US4614706A
Expired / Lapsed
US
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Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching
Assignee: Hitachi Ltd
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Filing: 1984-05-02
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Granted: 1986-09-30
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Expires: 2004-05-02
Abstract
Abstract A film of a photoresist having phenolic hydroxyl groups is irradiated with far-ultraviolet radiation, and is thereafter developed with an alkaline aqueous solution. Using as a mask a resist pattern thus obtained, dry etching is carried out to form a microscopic pattern. Since the photoresist is highly immune against the dry etching, the microscopic pattern can be formed at a high precision. By adding an azide of a specified structure, the photoresist has its sensitivity to the far-ultraviolet radiation enhanced more.
Inventors
- 👤 Toshiharu Matsuzawa
- 👤 Takao Iwayanagi
- 👤 Kikuo Douta
- 👤 Hiroshi Yanazawa
- 👤 Takahiro Kohashi
- 👤 Saburo Nonogaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/012; G03F7/0125; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
252 words
A method of forming a microscopic pattern, including: (1) the step of forming a photoresist film on a substance to form the microscopic pattern, the photoresist film containing a polymer, having phenolic hydroxyl groups, that is soluble in alkaline aqueous solution, and further containing an aromatic azide which is represented by a general formula: ##STR10## (where A denotes an element or substituent unconjugate with two benzene rings, X denotes H or N 3 , and Z denotes N 3 and X is H and it denotes H or Cl when X is N 3 ), said photoresist film absorbing far-ultraviolet radiation while substantially not exhibiting absorption of radiation in the region above 320 nm, whereby resolution is improved due to the absorption of far-ultraviolet radiation without absorption of radiation above 320 nm, (2) the step of irradiating a desired part of said photoresist film with far-ultraviolet radiation, to lower a solubility in alkaline aqueous solution of the irradiated part, (3) the step of developing the irradiated photoresist film with an alkaline aqueous solution, to remove the unirradiated part of said photoresist film and to form a photoresist pattern without swelling or meandering of the irradiated part, whereby the unirradiated part is removed without swelling or meandering of the irradiated part, and (4) the step of performing dry etching by employing said photoresist pattern as a mask, to form said microscopic pattern of said substance, whereby a microscopic pattern having line widths and spacings of 0.5-2 μm can be formed with high precision.
Claim 2
Independent Claim
252 words
A method of forming a microscopic pattern, including: (1) the step of forming a photoresist film on a substance to form the microscopic pattern, the photoresist film containing a polymer, having phenolic hydroxyl groups, that is soluble in alkaline aqueous solution, and further containing an aromatic azide which is represented by a general formula: ##STR10## (where A denotes an element or substituent unconjugate with two benzene rings, X denotes H or N 3 , and Z denotes N 3 and X is H and it denotes H or Cl when X is N 3 ), said photoresist film absorbing far-ultraviolet radiation while substantially not exhibiting absorption of radiation in the region above 320 nm, whereby resolution is improved due to the absorption of far-ultraviolet radiation without absorption of radiation above 320 nm, (2) the step of irradiating a desired part of said photoresist film with far-ultraviolet radiation, to lower a solubility in alkaline aqueous solution of the irradiated part, (3) the step of developing the irradiated photoresist film with an alkaline aqueous solution, to remove the unirradiated part of said photoresist film and to form a photoresist pattern without swelling or meandering of the irradiated part, whereby the unirradiated part is removed without swelling or meandering of the irradiated part, and (4) the step of performing dry etching by employing said photoresist pattern as a mask, to form said microscopic pattern of said substance, whereby a microscopic pattern having line widths and spacings of 0.5-2 μm can be formed with high precision.
Claim 3
Dependent Claim
28 words
A method of forming a microscopic pattern according to claim 1, wherein said polymer is selected from the group consisting of novolac resins produced from formaldehyde and phenols.
Claim 4
Dependent Claim
31 words
A method of forming a microscopic pattern according to claim 4, wherein said aromatic azide is selected from the group consisting of 4,4'-diazideidiphenylsulfide 4,4'-diazidediphenylsulfone, 3,3'-diazidediphenylsulfone, 4,4'-diazidediphenylmethane, 3,3'-dichloro-4,4'-diazidediphenylmethane, 4,4'-diazidediphenylether, 4,4'-diazidediphenylsulfide, and 4,4'-diazidediphenyldisulfide.
Claim 5
Dependent Claim
40 words
A method of forming a microscopic pattern according to claim 2, wherein said alkaline aqueous solution is an aqueous solution of a member selected from the group consisting of sodium hydroxide, potassium hydroxide, sodium phosphate, sodium silicate, and tetraalkylammonium hydroxide.
Claim 6
Dependent Claim
36 words
A method of forming a microscopic pattern according to claim 2, wherein A is selected from the group consisting of O, S, CH 2 , CH 2 CH 2 , SO 2 and S 2 .
Claim 7
Dependent Claim
23 words
A method of forming a microscopic pattern according to claim 2, wherein said microscopic pattern has line widths and spacings of 0.5-2 μm.
Claim 8
Dependent Claim
33 words
A method of forming a microscopic pattern according to claim 2, wherein said substance is a substrate for a semiconductor device, and said alkaline aqueous solution does not contain either sodium or potassium.
Claim 9
Dependent Claim
41 words
A method of forming a microscopic pattern according to claim 2, wherein the photoresist film is sufficiently resistant to dry etching after irradiation thereof with far-ultraviolet radiation such that said film can be used as a mask for said dry etching.
Claim 10
Dependent Claim
26 words
A method of forming a microscopic pattern according to claim 2, wherein said desired part of said photoresist film is irradiated with substantially only far-ultraviolet radiation.
Claim 11
Dependent Claim
22 words
A method of forming a microscopic pattern according to claim 2, wherein said substance is a substrate for a magnetic bubble device.
Claim 12
Dependent Claim
43 words
A method for forming a microscopic pattern according to claim 2, wherein the step of developing is performed using an alkaline aqueous solution having a concentration of 0.1-10 wt%, with the developing being performed at a temperature of 10°-40° C., for 10-600 seconds.
Claim 13
Dependent Claim
32 words
A method of forming a microscopic pattern according to claim 1, wherein said polymer is selected from the group consisting of poly(vinyl hydroxylbenzoate), poly(vinyl hydroxybenzal), bromides of polyvinyl phenol and polyisopropenyl phenol.
Claim 14
Dependent Claim
40 words
A method of forming a microscopic pattern according to claim 12, wherein said alkaline aqueous solution is an aqueous solution of a member selected from the group consisting of sodium hydroxide, potassium hydroxide, sodium phosphate, sodium silicate, and tetraalkylammonium hydroxide.
Claim 15
Dependent Claim
23 words
A method of forming a microscopic pattern according to claim 12, wherein said microscopic pattern has line widths and spacings of 0.5-2 μm.
Claim 16
Dependent Claim
33 words
A method of forming a microscopic pattern according to claim 12, wherein said substance is a substrate for a semiconductor device, and said alkaline aqueous solution does not contain either sodium or potassium.
Claim 17
Dependent Claim
22 words
A method of forming a microscopic pattern according to claim 12, wherein said substance is a substrate for a magnetic bubble device.
Claim 18
Dependent Claim
36 words
A method of forming a microscopic pattern according to claim 12, wherein A is selected from the group consisting of O, S, CH 2 , CH 2 CH 2 , SO 2 and S 2 .
Claim 19
Dependent Claim
41 words
A method of forming a microscopic pattern according to claim 12, wherein the photoresist film is sufficiently resistant to dry etching after irradiation thereof with far-ultraviolet radiation such that said film can be used as a mask for said dry etching.
Claim 20
Dependent Claim
26 words
A method of forming a microscopic pattern according to claim 12, wherein said desired part of said photoresist film is irradiated with substantially only far-ultraviolet radiation.
Claim 21
Dependent Claim
43 words
A method for forming a microscopic pattern according to claim 12, wherein the step of developing is performed using an alkaline aqueous solution having a concentration of 0.1-10 wt%, with the developing being performed at a temperature of 10°-40° C., for 10-600 seconds.
Claim 22
Dependent Claim
31 words
A method of forming a microscopic pattern according to claim 12, wherein said aromatic azide is selected from the group consisting of 4,4'-diazidediphenylsulfide, 4,4'-diazidediphenylsulfone, 3,3'-diazidediphenylsulfone, 4,4'-diazidediphenylmethane, 3,3'-dichloro-4,4'-diazidediphenylmethane, 4,4'-diazidediphenylether, 4,4'-diazidediphenyldisulfide, and 4,4'-diazidebibenzyl.
Claim 23
Dependent Claim
17 words
A method of forming a microscopic pattern according to claim 1, wherein said polymer is polyvinyl phenol.
Claim 24
Dependent Claim
23 words
A method of forming a microscopic pattern according to claim 22, wherein said microscopic pattern has line widths and spacings of 0.5-2 μm.
Claim 25
Dependent Claim
40 words
A method of forming a microscopic pattern according to claim 22, wherein said alkaline aqueous solution is an aqueous solution of a member selected from the group consisting of sodium hydroxide, potassium hydroxide, sodium phosphate, sodium silicate and tetraalkylammonium hydroxide.
Claim 26
Dependent Claim
36 words
A method of forming a microscopic pattern according to claim 22, wherein A is selected from the group consisting of O, S, CH 2 , CH 2 CH 2 , SO 2 and S 2 .
Claim 27
Dependent Claim
33 words
A method of forming a microscopic pattern according to claim 22, wherein said substance is a substrate for a semiconductor device, and said alkaline aqueous solution does not contain either sodium or potassium.
Claim 28
Dependent Claim
41 words
A method of forming a microscopic pattern according to claim 22, wherein the photoresist film is sufficiently resistant to dry etching after irradiation thereof with far-ultraviolet radiation such that said film can be used as a mask for said dry etching.
Claim 29
Dependent Claim
26 words
A method of forming a microscopic pattern according to claim 22, wherein said desired part of said photoresist film is irradiated with substantially only far-ultraviolet radiation.
Claim 30
Dependent Claim
22 words
A method of forming a microscopic pattern according to claim 22, wherein said substance is a substrate for a magnetic bubble device.
Claim 31
Dependent Claim
43 words
A method for forming a microscopic pattern according to claim 22, wherein the step of developing is performed using an alkaline aqueous solution having a concentration of 0.1-10 wt%, with the developing being performed at a temperature of 10°-40° C., for 10-600 seconds.
Claim 32
Dependent Claim
31 words
A method of forming a microscopic pattern according to claim 22, wherein said aromatic azide is selected from the group consisting of 4,4'-diazidediphenylsulfide, 4,4'-diazidediphenylsulfone, 3,3'-diazidediphenylsulfone, 4,4'-diazidediphenylmethane, 3,3'-dichloro-4,4'-diazidediphenylmethane, 4,4'-diazidediphenylether, 4,4'-diazidediphenyldisulfide, and 4,4'-diazidebibenzyl.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-29 | 1990-03-31 | 1990-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-29 | 1994-03-31 | 1994-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-29 | 1998-03-31 | 1998-09-30 | $7700.00 | Window Closed / Lapsed |