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US4609822A Expired / Lapsed US ⏱️ 0.0 years remaining

Rugged interferometer

Assignee: Lockheed Martin Corp
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Filing: 1984-11-05
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Granted: 1986-09-02
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Expires: 2004-11-05
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Abstract

Abstract A rugged Fabry-Perot interferometer comprises a solid etalon (15) made of single-crystal silicon with precisely parallel stacks (13) and (14) of dielectric materials coated on opposite sides thereof. The stacks (13) and (14) are identical to each other, and each stack comprises a plurality of layers of different materials having alternately high and low indices of refraction. A dielectric ring (30) made of the same material as the etalon (15) is bonded to a peripheral portion of one side of the etalon (15) by an epoxy material having the same coefficient of thermal expansion as the ring (30) and the etalon (15). The ring (30) with the etalon (15) bonded thereto is kinematically mounted on Teflon contact members (34) within an annular receiving structure (31) made of a metal (such as copper) of high thermal conductivity. Teflon contact members (39) on spring members (37), which are secured to the receiving structure (31), bear compressively against a peripheral portion of the other side of the etalon (15) to secure the etalon (15) within the receiving structure (31). Thermal equilibrium between the etalon (15) and the receiving structure (31) is provided by copper braids (40).

Inventors

  • 👤 Aiden E. Roche

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 17:13
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/12; G01J3/26; G02; G02B; G02B5/00; G02B5/20; G02B5/28; G02B5/289; G12; G12B; G12B17/00; G12B17/08

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 170 words
An interferometer for producing a series of spectrally narrow channels centered on a selected infrared wavelength, said interferometer comprising: (a) a single-crystal substrate having a refractive index greater than 3.4, said substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (b) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (c) means for mounting said substrate so as to be able to withstand thermal cycling between aabient terrestrial temperature and temperatures lower than 20° Kelvin.
Claim 2
Dependent Claim 170 words
An interferometer for producing a series of spectrally narrow channels centered on a selected infrared wavelength, said interferometer comprising: (a) a single-crystal substrate having a refractive index greater than 3.4, said substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (b) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (c) means for mounting said substrate so as to be able to withstand thermal cycling between aabient terrestrial temperature and temperatures lower than 20° Kelvin.
Claim 3
Dependent Claim 13 words
The interferometer of claim 1 wherein said substrate is made of single-crystal silicon.
Claim 4
Dependent Claim 20 words
The interferometer of claim 2 wherein each of said layers has a thickness of substantially one-quarter of said selected wavelength.
Claim 5
Dependent Claim 198 words
A Fabry-Perot interferometric apparatus comprising: (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a single-crystal substrate having a refractive index greater than 3.4, said substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate so as to be able to withstand thermal cycling between ambient terrestrial temperature and temperatures lower than 20° Kelvin; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 6
Dependent Claim 198 words
A Fabry-Perot interferometric apparatus comprising: (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a single-crystal substrate having a refractive index greater than 3.4, said substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate so as to be able to withstand thermal cycling between ambient terrestrial temperature and temperatures lower than 20° Kelvin; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 7
Dependent Claim 16 words
The apparatus of claim 4 further comprising means for collimating infrared radiation incident upon said interferometer.
Claim 8
Dependent Claim 40 words
The apparatus of claim 5 further comprising means for controllably tilting said interferometer relative to said infrared radiation incident thereon so that said series of channels of radiation can be investigated in order to select a particular channel for isolation.
Claim 9
Dependent Claim 444 words
A fabry-Perot interferometric apparatus comprising: (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a single-crystal substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate, wherein said mounting means comprises: (A) a dielectric ring, said ring and said substrate being made of the same material, said ring being bonded to a peripheral portion of said first side of said substrate by a bonding material having a coefficient of thermal expansion substantially equal to the coefficient of thermal expansion of said material of which said ring and said substrate are made; (B) an annular metallic receiving structure for receiving said dielectric ring, said receiving structure having a ledge that extends inwardly toward the center of said receiving structure; (C) a first set of three flexible contact members, the three contact members of said first set being substantially identical to each other, the three contact members of said first set being secured to said ledge and equally spaced with respect to each other on said ledge, the three contact members of said first set separating said ring from said receiving structure when said substrate and said ring are received by said receiving structure; (D) three elongate spring members, one end of each spring member being secured to said receiving structure, a distal end of each spring member projecting inwardly toward the center of said receiving structure, the three spring members being substantially identical to each other and equally spaced with respect to each other on said receiving structure; and (E) a second set of three flexible contact members, the three contact members of said second set being substantially identical to each other, each contact member of said second set being secured to a corresponding one of said spring members, the three contact members of said second set compressively contacting said substrate; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 10
Dependent Claim 444 words
A fabry-Perot interferometric apparatus comprising: (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a single-crystal substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate, wherein said mounting means comprises: (A) a dielectric ring, said ring and said substrate being made of the same material, said ring being bonded to a peripheral portion of said first side of said substrate by a bonding material having a coefficient of thermal expansion substantially equal to the coefficient of thermal expansion of said material of which said ring and said substrate are made; (B) an annular metallic receiving structure for receiving said dielectric ring, said receiving structure having a ledge that extends inwardly toward the center of said receiving structure; (C) a first set of three flexible contact members, the three contact members of said first set being substantially identical to each other, the three contact members of said first set being secured to said ledge and equally spaced with respect to each other on said ledge, the three contact members of said first set separating said ring from said receiving structure when said substrate and said ring are received by said receiving structure; (D) three elongate spring members, one end of each spring member being secured to said receiving structure, a distal end of each spring member projecting inwardly toward the center of said receiving structure, the three spring members being substantially identical to each other and equally spaced with respect to each other on said receiving structure; and (E) a second set of three flexible contact members, the three contact members of said second set being substantially identical to each other, each contact member of said second set being secured to a corresponding one of said spring members, the three contact members of said second set compressively contacting said substrate; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 11
Dependent Claim 60 words
The apparatus of claim 7 wherein each of said contact members has a substantially hemispheric portion, and wherein the hemispheric portion of each of the contact members of said first set makes substantially kinematic contact with said ring, and wherein the hemispheric portion of each of the contact members of said second set makes substantially kinematic contact with said substrate.
Claim 12
Dependent Claim 15 words
The apparatus of claim 7 wherein each of said contact members is made of polytetrafluoroethylene.
Claim 13
Dependent Claim 60 words
The apparatus of claim 7 further comprising means for maintaining said substrate and said receiving structure at thermal equilibrium with respect to each other, said means including a plurality of metallic braids, one end of each braid being bonded to the surface of said ring, the other end of each braid being bonded to the surface of said receiving structure.
Claim 14
Dependent Claim 32 words
The apparatus of claim 10 wherein each one of said braids extends from the surface of said ring through an aperture in said receiving structure to the surface of said receiving structure.
Claim 15
Dependent Claim 417 words
A rugged interferometric apparatus comprising: a) an interferometer for producing a series of (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a crystal substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate so as to be able to withstand thermal cycling between ambient terrestrial temperature and temperatures lower than 50° Kelvin, said means including: (A) a dielectric ring, said ring and said substrate being made of the same material, said ring being bonded to a peripheral portion of said first side of said substrate by a bonding material having a coefficient of thermal expansion substantially equal to the coefficient of thermal expansion of said material of which said ring and said substrate are made; (B) an annular metallic receiving structure for receiving said dielectric ring, said receiving structure having a ledge that extends inwardly toward the center of said receiving structure; (C) a plurality of flexible contact members comprising a set identified as the first set, the contact members of said first set being secured to said ledge, the contact members of said first set separating said ring from said ledge of said receiving structure and supporting said ring kinematically; (D) a plurality of elongate spring members, one end of each spring member being secured to said receiving structure, a distal end of each spring member projecting inwardly toward the center of said receiving structure; and (E) a plurality of flexible contact members comprising a set identified as the second set, each contact member of said second set being secured to a corresponding one of said spring members, the contact members of said second set making compressive contact with said substrate; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 16
Dependent Claim 417 words
A rugged interferometric apparatus comprising: a) an interferometer for producing a series of (a) an interferometer for producing a series of spectrally narrow channels of electromagnetic radiation centered on a selected infrared wavelength, said interferometer comprising: (i) a crystal substrate having first and second sides that are parallel to each other within a proper fraction of said selected wavelength; (ii) two dielectric stacks identified as the first stack and the second stack, each of said stacks comprising a plurality of layers made of different dielectric materials, said two dielectric stacks being substantially identical to each other, the layers of said first stack being coated one over another on the first side of said substrate, the layers of said second stack being coated one over another on the second side of said substrate, each of said dielectric stacks providing an internal reflectivity of greater than 90% for said substrate at said selected wavelength; and (iii) means for mounting said substrate so as to be able to withstand thermal cycling between ambient terrestrial temperature and temperatures lower than 50° Kelvin, said means including: (A) a dielectric ring, said ring and said substrate being made of the same material, said ring being bonded to a peripheral portion of said first side of said substrate by a bonding material having a coefficient of thermal expansion substantially equal to the coefficient of thermal expansion of said material of which said ring and said substrate are made; (B) an annular metallic receiving structure for receiving said dielectric ring, said receiving structure having a ledge that extends inwardly toward the center of said receiving structure; (C) a plurality of flexible contact members comprising a set identified as the first set, the contact members of said first set being secured to said ledge, the contact members of said first set separating said ring from said ledge of said receiving structure and supporting said ring kinematically; (D) a plurality of elongate spring members, one end of each spring member being secured to said receiving structure, a distal end of each spring member projecting inwardly toward the center of said receiving structure; and (E) a plurality of flexible contact members comprising a set identified as the second set, each contact member of said second set being secured to a corresponding one of said spring members, the contact members of said second set making compressive contact with said substrate; and (b) a spectral filter means for isolating a selected channel from said series of channels of electromagnetic radiation.
Claim 17
Dependent Claim 16 words
The apparatus of claim 12 wherein the substrate of said interferometer is made of single-crystal silicon.
Claim 18
Dependent Claim 64 words
The apparatus of claim 12 wherein said first set of flexible contact members comprises three contact members, each contact member of said first set having a head portion secured to said ledge and a shaft portion projecting away from the head portion, the shaft portion having a hemispherical distal end, said hemispherical distal end of each shaft portion making single-point contact with said ring.
Claim 19
Dependent Claim 25 words
The apparatus of claim 14 comprising three spring members, said three spring members being equally spaced with respect to each other on said receiving structure.

References Cited (Backward Citations)

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Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-09-01 1990-03-03 1990-09-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-09-01 1994-03-03 1994-09-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-09-01 1998-03-03 1998-09-02 $7700.00 Window Closed / Lapsed

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