Patent US4611122A successfully refreshed from Google Patents.
US4611122A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Signal detection apparatus with plural elongate beams corresponding
Assignee: Canon Inc
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Filing: 1983-11-23
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Granted: 1986-09-09
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Expires: 2003-11-23
Abstract
Abstract A signal detection apparatus comprises a device for forming with separable lights illumination areas extending in different plural directions, a scanner for causing the illumination areas to scan bar-like marks extending in different directions on an object, and a photoreceptor for separately receiving signal lights corresponding to the respective different directions from the rays reflected by the marks.
Inventors
- 👤 Shigeki Nakano
- 👤 Masao Totsuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 17:22
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
82 words
An apparatus for detecting light signals from first and second marks extending in different directions on an object, the apparatus comprising: means for forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; means for illuminating the first and second marks with both of the illumination areas; and means for separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 2
Independent Claim
82 words
An apparatus for detecting light signals from first and second marks extending in different directions on an object, the apparatus comprising: means for forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; means for illuminating the first and second marks with both of the illumination areas; and means for separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 3
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein the beams having different properties are light beams different in polarization direction from each other.
Claim 4
Dependent Claim
21 words
An apparatus as defined in claim 1 wherein the beams having different properties are beams different in wavelength from each other.
Claim 5
Dependent Claim
17 words
An apparatus as defined in claim 1, further including a radiation sensitive member located near said object.
Claim 6
Dependent Claim
33 words
An apparatus as defined in claim 1, further including a projection optical system for projecting the image of said object and a radiation receiving member for receiving the projected image of said object.
Claim 7
Dependent Claim
20 words
An apparatus as defined in claim 1 wherein said object includes first and second bar-like marks extending in different directions.
Claim 8
Dependent Claim
13 words
An apparatus as defined in claim 4 wherein said object is a mask.
Claim 9
Independent Claim
119 words
An apparatus for detecting misalignment between a mask having a bar-like mark and a wafer having a bar-like mark corresponding to the bar-like mark on the mask, the apparatus comprising: means for producing a first beam; means for splitting the first beam into second and third beams having different properties; means for reforming the second and third beams so as to provide illumination areas extending in different directions; means for combining the second and third beams; means for illuminating the marks on the mask and the wafer with the combined beam; means for selecting components of light from the marks on the basis of the difference in the properties of the beam; and means for receiving the selected light.
Claim 10
Independent Claim
119 words
An apparatus for detecting misalignment between a mask having a bar-like mark and a wafer having a bar-like mark corresponding to the bar-like mark on the mask, the apparatus comprising: means for producing a first beam; means for splitting the first beam into second and third beams having different properties; means for reforming the second and third beams so as to provide illumination areas extending in different directions; means for combining the second and third beams; means for illuminating the marks on the mask and the wafer with the combined beam; means for selecting components of light from the marks on the basis of the difference in the properties of the beam; and means for receiving the selected light.
Claim 11
Dependent Claim
30 words
An apparatus as defined in claim 8 wherein the first beam is a laser beam linearly polarized and wherein said splitting means includes a beam splitter and a λ/2 plate.
Claim 12
Dependent Claim
16 words
An apparatus as defined in claim 8 wherein said reforming means includes an anamorphic optical element.
Claim 13
Dependent Claim
16 words
An apparatus as defined in claim 8 wherein said selecting means is a polarization beam splitter.
Claim 14
Dependent Claim
23 words
An apparatus as defined in claim 8, further including a projection optical system for projecting the image of said mask on said wafer.
Claim 15
Dependent Claim
13 words
An apparatus as defined in claim 5 wherein said object is a mask.
Claim 16
Dependent Claim
12 words
An apparatus as defined in claim 6 wherein said object is mask.
Claim 17
Independent Claim
79 words
A method of detecting light signals from first and second marks extending in different directions on an object, the method comprising the steps of: forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; illuminating the first and second marks with both of the illumination areas; and separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 18
Independent Claim
79 words
A method of detecting light signals from first and second marks extending in different directions on an object, the method comprising the steps of: forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; illuminating the first and second marks with both of the illumination areas; and separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-08 | 1990-03-10 | 1990-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-08 | 1994-03-10 | 1994-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-08 | 1998-03-10 | 1998-09-09 | $7700.00 | Window Closed / Lapsed |