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US4612206A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of controlling deposition amount distribution in a vacuum deposition plating

Assignee: Mitsubishi Heavy Industries Ltd
•
Filing: 1985-06-03
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Granted: 1986-09-16
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Expires: 2005-06-03
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Abstract

Abstract In a continuous vacuum deposition plating of a metal strip, thinner coating at the edges can be prevented by maintaining the pressure of the deposition chamber in which an evaporation chamber is housed at a properly higher level than the pressure of the evaporation chamber.

Inventors

  • 👤 Yoshio Shimozato
  • 👤 Tetsuyoshi Wada
  • 👤 Kenichi Yanagi
  • 👤 Mitsuo Kato
  • 👤 Heizaburo Furukawa
  • 👤 Kanji Wake
  • 👤 Arihiko Morita
  • 👤 Norio Tsukiji
  • 👤 Takuya Aiko
  • 👤 Toshiharu Kittaka
  • 👤 Yasuji Nakanishi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 08:11
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/56; C23C14/562

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 130 words
A method of controlling the transverse thickness distribution of deposited metal film in a continuous vacuum deposition plating process using an apparatus comprising an evacuable deposition chamber in which an evaporation chamber for evaporating a metal to be deposited is contained and in which a substrate sheet strip is hermetically introduced and let out so that the metal vapor is deposited on the surface of the strip at the outlet of the evaporation chamber, said method comprising preliminarily determining the pressure difference between the evacuable deposition chamber and the evaporation chamber which will provide transversely uniform thickness of deposition, determining the vapor pressure in the evaporation chamber which brings about a coating of a desired thickness, and regulating the pressure deposition chamber so as to maintain preliminarily determined pressure difference.
Claim 2
Independent Claim 130 words
A method of controlling the transverse thickness distribution of deposited metal film in a continuous vacuum deposition plating process using an apparatus comprising an evacuable deposition chamber in which an evaporation chamber for evaporating a metal to be deposited is contained and in which a substrate sheet strip is hermetically introduced and let out so that the metal vapor is deposited on the surface of the strip at the outlet of the evaporation chamber, said method comprising preliminarily determining the pressure difference between the evacuable deposition chamber and the evaporation chamber which will provide transversely uniform thickness of deposition, determining the vapor pressure in the evaporation chamber which brings about a coating of a desired thickness, and regulating the pressure deposition chamber so as to maintain preliminarily determined pressure difference.
Claim 3
Dependent Claim 22 words
The method as described in claim 1, wherein the substrate metal is steel strip and the metal to be deposited is zinc.
Claim 4
Dependent Claim 44 words
The method as described in claim 1, wherein the transverse thickness distribution of deposited metal film is detected and the detected information is fed back to a means which controls the pressure of the deposition chamber so that the determined pressure difference is maintained.
Claim 5
Dependent Claim 19 words
The method as described in claim 3, wherein the pressure control means is a valve to an evacuation means.
Claim 6
Dependent Claim 16 words
The method as described in claim 3, wherein the pressure control means is a leak-in valve.

References Cited (Backward Citations)

US3040702A Cited
US4051270A Cited
US3854442A Cited
JPS5428781A Cited
DE2747061A1 Cited
US4526802A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-09-15 1990-03-17 1990-09-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-09-15 1994-03-17 1994-09-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-09-15 1998-03-17 1998-09-16 $7700.00 Window Closed / Lapsed

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