Capacitive sensing cell made of brittle material

Claim 2

A pressure sensing cell construction comprising a plate assembly of a pair of plates formed together to form a first sealed chamber between said plates and the plates being positioned substantially contiguous to each other on facing surfaces with no filling in the first chamber; an opening defined in at least one of said plates and open through the plate to the first chamber formed between the plates; means forming a second fluid chamber fluidly communicating with the first chamber; a filling of substantially incompressible fluid in said first chamber formed between said plates to separate the plates, and means associated with said second chamber to exert a pressure on said incompressible fluid filling in said first chamber to cause at least one of the plates to bow relative to the other a desired amount at a reference pressure in said first chamber; means to subject the exterior surfaces of said plates to a pressure to be measured, said second chamber and the means associated with said second chamber providing a pressure on said incompressible fluid; and means associated with at least one of said plates to measure the relative deflection thereof.

Claim 3

The pressure sensing cell of claim 1, wherein the second chamber is filled with substantially incompressible fluid.

Claim 4

The apparatus as specified in claim 2 wherein said second chamber is formed by two second plates of substantially similar construction to the first mentioned two plates, said two second plates being formed together to define the second chamber, and conduit connecting said first and second chambers.

Claim 5

The apparatus of claim 3 wherein the conduit is a rigid tube and means coupling one of the plates forming each of the first and second chambers to the conduit for physically supporting such plates on the conduit.

Claim 6

The pressure sensing cell of claim 1 wherein the second chamber provides a substantially constant pressure on the incompressible fluid in the first chamber at rest.

Claim 7

The apparatus as specified in claim 1 wherein said means to measure deflecting movement comprises electrode means on the facing surfaces of said plates for forming a variable capacitor having capacitance values dependent upon the relative spacing of said plates.

Claim 8

The apparatus as specified in claim 1 wherein said means to measure deflection comprises strain gage means providing an output indicating deflection of said at least one plate.

Claim 9

The apparatus of claim 1 wherein said plates are formed from material selected from one material of the group consisting of silicon, quartz, glass, sapphire and a ceramic material.

Claim 10

The apparatus of claim 1 wherein the plates forming the first chamber are substantially identical in construction and are sealed together at their peripheries.

Claim 11

A differential pressure sensor assembly having first and second sensor portions; said first and second sensor portions each comprising a pair of plates, at least one of which is a brittle material, initially substantially contiguous to each other along first surfaces of said plates and sealed together along an encompassing line with portions of said first surfaces being unconnected to permit movement of at least one of the plates comprising each sensor portion relative to the other plate of the same sensor portion to form first and second chambers, respectively, in each of the first and second sensor portions; fluid conduit means for connecting said first and second chambers, respectively; a quantity of substantially incompressible fluid filling said first and second chambers and said conduit means; housing means to permit subjecting at least one of the plates of each sensor portion to pressure tending to move the plates forming each sensor portion together, the pressure acting on the respective sensor portion being at least at times different from the pressure acting on the other sensor portion, whereby the incompressible fluid will be forced into one chamber from the other chamber and cause increase in bending stress of the plates in one of said sensor portions and a decrease in bending stress of the plates of the other sensor portion; and said other sensor portion reaching a condition wherein the first and second surfaces of the plates forming the other chamber of the sensor assembly are substantially contiguous before either of the plates forming the one sensor portion reach an excessive stress level.

Claim 12

A differential pressure sensor assembly having first and second sensor portions; said first and second sensor portions each comprising a pair of plates, at least one of which is a brittle material, initially substantially contiguous to each other along first surfaces of said plates and sealed together along an encompassing line with portions of said first surfaces being unconnected to permit movement of at least one of the plates comprising each sensor portion relative to the other plate of the same sensor portion to form first and second chambers, respectively, in each of the first and second sensor portions; fluid conduit means for connecting said first and second chambers, respectively; a quantity of substantially incompressible fluid filling said first and second chambers and said conduit means; housing means to permit subjecting at least one of the plates of each sensor portion to pressure tending to move the plates forming each sensor portion together, the pressure acting on the respective sensor portion being at least at times different from the pressure acting on the other sensor portion, whereby the incompressible fluid will be forced into one chamber from the other chamber and cause increase in bending stress of the plates in one of said sensor portions and a decrease in bending stress of the plates of the other sensor portion; and said other sensor portion reaching a condition wherein the first and second surfaces of the plates forming the other chamber of the sensor assembly are substantially contiguous before either of the plates forming the one sensor portion reach an excessive stress level.

Claim 13

The apparatus as specified in claim 10 where the spacings between the plates of the sensor portions are sensed by sensing means providing an output signal substantially represented by ##EQU22## where X 1 and X 2 represent said spacings, respectively, and Z is an output signal representing said differential pressure.

Claim 14

The apparatus of claim 10 where the spacings between the plates of the respective sensor portions are sensed by means providing an output signal substantially represented by Z=K 1 X 1 -K 2 X 2 where X 1 and X 2 represent said spacings, respectively, Z is an output signal representing differential pressure and K 1 and K 2 are constants selected to make Z substantially equal to zero when differential pressure is substantially zero.

Claim 15

The apparatus as specified in claim 10 and capacitive electrode means on the facing surfaces of the respective plates of each of said sensor portions to permit determining differences in spacing of such facing surfaces of the respective sensor portions by capacitive measurement.

Claim 16

The apparatus of claim 13 and circuit means coupled to the capacitive electrode means of the respective sensor portions to provide a signal representing the series capacitance of capacitors formed by the capacitance electrodes of the sensor portions.

Claim 17

The apparatus of claim 13 and a third capacitor connected in parallel with the capacitors formed by the electrodes on the facing surfaces of the first and second sensor portions, which form first and second capacitors, respectively, and circuit means coupled to the first, second and third capacitors to provide an output voltage dependent upon the function C A +C s where C A is the capacitance value of the third capacitor, C s represents the series capacitance of the first and second capacitors and C A is selected to be approximately equal to C s .

Claim 18

The apparatus as specified in claim 10 wherein said plates forming the first and second sensor portions are each made of the same material and such material has limited tensile strength properties.

Claim 19

The apparatus of claim 16 wherein said plates are made of a material having a tensile strength between 1,000 psi and 50,000 psi.

Claim 20

The apparatus of claim 10 wherein said housing means comprises a housing having first and second housing chambers containing the first and second sensor portions, respectively, and a separate chamber formed between the first and second housing chambers and formed by facing housing surfaces, compensation capacitive sensing electrodes formed on the facing housing surfaces for providing a capacitance signal indicative of the magnitude of the static line pressures in the first and second housing chambers sensed by the first and second sensor portions.

Claim 21

The apparatus of claim 10 wherein said housing means has housing surfaces which deflect as a function of static line pressure acting on the sensor portions, and means to measure deflection of such housing surfaces for providing a signal indicative of the magnitude of the static line pressures acting on the first and second sensor portions.

Claim 22

The apparatus of claim 10 wherein said fluid conduit means is a rigid conduit, and means to physically support the first and second sensor portions on opposite ends of the rigid conduit, the conduit having a central passageway open to both of the first and second chambers.

Claim 23

The apparatus of claim 20 and means for physically supporting the first conduit means on said housing means.

Claim 24

The apparatus of claim 10 and a resistive temperature sensing element mounted on the housing means to provide a signal to compensate for errors relating to temperature variations at the pressure sensor assembly.

Claim 25

A differential pressure sensor assembly having first and second sensor portions; said first and second sensor portions each comprising a pair of plate means having facing first surfaces initially substantially contiguous to each other along said first surfaces and said plate means being sealed together around a periphery for forming chambers, the major portion of said first surfaces of each pair of plates being unconnected to permit relative deflection of the plates comprising each sensor portion to form first and second chambers, respectively, in the first and second sensor portions; fluid conduit means for connecting said first and second chambers, respectively; a quantity of substantially incompressible fluid filling said first and second chambers and said conduit means, said first and second chambers of each of said first and second sensor portions being substantially the same volume when the sensor portions are at equal external pressures, and the spacing of the pair of plates forming the respective sensor portions being substantially equal to the spacing of the plates of the other sensor portion at equal radial distances from the center of the respective sensor portion; housing means for providing a separate pressure signal to each sensor portion thereby tending to move the plates of each sensor portion together, the pressure acting on the respective sensor portions being at least at times different from the pressure on the other sensor portion, whereby the incompressible fluid will be forced into one chamber from the other chamber and cause increase in bending stress of the plates in one of said sensor portions and a decrease in bending stress of the plates of the other sensor portion; and said other sensor portion reaching a condition wherein the first and second surfaces of the plates forming the other chamber of the other sensor portion are substantially contiguous before the plates forming the chamber of the one sensor portion reach an excessive stress level.

Claim 26

A differential pressure sensor assembly having first and second sensor portions; said first and second sensor portions each comprising a pair of plate means having facing first surfaces initially substantially contiguous to each other along said first surfaces and said plate means being sealed together around a periphery for forming chambers, the major portion of said first surfaces of each pair of plates being unconnected to permit relative deflection of the plates comprising each sensor portion to form first and second chambers, respectively, in the first and second sensor portions; fluid conduit means for connecting said first and second chambers, respectively; a quantity of substantially incompressible fluid filling said first and second chambers and said conduit means, said first and second chambers of each of said first and second sensor portions being substantially the same volume when the sensor portions are at equal external pressures, and the spacing of the pair of plates forming the respective sensor portions being substantially equal to the spacing of the plates of the other sensor portion at equal radial distances from the center of the respective sensor portion; housing means for providing a separate pressure signal to each sensor portion thereby tending to move the plates of each sensor portion together, the pressure acting on the respective sensor portions being at least at times different from the pressure on the other sensor portion, whereby the incompressible fluid will be forced into one chamber from the other chamber and cause increase in bending stress of the plates in one of said sensor portions and a decrease in bending stress of the plates of the other sensor portion; and said other sensor portion reaching a condition wherein the first and second surfaces of the plates forming the other chamber of the other sensor portion are substantially contiguous before the plates forming the chamber of the one sensor portion reach an excessive stress level.

Claim 27

The pressure sensor of claim 23 and means to measure deflection of at least one plate of one sensor portion relative to the other plate of that sensor portion.

Claim 28

The pressure sensor of claim 23 where the internal volume of the fluid conduit means is substantially less than the quantity of fluid enclosed by said first and second chambers.