Patent US4222410A successfully refreshed from Google Patents.
Patent US4612077A successfully refreshed from Google Patents.
US4612077A
Expired / Lapsed
US
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Electrode for plasma etching system
Assignee: Lam Research Corp
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Filing: 1985-07-29
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Granted: 1986-09-16
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Expires: 2005-07-29
Abstract
Abstract An electrode includes a plurality of nested concentric rings forming plenum chambers. Process gas is fed into the plenum chambers through capillary tubes. The gas is then delivered through slits between the rings into a plasma etching reactor.
Inventors
- 👤 David H. Tracy
- 👤 Donald L. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:58
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
92 words
An electrode for plasma etching including a source of process gas to be delivered to a reactor etching chamber comprising: (a) a plurality of concentric rings surrounding a center disc and disposed to rest inside each other; (b) said rings and said disc forming annular plenum chambers therebetween; and said rings and disc further providing a plurality of openings therein leading from said source of process gas to said plenums; and (c) said rings being spaced to provide annular slits therebetween for transferring gas from said plenums into said reactor etching chamber.
Claim 2
Dependent Claim
92 words
An electrode for plasma etching including a source of process gas to be delivered to a reactor etching chamber comprising: (a) a plurality of concentric rings surrounding a center disc and disposed to rest inside each other; (b) said rings and said disc forming annular plenum chambers therebetween; and said rings and disc further providing a plurality of openings therein leading from said source of process gas to said plenums; and (c) said rings being spaced to provide annular slits therebetween for transferring gas from said plenums into said reactor etching chamber.
Claim 3
Dependent Claim
32 words
An electrode as set forth in claim 1 wherein said center disc rests on the innermost ring, includes openings therein, and forms a plenum chamber and slit opening with said innermost ring.
Claim 4
Dependent Claim
26 words
An electrode as set forth in claim 1 wherein said plurality of openings include capillary tubes therein to control the flow of gas into said plenums.
Claim 5
Dependent Claim
43 words
An electrode as set forth in claim 2 wherein the outermost ring is connected to a liquid cooled plate to form a chamber including said process gas to be delivered through said openings, said plenums and said annular slits to said reactor chamber.
Claim 6
Dependent Claim
13 words
An electrode as set forth in claim 4 wherein said electrode comprises magnesium.
Claim 7
Dependent Claim
22 words
An electrode as set forth in claim 5 wherein said chamber comprises a plurality of slots milled in said liquid cooled plate.
Claim 8
Dependent Claim
30 words
An electrode as set forth in claim 6 wherein said slots comprise four in number disposed at right angles to each other and extending across all of said capillary tubes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-15 | 1990-03-17 | 1990-09-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-15 | 1994-03-17 | 1994-09-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-15 | 1998-03-17 | 1998-09-16 | $7700.00 | Window Closed / Lapsed |