Abstract A diaphragm for pressure transducers which will be suitable for measuring small differentials is constructed by perforating, either partially or completely, the diaphragm material. The resulting diaphragm will require very small pressure differentials to obtain full scale deflection as compared with an unperforated diaphragm. The ideal configuration for the perforations is a series of convoluted slots etched completely through the diaphragm material from an inner radius, which may define one plate of a capacitive type transducer, to an outer radius near the periphery of the diaphragm. When the diaphragm is etched all the way through, it is covered with a thin plastic film, which may be cemented to the diaphragm or just sealed to it at its edges.
A diaphragm for a transducer for measuring pressure differences in a particular range comprising: a circular diaphragm of resilient material having slots arranged to reduce the modulus of resilience of said diaphragm, said slots being regularly spaced convolutes extending from an outer diameter slightly less than the diameter of said diaphragm to an inner diameter defining a central area which has no slots and which can form a plate for a capacitive type pressure transducer; and a slack sealing cover placed over said slots, said sealing cover being of material of sufficient strength to prevent extrusion or bunching of said material into said slots upon application of a pressure difference in said range to said diaphragm and of sufficient flexibility to follow deflections of the diaphragm without significant resistance.
Claim 2
Dependent Claim
129 words
A diaphragm for a transducer for measuring pressure differences in a particular range comprising: a circular diaphragm of resilient material having slots arranged to reduce the modulus of resilience of said diaphragm, said slots being regularly spaced convolutes extending from an outer diameter slightly less than the diameter of said diaphragm to an inner diameter defining a central area which has no slots and which can form a plate for a capacitive type pressure transducer; and a slack sealing cover placed over said slots, said sealing cover being of material of sufficient strength to prevent extrusion or bunching of said material into said slots upon application of a pressure difference in said range to said diaphragm and of sufficient flexibility to follow deflections of the diaphragm without significant resistance.
Claim 3
Dependent Claim
96 words
A diaphragm for a transducer for measuring pressure differences in a particular range comprising: a circular diaphragm of resilient material having slots arranged to reduce the modulus of resilience of said diaphragm, said slots extending only part way through the diaphragm material; and a slack sealing cover placed over said slots, said sealing cover being of material of sufficient strength to prevent extrusion or bunching of said material into said slots upon application of a pressure difference in said range to said diaphragm and of sufficient flexibility to follow deflections of the diaphragm without significant resistance.
Claim 4
Dependent Claim
96 words
A diaphragm for a transducer for measuring pressure differences in a particular range comprising: a circular diaphragm of resilient material having slots arranged to reduce the modulus of resilience of said diaphragm, said slots extending only part way through the diaphragm material; and a slack sealing cover placed over said slots, said sealing cover being of material of sufficient strength to prevent extrusion or bunching of said material into said slots upon application of a pressure difference in said range to said diaphragm and of sufficient flexibility to follow deflections of the diaphragm without significant resistance.
Claim 5
Dependent Claim
95 words
A pressure transducer diaphragm comprising: a piece of thin metal having a plurality of etched slots extending completely through said metal and positioned at regularly spaced intervals about a center portion of the diaphragm and extending along convolutes out to a diameter slightly less than the diameter of the deflecting portion of the diaphragm so as to give greater flexibility in a small diameter diaphragm with a twist of the center portion accompanying the deflection of the diaphragm; and a plastic covering laid over said slots to cut off the leakage paths through the slots.
Claim 6
Dependent Claim
95 words
A pressure transducer diaphragm comprising: a piece of thin metal having a plurality of etched slots extending completely through said metal and positioned at regularly spaced intervals about a center portion of the diaphragm and extending along convolutes out to a diameter slightly less than the diameter of the deflecting portion of the diaphragm so as to give greater flexibility in a small diameter diaphragm with a twist of the center portion accompanying the deflection of the diaphragm; and a plastic covering laid over said slots to cut off the leakage paths through the slots.
Claim 7
Dependent Claim
39 words
A diaphragm as set forth in claim 3 in which: the pressure measurement made by the transducer is a function of the rotation of the center portion of the diaphragm as it deflects in response to a pressure difference.