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US4599272A Expired / Lapsed US ⏱️ 0.0 years remaining

Anti-reflection coating for optical component and method for forming the same

Assignee: Olympus Corp
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Filing: 1984-09-07
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Granted: 1986-07-08
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Expires: 2004-09-07
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Abstract

Abstract An anti-reflection coating for an optical component and a method of forming the same are disclosed. The anti-reflection coating is formed on a substrate for an optical component by subjecting a mixture of an evaporating material and 10-30% of SiO 2 to vacuum evaporation at room temperature without heating the substrate. When the anti-reflection coating is a single layer, a mixture of MgF 2 and 10-30% of SiO 2 is used as the evaporating material. When the anit-reflection coating is a multi-layer structure, a mixture of a fluoride or a silicon oxide and 10-30% of SiO 2 for a first layer, and a mixture of a fluoride or an oxide and 10-30% of SiO 2 for middle and last layers are used as the evaporating material.

Inventors

  • 👤 Hajime Ichikawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 17:56
CPC Classifications
G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; C; C03; C03C; C03C17/00; C03C17/22; C03C17/34; C03C17/3411; C03C17/3417; C03C17/3429; C03C17/3435; C03C17/3447; C03C17/3452; C23; C23C; C23C14/00; C23C14/06; C23C14/22; C23C14/50; C23C14/505; C03C2217/00; C03C2217/20; C03C2217/29; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/151; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31507; Y10T428/31652; Y10T428/31667

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 43 words
An optical component comprising a substrate for said optical component and an anti-reflection coating, formed on said substrate by subjecting a mixture of 10 to 30% of SiO 2 and an evaporating material having an anti-reflection effect to vacuum evaporation at room temperature.
Claim 2
Dependent Claim 43 words
An optical component comprising a substrate for said optical component and an anti-reflection coating, formed on said substrate by subjecting a mixture of 10 to 30% of SiO 2 and an evaporating material having an anti-reflection effect to vacuum evaporation at room temperature.
Claim 3
Dependent Claim 70 words
An optical component, comprising a substrate for said optical component and an anti-reflection coating which is formed on said substrate by successively subjecting a mixture of an evaporating material having an anti-reflection effect and 10 to 30% of SiO 2 as a first layer, and a mixture of a fluoride or an oxide and 10 to 30% SiO 2 as middle and last layers to vacuum evaporation at room temperature.
Claim 4
Dependent Claim 70 words
An optical component, comprising a substrate for said optical component and an anti-reflection coating which is formed on said substrate by successively subjecting a mixture of an evaporating material having an anti-reflection effect and 10 to 30% of SiO 2 as a first layer, and a mixture of a fluoride or an oxide and 10 to 30% SiO 2 as middle and last layers to vacuum evaporation at room temperature.
Claim 5
Dependent Claim 21 words
The optical component according to claim 1 or 2, wherein said substrate is a glass substrate or a synthetic resin substrate.
Claim 6
Dependent Claim 26 words
The optical component according to claim 3, wherein said synthetic resin substrate is made from diethylene glycol bisallyl carbonate, acrylic resin, polycarbonate, acrylonitrile-styrene copolymer or polystyrene.
Claim 7
Dependent Claim 15 words
The optical component according to claim 1, wherein said evaporating material is MgF 2 .
Claim 8
Dependent Claim 57 words
The optical component according to claim 2, wherein said fluoride is selected from CeF 3 , NdF 3 , PbF 3 , Na 3 AlF 6 , NaF, LiF and MgF 2 , and said oxide is selected from CeO 2 , ZrO 2 , Ti 2 O 3 , TiO and Al 2 O 3 .
Claim 9
Independent Claim 86 words
A method of forming an anti-reflection coating on a substrate for an optical component, which comprises mixing 10-30% of SiO 2 with an evaporating material having an anti-reflection effect, subjecting said substrate to sputtering irradiation with an ion beam of Ar and/or O 2 , and at the same time subjecting the mixture of SiO 2 and evaporating material to vacuum evaporation at room temperature by electron beam heating without heating said substrate to thereby deposit at least one layer of said mixture on said substrate.
Claim 10
Independent Claim 86 words
A method of forming an anti-reflection coating on a substrate for an optical component, which comprises mixing 10-30% of SiO 2 with an evaporating material having an anti-reflection effect, subjecting said substrate to sputtering irradiation with an ion beam of Ar and/or O 2 , and at the same time subjecting the mixture of SiO 2 and evaporating material to vacuum evaporation at room temperature by electron beam heating without heating said substrate to thereby deposit at least one layer of said mixture on said substrate.
Claim 11
Dependent Claim 20 words
The method according to claim 7 wherein said substrate is a glass or a synthetic resin for an optical component.
Claim 12
Dependent Claim 24 words
The method according to claim 8, wherein said synthetic resin is selected from diethylene glycol bisallyl carbonate, acrylic resin, polycarbontate, acrylonitrile-styrene copolymer and polystyrene.
Claim 13
Dependent Claim 28 words
The method according to claim 7, wherein 10-30% of SiO 2 is mixed with a fluoride as the evaporating material when the anti-reflection coating is a single layer.
Claim 14
Dependent Claim 13 words
The method according to claim 10, wherein said fluoride is MgF 2 .
Claim 15
Dependent Claim 58 words
The method according to claim 7, wherein when the anti-reflection coating is a multi-layer structure, a mixture of a fluoride or a silicon oxide and 10-30% of SiO 2 for a first layer, and a mixture of a fluoride or an oxide and 10-30% of SiO 2 for middle and last layers are used as the evaporating material.
Claim 16
Dependent Claim 56 words
The method according to claim 12, wherein said fluoride is selected from CeF 3 , NdF 3 , LaF 3 , Na 3 AlF 6 , NaF, LiF and MgF 2 , and said oxide is selected from CeO 2 , ZrO 2 , Ti 2 O 3 , TiO and Al 2 O 3 .
Claim 17
Dependent Claim 61 words
The optical component according to claim 1 wherein said evaporating material is selected from a member of the group consisting of CeF 3 , NdF 3 , LaF 3 , PbF 3 , Na 3 AlF 3 , NaF, LiF, MgF 2 , CeO 2 , ZrO 2 , Ti 2 O 3 , TiO, and Al 2 O 3 .

References Cited (Backward Citations)

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US3356522A Cited
US3356523A Cited
US3958042A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-07-07 1990-01-06 1990-07-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-07-07 1994-01-06 1994-07-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-07-07 1998-01-06 1998-07-08 $7700.00 Window Closed / Lapsed

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