US4609139A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of burnishing malleable films on semiconductor substrates
Assignee: RCA Corp
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Filing: 1984-05-14
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Granted: 1986-09-02
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Expires: 2004-05-14
Abstract
Abstract An improved burnishing method suitable for planarizing bonding pads on fragile semiconductor devices is disclosed. The method comprises imparting scratches of predetermined depth and spacing onto a glass slide. The bonding pad surface is contacted to the scratched glass surface under a desired pressure and a relative motion is established therebetween. The motion is continued until a smooth, defect-free bonding pad surface has been provided.
Inventors
- 👤 Frank Z. Hawrylo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:45
CPC Classifications
B; B24; B24B; B24B39/00; B24B39/06; B23; B23K; B23K20/00; B23K20/24; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/062; Y; Y10; Y10T; Y10T29/00; Y10T29/47
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
68 words
A method of burnishing a malleable film on a semiconductor substrate to provide a smooth, defect-free surface comprising: imparting scratches of a desired depth and spacing into a first major surface of a smooth glass plate; contacting the first major surface of the glass plate to the malleable film and establishing relative motion therebetween; continuing said motion under a desired pressure until a defect-free film surface is provided.
Claim 2
Independent Claim
68 words
A method of burnishing a malleable film on a semiconductor substrate to provide a smooth, defect-free surface comprising: imparting scratches of a desired depth and spacing into a first major surface of a smooth glass plate; contacting the first major surface of the glass plate to the malleable film and establishing relative motion therebetween; continuing said motion under a desired pressure until a defect-free film surface is provided.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein the malleable film is a bonding pad of gold or an alloy thereof.
Claim 4
Dependent Claim
31 words
The method of claim 1 wherein a reflective coating is applied to a second major surface of the glass slide opposite the scratches to allow visual observation of the burnishing process.
Claim 5
Dependent Claim
16 words
The method of claim 1 wherein the scratches are between about 75 and 250 micrometers apart.
Claim 6
Dependent Claim
23 words
The method of claim 1 wherein the scratches are at least 250 Angstroms in depth but not more than 1000 Angstroms in depth.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein between about 55 and 310 kg/cm 2 of pressure is applied to the substrate and bonding pad during burnishing.
Claim 8
Dependent Claim
21 words
The method of claim 1 wherein the motion is continued to extend the malleable films toward an edge of the substrate.
References Cited (Backward Citations)
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US3883946A
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US3946334A
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US4179852A
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US4347486A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-09-01 | 1990-03-03 | 1990-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-09-01 | 1994-03-03 | 1994-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-09-01 | 1998-03-03 | 1998-09-02 | $7700.00 | Window Closed / Lapsed |