US4264813A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High intensity ion source using ionic conductors
Assignee: International Business Machines Corp
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Filing: 1979-06-29
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Granted: 1981-04-28
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Expires: 1999-06-29
Abstract
Abstract The present invention describes an ion source which is capable of producing relatively high density ion currents. The ion source employs an electrically biased ionic conductor to supply ions from a reservoir of the atomic species.
Inventors
- 👤 G. V. Chandrashekhar
- 👤 Praveen Chaudhari
- 👤 Jerome J. Cuomo
- 👤 Richard J. Gambino
- 👤 James M. E. Harper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:56
CPC Classifications
H; H10; H10D; H10D99/00; H01; H01J; H01J27/00; H01J27/02; H01J27/20; H01J37/00; H01J37/02; H01J37/04; H01J37/08
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
164 words
An ion beam generator which generates ions from an atomic species for bombarding a target in a vacuum chamber comprising: a reservoir containing the atomic species; an ionic conductor having a first surface and a second surface wherein said first surface is adjacent to said reservoir and is in contact with said atomic species and said second surface communicates with the target; a first electrode contacting said atomic species; a voltage supply connected to said first electrode and the target to maintain a potential difference between said first electrode and the target to create an electric field which accelerates the ions as they pass through said ion conductor; a second electrode connected to said voltage supply, positioned between said ion source and said target, and maintained at a potential between said first electrode and said target; a supplemental voltage supply connected in series with said voltage supply and being so interposed as to maintain a potential difference between said second electrode and said target.
Claim 2
Dependent Claim
164 words
An ion beam generator which generates ions from an atomic species for bombarding a target in a vacuum chamber comprising: a reservoir containing the atomic species; an ionic conductor having a first surface and a second surface wherein said first surface is adjacent to said reservoir and is in contact with said atomic species and said second surface communicates with the target; a first electrode contacting said atomic species; a voltage supply connected to said first electrode and the target to maintain a potential difference between said first electrode and the target to create an electric field which accelerates the ions as they pass through said ion conductor; a second electrode connected to said voltage supply, positioned between said ion source and said target, and maintained at a potential between said first electrode and said target; a supplemental voltage supply connected in series with said voltage supply and being so interposed as to maintain a potential difference between said second electrode and said target.
Claim 3
Dependent Claim
16 words
The ion beam generator of claim 1 further comprising a means to heat said ionic conductor.
Claim 4
Dependent Claim
26 words
The ion beam generator of claim 2, further comprising: means for neutralizing the space charge of said ion beam to prevent spreading of said ion beam.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-04-27 | 1984-10-27 | 1985-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-04-27 | 1988-10-27 | 1989-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-04-27 | 1992-10-27 | 1993-04-28 | $7700.00 | Window Closed / Lapsed |