Patent US4609139A successfully refreshed from Google Patents.
US4609139A
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Method of burnishing malleable films on semiconductor substrates
Assignee: RCA Corp
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Filing: 1984-05-14
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Granted: 1986-09-02
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Expires: 2004-05-14
Abstract
Abstract An improved burnishing method suitable for planarizing bonding pads on fragile semiconductor devices is disclosed. The method comprises imparting scratches of predetermined depth and spacing onto a glass slide. The bonding pad surface is contacted to the scratched glass surface under a desired pressure and a relative motion is established therebetween. The motion is continued until a smooth, defect-free bonding pad surface has been provided.
Inventors
- 👤 Frank Z. Hawrylo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 18:58
CPC Classifications
B; B24; B24B; B24B39/00; B24B39/06; B23; B23K; B23K20/00; B23K20/24; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/062; Y; Y10; Y10T; Y10T29/00; Y10T29/47
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
68 words
A method of burnishing a malleable film on a semiconductor substrate to provide a smooth, defect-free surface comprising: imparting scratches of a desired depth and spacing into a first major surface of a smooth glass plate; contacting the first major surface of the glass plate to the malleable film and establishing relative motion therebetween; continuing said motion under a desired pressure until a defect-free film surface is provided.
Claim 2
Independent Claim
68 words
A method of burnishing a malleable film on a semiconductor substrate to provide a smooth, defect-free surface comprising: imparting scratches of a desired depth and spacing into a first major surface of a smooth glass plate; contacting the first major surface of the glass plate to the malleable film and establishing relative motion therebetween; continuing said motion under a desired pressure until a defect-free film surface is provided.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the malleable film is a bonding pad of gold or an alloy thereof.
Claim 4
Dependent Claim
31 words
The method of claim 1 wherein a reflective coating is applied to a second major surface of the glass slide opposite the scratches to allow visual observation of the burnishing process.
Claim 5
Dependent Claim
16 words
The method of claim 1 wherein the scratches are between about 75 and 250 micrometers apart.
Claim 6
Dependent Claim
23 words
The method of claim 1 wherein the scratches are at least 250 Angstroms in depth but not more than 1000 Angstroms in depth.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein between about 55 and 310 kg/cm 2 of pressure is applied to the substrate and bonding pad during burnishing.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein the motion is continued to extend the malleable films toward an edge of the substrate.
References Cited (Backward Citations)
US3613107A
Cited
US3676214A
Cited
US3883946A
Cited
US3946334A
Cited
US4179852A
Cited
US4347486A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-01 | 1990-03-03 | 1990-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-01 | 1994-03-03 | 1994-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-01 | 1998-03-03 | 1998-09-02 | $7700.00 | Window Closed / Lapsed |