Patent US3263948A successfully refreshed from Google Patents.
US4613404A
Expired / Lapsed
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Materials which exhibit a surface active effect with vacuum baked photoresists and method of using the same
Assignee: Fujifilm Holdings Corp
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Filing: 1984-11-16
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Granted: 1986-09-23
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Expires: 2004-11-16
Abstract
Abstract A process for manufacturing a thin film magnetic head, the improvement wherein a metal, alloy or mixture thereof which improves the surface characteristics of a vacuum baked photoresist is deposited on the vacuum baked photoresist to thereby improve adhesion of a subsequently deposited layer.
Inventors
- 👤 Masatoshi Tabei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 05:59
CPC Classifications
C; C23; C23C; C23C28/00; G; G11; G11B; G11B5/00; G11B5/127; G11B5/31; G11B5/3163; H; H01; H01F; H01F41/00; H01F41/32; H01F41/34
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
45 words
In a process for manufacturing a thin film magnetic head, the improvement wherein a metal, alloy or mixture thereof which improves the surface characteristics of a vacuum baked photoresist is deposited on the vacuum baked photoresist to thereby improve adhesion of a subsequently deposited layer.
Claim 2
Dependent Claim
45 words
In a process for manufacturing a thin film magnetic head, the improvement wherein a metal, alloy or mixture thereof which improves the surface characteristics of a vacuum baked photoresist is deposited on the vacuum baked photoresist to thereby improve adhesion of a subsequently deposited layer.
Claim 3
Dependent Claim
16 words
The process as claimed in claim 1, wherein the subsequently deposited layer is a photoresist layer.
Claim 4
Dependent Claim
36 words
The process as claimed in claim 2, wherein the metal, alloy or mixture thereof is selected from the group consisting of a noble metal, a noble metal alloy, aluminum, an aluminum alloy or a mixture thereof.
Claim 5
Dependent Claim
21 words
The process as claimed in claim 3, wherein said metal, metal alloy or a mixture thereof is a noble metal alloy.
Claim 6
Dependent Claim
23 words
The process as claimed in claim 4, wherein the vacuum baked photoresist has a thickness of greater than about 3μ to about 20μ.
Claim 7
Dependent Claim
80 words
The process as claimed in claim 1, wherein, prior to the deposition of the metal, metal alloy or mixture thereof, holes are etched in the vacuum baked photoresist, whereafter the metal, metal alloy or mixture thereof is deposited on the surface of the vacuum baked photoresist and in said holes, whereafter the metal, metal alloy or mixture thereof is removed by deep angle milling, whereby the metal, metal alloy or mixture thereof is permitted to remain in said etched holes.
Claim 8
Dependent Claim
30 words
The process according to claim 1, wherein said baking is at a temperature of greater than about 300° C. to about 350° C. for about 2 to about 4 hours.
Claim 9
Dependent Claim
27 words
The process claimed in claim 7, wherein said baking is in a vacuum on the order of from about 0.01 m Torr to about 200 m Torr.
Claim 10
Dependent Claim
19 words
The process as claimed in claim 1, wherein said metal, metal alloy or mixture thereof is a palladium-gold alloy.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-22 | 1990-03-24 | 1990-09-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-22 | 1994-03-24 | 1994-09-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-22 | 1998-03-24 | 1998-09-23 | $7700.00 | Window Closed / Lapsed |