Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
161 words
In an electrostatic voltmeter for measuring the voltage on a surface, the combination of: (a) a probe having at least one microdeflector, said microdeflector including (1) a base having a well therein; (2) a flexible finger on said base spaced over said well, said well permitting said finger to deflect relative to said base; (3) separate driven and sensing electrodes on said finger, said base and said electrodes cooperating to form a capacitive type relationship between said base and each of said electrodes individually; and (4) means for bringing said driven electrode into capacitive relation with said surface so that a charge representative of the voltage on said surface is produced on said driven electrode to cause said finger to deflect, deflection of said finger changing the capacitive relative between said base and said sensing electrode; and (b) means for converting a change in capacitance between said base and said sensing electrode to a signal representing the voltage on said surface.
Claim 2
Dependent Claim
161 words
In an electrostatic voltmeter for measuring the voltage on a surface, the combination of: (a) a probe having at least one microdeflector, said microdeflector including (1) a base having a well therein; (2) a flexible finger on said base spaced over said well, said well permitting said finger to deflect relative to said base; (3) separate driven and sensing electrodes on said finger, said base and said electrodes cooperating to form a capacitive type relationship between said base and each of said electrodes individually; and (4) means for bringing said driven electrode into capacitive relation with said surface so that a charge representative of the voltage on said surface is produced on said driven electrode to cause said finger to deflect, deflection of said finger changing the capacitive relative between said base and said sensing electrode; and (b) means for converting a change in capacitance between said base and said sensing electrode to a signal representing the voltage on said surface.
Claim 3
Dependent Claim
27 words
The voltmeter according to claim 1 including means to bias said base to a predetermined reference potential whereby to pre-deflect said finger to a preset deflected position.
Claim 4
Dependent Claim
40 words
The voltmeter according to claim 1 in which said sensing electrode is generally U-shaped, said driven electrode being disposed within said sensing electrode and separated from said sensing electrode whereby said sensing electrode is electrically isolated from said driven electrode.
Claim 5
Dependent Claim
58 words
The voltmeter according to claim 1 in which said means for bringing said driven electrode into capacitive relation with said surface includes a pickup electrode disposable in predetermined spaced relation with said surface whereby a capacitive relationship is established between said surface and said pickup electrode, and means for electrically coupling said pickup electrode with said driven electrode.
Claim 6
Dependent Claim
66 words
The voltmeter according to claim 4 including a shutter interposable between said pickup electrode and said surface, said shutter being coupled to a predetermined voltage for calibrating said probe, and means for periodically interposing said shutter between said pickup electrode and said surface, interposition of said shutter between said pickup electrode and said surface causing predetermined deflection of said finger for use in calibrating said probe.
Claim 7
Dependent Claim
23 words
The voltmeter according to claim 1 including capacitance means in parallel with said driven electrode to control charge levels of said driven electrode.
Claim 8
Dependent Claim
55 words
The voltmeter according to claim 1 including a second microdeflector on said base for providing a signal reflecting changes in capacitance due to noise; and means for adjusting the signal output of the first mentioned microdeflector with the signal output of said second microdeflector to correct the signal output of said first microdeflector for noise.
Claim 9
Dependent Claim
23 words
The voltmeter according to claim 7 in which said second microdeflector is disposed in side by side relation with said first mentioned microdeflector.
Claim 10
Dependent Claim
32 words
The voltmeter according to claim 7 in which said well comprises an elongated recess, said second microdeflector flexible finger being disposed in side by side relation with said first microdeflector flexible finger.