electrode and a second r.f. power source is electrically connected to the second electrode. The first and second r.f. power sources are out of phase with respect to one another, resulting in the generation of a substantially uniform plasma field.
Inventors
- 👤 Suryadevara V. Babu
- 👤 Ronald S. Horwath
- 👤 Neng-hsing Lu
- 👤 John A. Welsh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:49
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/46; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32137; H01J37/32155; H01J37/32165; H05K; H05K3/00; H05K3/0011; H05K3/0055; H05K2203/00; H05K2203/09; H05K2203/095
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
97 words
An apparatus for generating a substantially uniform plasma for processing a substrate having two major surfaces, each of said major surfaces having electrically conductive portions disposed thereon, comprising: (a) two electrode means oppositely disposed with respect to one another on either side of said substrate; (b) a first radio frequency power source operatively connected to the first of said electrode means; and (c) a second radio frequency power source operatively connected to the second of said electrode means, said second radio frequency power source being out of phase with respect to said first radio frequency power source.
Claim 2
Independent Claim
97 words
An apparatus for generating a substantially uniform plasma for processing a substrate having two major surfaces, each of said major surfaces having electrically conductive portions disposed thereon, comprising: (a) two electrode means oppositely disposed with respect to one another on either side of said substrate; (b) a first radio frequency power source operatively connected to the first of said electrode means; and (c) a second radio frequency power source operatively connected to the second of said electrode means, said second radio frequency power source being out of phase with respect to said first radio frequency power source.
Claim 3
Dependent Claim
27 words
The apparatus in accordance with claim 1 wherein said first and second radio frequency power sources are 180 degrees out of phase with respect to one another.
Claim 4
Dependent Claim
16 words
The apparatus in accordance with claim 1 wherein said substrateis maintained at a fixed voltage potential.
Claim 5
Dependent Claim
15 words
The apparatus in accordance with claim 3 wherein said fixed voltage potential is zero volts.
Claim 6
Dependent Claim
17 words
The apparatus in acordance with claim 3 wherein said fixed voltage potential is less than zero volts.
Claim 7
Dependent Claim
18 words
The apparatus in acordance with claim 1 wherein said electrically conducive portions of said substrate are electrical lines.
Claim 8
Dependent Claim
17 words
The apparatus in accordance with claim 2 wherein said substrate is maintained at a fixed voltage potential.
Claim 9
Dependent Claim
17 words
The apparatus accordance with claim 7 wherein, during said plasma processing, material is deposited onto said substrate.
Claim 10
Dependent Claim
18 words
The apparatus in accodance with claim 7 wherein, during said plasma processing, material is etched from said substrate.
Claim 11
Dependent Claim
18 words
The apparatus in accordance with claim 7 wherein, during said plasma processing, material on said substrate is oxidized.
Claim 12
Dependent Claim
19 words
The apparatus in accordance with claim 7 wherein, during said plasma processing, material disposed on said substrate is reduced.
Claim 13
Dependent Claim
19 words
The apparatus in accordance with claim 7 wherein said plasma is used to clean material disposed on said substrate.
Claim 14
Dependent Claim
15 words
The apparatus in acordance with claim 7 wherein said substrate is a printed circuit board.
Claim 15
Dependent Claim
15 words
The apparatus in accordance with claim 7 wherein said substrate is a printed circuit card.
Claim 16
Dependent Claim
18 words
The apparatus in acordance with claim 7 wherein said substrate is a component of a printed circuit board.
Claim 17
Dependent Claim
17 words
The apparatus in accordance with claim 7 wherein said electode means are substantially parallel to one another.
Claim 18
Independent Claim
88 words
An apparatus for generating a substantially uniform plasma for processing a printed circuit board having thru holes therein, comprising: (a) two electrode means oppositely disposed with respect to one another on either side of said printed circuit board; (b) a first radio frequency power generator operatively connected to the first of said electrode means; and (c) a second radio frequency power generator operatively connected to said second electrode means, said second radio frequency power generator being out of phase with respect to said first radio frequency power generator.
Claim 19
Independent Claim
88 words
An apparatus for generating a substantially uniform plasma for processing a printed circuit board having thru holes therein, comprising: (a) two electrode means oppositely disposed with respect to one another on either side of said printed circuit board; (b) a first radio frequency power generator operatively connected to the first of said electrode means; and (c) a second radio frequency power generator operatively connected to said second electrode means, said second radio frequency power generator being out of phase with respect to said first radio frequency power generator.
Claim 20
Dependent Claim
27 words
The apparatus in accordance with claim 17 wherein said first and second radio frequency power generators are 180 degrees out of phase with respect to one another.
Claim 21
Dependent Claim
19 words
The apparatus in accordance with claim 18 wherein said printed circuit board is maintained at a fixed voltage potential.
Claim 22
Dependent Claim
15 words
The apparatus in accordance with claim 19 wherein said fixed voltage potential is zero volts.
Claim 23
Dependent Claim
20 words
The apparaus in accordance with claim 19 wherein, during said plasma processing, material residing in said thru holes is etched.
Claim 24
Dependent Claim
23 words
The apparatus in accordance with claim 19 wherein, during said plasma processing, material residing in said thru holes and proximate thereto is cleaned.
Claim 25
Dependent Claim
17 words
The apparatus in accordance with claim 19 wherein said electrode means are substantially parallel to one another.
Claim 26
Dependent Claim
103 words
Apparatus for processing a substrate having electrically conductive portions thereon in a plasma field, comprising: (a) means for maintaining said electrically conductive portions at a predetermined voltage potential, said potential being invariant over the time of processing; (b) a first electrode means and a second electrode means in electrically operative relationship with said substrate; and (c) a first source of radio frequency power operatively connected to said first electrode means and a second source of radio frequency power operatively connected to said second electrode means, said first and second sources of radio frequency power having a phase differential with respect to one another.
Claim 27
Dependent Claim
103 words
Apparatus for processing a substrate having electrically conductive portions thereon in a plasma field, comprising: (a) means for maintaining said electrically conductive portions at a predetermined voltage potential, said potential being invariant over the time of processing; (b) a first electrode means and a second electrode means in electrically operative relationship with said substrate; and (c) a first source of radio frequency power operatively connected to said first electrode means and a second source of radio frequency power operatively connected to said second electrode means, said first and second sources of radio frequency power having a phase differential with respect to one another.
Claim 28
Dependent Claim
14 words
The apparatus in accordance with claim 24 wherein said phase differential is 180° degrees.
Claim 29
Dependent Claim
23 words
The apparatus in accordance with claim 24 wherein said predetermined voltage potential of said electrically conductive portions of said substrate is zero volts.
Claim 30
Dependent Claim
25 words
The apparatus in accordance with claim 24 wherein said predetermined voltage potential of said electrically conductive portions of said substrate is less than zero volts.
Claim 31
Dependent Claim
18 words
The system in accordance with claim 25 wherein said electrically conductive portions of said substrate are electrical lines.
Claim 32
Dependent Claim
17 words
The apparatus in accordance with claim 25 wherein said electrode means are substantially parallel to one another.
Claim 33
Dependent Claim
141 words
Apparatus for processing a printed circuit board having a plurality of thru holes therein in a plasma field, comprising: (a) means for maintaining said printed circuit board at zero voltage potential invariant over the time of processing; (b) a first electrode means in operative relationship with a first portion of said printed circuit board; (c) a second electrode means in operative relationship with a second portion of said substrate, said second electrode means being substantially parallel to said first electrode means; (d) a first means for creating radio frequency power operatively connected to said first electrode means; and (e) a second means for creating radio frequency power operatively connected to said second electrode means, the respective frequencies created by said first and second means for creating radio frequency power having a phase differential of 180 degrees with respect to one another.
Claim 34
Dependent Claim
141 words
Apparatus for processing a printed circuit board having a plurality of thru holes therein in a plasma field, comprising: (a) means for maintaining said printed circuit board at zero voltage potential invariant over the time of processing; (b) a first electrode means in operative relationship with a first portion of said printed circuit board; (c) a second electrode means in operative relationship with a second portion of said substrate, said second electrode means being substantially parallel to said first electrode means; (d) a first means for creating radio frequency power operatively connected to said first electrode means; and (e) a second means for creating radio frequency power operatively connected to said second electrode means, the respective frequencies created by said first and second means for creating radio frequency power having a phase differential of 180 degrees with respect to one another.
Claim 35
Dependent Claim
17 words
The apparatus in accordance with claim 24 wherein said substrate comprises a portion of a semiconductor device.
References Cited (Backward Citations)
US3485735A
Cited
US3461054A
Cited
US3600126A
Cited
US3702258A
Cited
US3860507A
Cited
US4013532A
Cited
US4233109A
Cited
US4292153A
Cited
US4285800A
Cited
US4264813A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-20 | 1990-04-21 | 1990-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-20 | 1994-04-21 | 1994-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-20 | 1998-04-21 | 1998-10-21 | $7700.00 | Window Closed / Lapsed |