US4611122A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Signal detection apparatus with plural elongate beams corresponding
Assignee: Canon Inc
•
Filing: 1983-11-23
•
Granted: 1986-09-09
•
Expires: 2003-11-23
Abstract
Abstract A signal detection apparatus comprises a device for forming with separable lights illumination areas extending in different plural directions, a scanner for causing the illumination areas to scan bar-like marks extending in different directions on an object, and a photoreceptor for separately receiving signal lights corresponding to the respective different directions from the rays reflected by the marks.
Inventors
- 👤 Shigeki Nakano
- 👤 Masao Totsuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:15
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
82 words
An apparatus for detecting light signals from first and second marks extending in different directions on an object, the apparatus comprising: means for forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; means for illuminating the first and second marks with both of the illumination areas; and means for separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 2
Independent Claim
82 words
An apparatus for detecting light signals from first and second marks extending in different directions on an object, the apparatus comprising: means for forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; means for illuminating the first and second marks with both of the illumination areas; and means for separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 3
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein the beams having different properties are light beams different in polarization direction from each other.
Claim 4
Dependent Claim
21 words
An apparatus as defined in claim 1 wherein the beams having different properties are beams different in wavelength from each other.
Claim 5
Dependent Claim
17 words
An apparatus as defined in claim 1, further including a radiation sensitive member located near said object.
Claim 6
Dependent Claim
33 words
An apparatus as defined in claim 1, further including a projection optical system for projecting the image of said object and a radiation receiving member for receiving the projected image of said object.
Claim 7
Dependent Claim
20 words
An apparatus as defined in claim 1 wherein said object includes first and second bar-like marks extending in different directions.
Claim 8
Dependent Claim
13 words
An apparatus as defined in claim 4 wherein said object is a mask.
Claim 9
Independent Claim
119 words
An apparatus for detecting misalignment between a mask having a bar-like mark and a wafer having a bar-like mark corresponding to the bar-like mark on the mask, the apparatus comprising: means for producing a first beam; means for splitting the first beam into second and third beams having different properties; means for reforming the second and third beams so as to provide illumination areas extending in different directions; means for combining the second and third beams; means for illuminating the marks on the mask and the wafer with the combined beam; means for selecting components of light from the marks on the basis of the difference in the properties of the beam; and means for receiving the selected light.
Claim 10
Independent Claim
119 words
An apparatus for detecting misalignment between a mask having a bar-like mark and a wafer having a bar-like mark corresponding to the bar-like mark on the mask, the apparatus comprising: means for producing a first beam; means for splitting the first beam into second and third beams having different properties; means for reforming the second and third beams so as to provide illumination areas extending in different directions; means for combining the second and third beams; means for illuminating the marks on the mask and the wafer with the combined beam; means for selecting components of light from the marks on the basis of the difference in the properties of the beam; and means for receiving the selected light.
Claim 11
Dependent Claim
30 words
An apparatus as defined in claim 8 wherein the first beam is a laser beam linearly polarized and wherein said splitting means includes a beam splitter and a λ/2 plate.
Claim 12
Dependent Claim
16 words
An apparatus as defined in claim 8 wherein said reforming means includes an anamorphic optical element.
Claim 13
Dependent Claim
16 words
An apparatus as defined in claim 8 wherein said selecting means is a polarization beam splitter.
Claim 14
Dependent Claim
23 words
An apparatus as defined in claim 8, further including a projection optical system for projecting the image of said mask on said wafer.
Claim 15
Dependent Claim
13 words
An apparatus as defined in claim 5 wherein said object is a mask.
Claim 16
Dependent Claim
12 words
An apparatus as defined in claim 6 wherein said object is mask.
Claim 17
Independent Claim
79 words
A method of detecting light signals from first and second marks extending in different directions on an object, the method comprising the steps of: forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; illuminating the first and second marks with both of the illumination areas; and separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
Claim 18
Independent Claim
79 words
A method of detecting light signals from first and second marks extending in different directions on an object, the method comprising the steps of: forming, with beams having different properties, illumination areas extending in different directions corresponding to the different directions in which the marks extend; illuminating the first and second marks with both of the illumination areas; and separately receiving components of light from the marks on the basis of the difference in the properties of the beams.
References Cited (Backward Citations)
US3683195A
Cited
US3865483A
Cited
US4167677A
Cited
US4202627A
Cited
US4301363A
Cited
US4515481A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-08 | 1990-03-10 | 1990-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-08 | 1994-03-10 | 1994-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-08 | 1998-03-10 | 1998-09-09 | $7700.00 | Window Closed / Lapsed |