US4609867A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for measuring electrical potentials at buried solid state matter
Assignee: Siemens AG
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Filing: 1983-07-14
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Granted: 1986-09-02
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Expires: 2003-07-14
Abstract
Abstract A method is provided for measuring electrical potentials at solid state matter wherein an ionizing radiation is directed against a measuring point at the surface, whereby a conductive connection between the measuring point at the surface and a measuring point at the solid state matter is produced, its electrical potential to be measured. Electrical potentials are measured at a solid state substance even when the solid state matter is hidden beneath at least one conductive layer and at least one insulating layer. The electrical potential at the solid state matter is identified by measuring induced specimen current.
Inventors
- 👤 Helmut Schink
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:54
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
132 words
A method for measuring electrical potentials at solid state matter which is separated from a surface by at least one conductive layer and at least one insulating layer, comprising the steps of: directing an ionizing beam against a measuring point at the surface to produce a conductive connection between the measuring point at the surface and a measuring point at the solid state matter and establishing potential between the conductive layer at the solid state matter; contemporaneously inducing and measuring specimen current by the application of the ionizing beam; and measuring the electrical potential of the measuring location on the solid state matter in response to the measured specimen current which is linearly dependent on the difference in potential between the conductive layer and the measuring location on the solid state substance.
Claim 2
Independent Claim
132 words
A method for measuring electrical potentials at solid state matter which is separated from a surface by at least one conductive layer and at least one insulating layer, comprising the steps of: directing an ionizing beam against a measuring point at the surface to produce a conductive connection between the measuring point at the surface and a measuring point at the solid state matter and establishing potential between the conductive layer at the solid state matter; contemporaneously inducing and measuring specimen current by the application of the ionizing beam; and measuring the electrical potential of the measuring location on the solid state matter in response to the measured specimen current which is linearly dependent on the difference in potential between the conductive layer and the measuring location on the solid state substance.
Claim 3
Dependent Claim
22 words
The improved method of claim 1, and further comprising the step of: localizing and measuring electrical inhomogeneities at the solid state matter.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-01 | 1990-03-03 | 1990-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-01 | 1994-03-03 | 1994-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-01 | 1998-03-03 | 1998-09-02 | $7700.00 | Window Closed / Lapsed |