US3816196A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Passivation of photoresist materials used in selective plasma etching
Assignee: General Electric Co
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Filing: 1971-06-07
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Granted: 1974-06-11
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Expires: 1991-06-07
Abstract
Abstract A method is disclosed for selective plasma etching of organic material by means of a low temperature plasma which reacts with the organic material through an apertured mask overlaying said material. The method has particular application to electronic circuit fabrication. A preferred organic dielectric material is a polymer of fluorinated ethylene propylene and a suitable mask for plasma etching of this material is a photoresist composition, which has been passivated to be resistant to attack by the plasma.
Inventors
- 👤 Combe D La
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:24
CPC Classifications
C; C08; C08J; C08J7/00; C08J7/12; C08J7/123; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32091; H01J37/32174; H10; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287; C08J2327/00; C08J2327/02; C08J2327/12; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/034; H05K3/00; H05K3/0011; H05K3/0017; Y; Y10; Y10S; Y10S422/00; Y10S422/906
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
23 words
The method set forth in claim 1 wherein said pressure during passivation is approximately 85 microns of mercury and said gas is oxygen.
Claim 2
Dependent Claim
18 words
The method as set forth in claim 1 wherein said photoresist is a negative working dry film photoresist.
Claim 3
Dependent Claim
15 words
The method set forth in claim 1 wherein said photoresist is a positive working photoresist.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-06-10 | 1977-12-10 | 1978-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-06-10 | 1981-12-10 | 1982-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-06-10 | 1985-12-10 | 1986-06-11 | $7700.00 | Window Closed / Lapsed |