Abstract A plasma reactor comprises a working chamber, the chamber being adapted to receive at least one article and a volume of plasma which is capable of interacting with a material of the article. A pair of electrodes are positioned about the chamber. Further, a radio-frequency generator is provided. More particularly, the plasma reactor includes a radio-frequency voltage transformer. The transformer includes a primary winding that is connected to the generator and a secondary winding the center of which is grounded. The secondary winding is adapted to transform the energy received from the primary winding into plasma-exciting energy at the electrodes, whereby the voltage between the plasma and the ground is small such that voltage discharge between the plasma and any grounded parts is minimized.
In a plasma reactor comprising a working chamber which is adapted to receive at least one article and a volume of plasma which is capable of interacting with a material of said article; a pair of electrodes positioned about said chamber; and, a radio-frequency generator, wherein the improvement comprises a radio frequency voltage transformer which includes a primary winding connected to the radio-frequency generator through an impedance matching network and a secondary winding, the center of which is grounded, and which secondary winding is adapted to transform the energy received from the primary winding into plasma-exciting energy at the electrodes, whereby the voltage between the energy-excited plasma and any grounded members of the plasma reactor is about 50 volts such that the intensity of any arc discharge across said voltage is minimized.
Claim 2
Dependent Claim
132 words
In a plasma reactor comprising a working chamber which is adapted to receive at least one article and a volume of plasma which is capable of interacting with a material of said article; a pair of electrodes positioned about said chamber; and, a radio-frequency generator, wherein the improvement comprises a radio frequency voltage transformer which includes a primary winding connected to the radio-frequency generator through an impedance matching network and a secondary winding, the center of which is grounded, and which secondary winding is adapted to transform the energy received from the primary winding into plasma-exciting energy at the electrodes, whereby the voltage between the energy-excited plasma and any grounded members of the plasma reactor is about 50 volts such that the intensity of any arc discharge across said voltage is minimized.
Claim 3
Dependent Claim
14 words
The plasma reactor of claim 1 wherein said material of said article is photoresist.
Claim 4
Dependent Claim
15 words
The plasma reactor of claim 1 or 2 wherein said article is a semiconductor wafer.
Claim 5
Dependent Claim
12 words
The plasma reactor of claim 3 wherein said plasma consists of oxygen.