Patent US4610757A successfully refreshed from Google Patents.
US4610757A
Expired / Lapsed
US
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Method of manufacturing a grating
Assignee: US Philips Corp
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Filing: 1984-11-13
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Granted: 1986-09-09
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Expires: 2004-11-13
Abstract
Abstract The invention relates to a method of manufacturing an optical grating from a body having a surface which is provided with equidistant grooves. In order to obtain cheap and deformation-resistant gratings, according to the invention a surface of a substrate is provided with a number of layers of substantially equal thicknesses. The etching rates of the layers (in a given etchant) increase substantially proportionally to the number of the layer. A cross-sectional surface of the layers is then exposed to the etchant to form the surface with the grooves.
Inventors
- 👤 Giok D. Khoe
- 👤 Antonius J. A. Nicia
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 20:24
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/18; G02B5/1847; G02B5/1857
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
106 words
A method of manufacturing an optical grating, said method comprising the steps of: providing a substrate having a surface; depositing a number of layers of material on the surface of the substrate, said layers having substantially equal thicknesses, said layers forming a substantially planar etch surface substantially perpendicular to the surface of the substrate and substantially perpendicular to the layers; and etching the planar etch surface with an etchant; characterized in that each layer of the etch surface is etched by the etchant at a rate which is proportional to the distance of the layer from the substrate so as to form a nonperiodic stepped surface.
Claim 2
Independent Claim
106 words
A method of manufacturing an optical grating, said method comprising the steps of: providing a substrate having a surface; depositing a number of layers of material on the surface of the substrate, said layers having substantially equal thicknesses, said layers forming a substantially planar etch surface substantially perpendicular to the surface of the substrate and substantially perpendicular to the layers; and etching the planar etch surface with an etchant; characterized in that each layer of the etch surface is etched by the etchant at a rate which is proportional to the distance of the layer from the substrate so as to form a nonperiodic stepped surface.
Claim 3
Dependent Claim
18 words
A method as claimed in claim 1, characterized in that each layer is 1 to 3 microns thick.
Claim 4
Dependent Claim
18 words
A method as claimed in claim 2, characterized in that each layer is etched 0.1 to 0.3 microns.
Claim 5
Dependent Claim
20 words
A method as claimed in claim 3, characterized in that the grating has a blaze angle of 10° to 20°.
Claim 6
Dependent Claim
22 words
A method as claimed in claim 4, characterized in that the layers are deposited by a nonisothermal plasma chemical vapor deposition method.
Claim 7
Dependent Claim
18 words
A method as claimed in claim 1, characterized in that each layer is etched 0.1 to 0.3 microns.
Claim 8
Dependent Claim
20 words
A method as claimed in claim 6, characterized in that the grating has a blaze angle of 10° to 20°.
Claim 9
Dependent Claim
22 words
A method as claimed in claim 7, characterized in that the layers are deposited by a nonisothermal plasma chemical vapor deposition method.
Claim 10
Dependent Claim
20 words
A method as claimed in claim 1, characterized in that the grating has a blaze angle of 10° to 20°.
Claim 11
Dependent Claim
22 words
A method as claimed in claim 9, characterized in that the layers are deposited by a nonisothermal plasma chemical vapor deposition method.
Claim 12
Dependent Claim
22 words
A method as claimed in claim 1, characterized in that the layers are deposited by a nonisothermal plasma chemical vapor deposition method.
References Cited (Backward Citations)
US3542453A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-08 | 1990-03-10 | 1990-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-08 | 1994-03-10 | 1994-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-08 | 1998-03-10 | 1998-09-09 | $7700.00 | Window Closed / Lapsed |