Position detection signal processing apparatus

Claim 2

A position detection signal processing apparatus comprising: pattern detecting means for detecting a pattern on a body and repeatedly producing a detection signal including at least one part representative of the pattern; expectation signal forming means for forming an expectation signal which specifies the portion of said detection signal in which the probability is high if occurrence of part of the detection signal representative of the pattern, said expectation signal forming means including summing means for forming a summation of repeated production of the detection signal and for forming a summation signal therefrom, and summation discriminating means for discriminating said summation signal in accordance with a desired threshold value; and pattern signal forming means for forming a pattern outout signal corresponding to-the pattern from said detection signal and said expectation signal.

Claim 3

The apparatus according to claim 1, wherein said discriminating means includes an amplitude discriminating circuit.

Claim 4

The apparatus according to claim 1, wherein said expectation signal forming means further includes sampling means for time-serially sampling the detection signal and converting means for analog-digital-converting the output of said sampling means.

Claim 5

The apparatus according to claim 1, wherein said pattern detecting means includes an image detector for producing a video signal and an illuminator for illuminating the pattern.

Claim 6

The apparatus according to claim 4, wherein said image detector is an image pickup tube.

Claim 7

The apparatus according to claim 4, wherein said pattern detecting means scans the pattern in a scanning direction for detection, and said pattern has elemental marks inclined with respect to said scanning direction and at least one trigger mark adjacent to said elemental marks and including an edge having the same inclination as said elemental marks.

Claim 8

The apparatus according to claim 1, further comprising: means for scanning the pattern with a beam of radiation; and pattern discriminating means for discriminating the first edge of the pattern when the pattern is scanned by said scanning means.

Claim 9

The apparatus according to claim 7, wherein the pattern includes a trigger pattern and a mark pattern, the trigger pattern preceding the mark pattern, and wherein said pattern discriminating means produces a signal in response to scanning by said scanning means of the trigger pattern before the first pulse produced in response to scanning by said scanning means of the mark pattern.

Claim 10

A position detection signal processing apparatus comprising: pattern detecting means for detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern; expectation signal froming means for forming an expectation signal which specifies the portion of said detection signal in which the probability is high of occurrence of a part of the detection signal representative of the pattern; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal, said expectation signal forming means having first discriminating means for discriminating said detection signal in accordance with a first threshold value higher than a noise component, and said pattern signal forming means having second discriminating means for discriminating said signal in accordance with a second threshold value lower than said first threshold value.

Claim 11

A position detection signal processing apparatus comprising: pattern detecting means for detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern; expectation signal froming means for forming an expectation signal which specifies the portion of said detection signal in which the probability is high of occurrence of a part of the detection signal representative of the pattern; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal, said expectation signal forming means having first discriminating means for discriminating said detection signal in accordance with a first threshold value higher than a noise component, and said pattern signal forming means having second discriminating means for discriminating said signal in accordance with a second threshold value lower than said first threshold value.

Claim 12

The apparatus according to claim 1, wherein said body is one of a mask having a semiconductor integrated circuit pattern and a wafer provided with a photosensitive layer.

Claim 13

A signal processing method for processing signals representing alignment marks on a mask and a wafer, said method comprising the steps of: detecting at least one alignment mark provided on a mask and at least one alignment mark provided on a wafer and repeatedly producing a detection signal therefrom; producing a summation of repeated production of the detection signal and producing a summation signal represented thereof; discriminating the summation signal in accordance with a desired threshold value and producing an expectation signal therefrom; and producing signals corresponding to said alignment marks from said detection signal and said expectation signal.

Claim 14

A signal processing method for processing signals representing alignment marks on a mask and a wafer, said method comprising the steps of: detecting at least one alignment mark provided on a mask and at least one alignment mark provided on a wafer and repeatedly producing a detection signal therefrom; producing a summation of repeated production of the detection signal and producing a summation signal represented thereof; discriminating the summation signal in accordance with a desired threshold value and producing an expectation signal therefrom; and producing signals corresponding to said alignment marks from said detection signal and said expectation signal.

Claim 15

A position detection signal processing apparatus comprising: pattern detecting means for detecting a general pattern, including a trigger pattern and a mark pattern located on a scan line on a body, by scanning the body along the scan line, said pattern detecting means producing a detection signal including at least a part representative of the mark pattern; expectation signal forming means for forming an expectation signal which specifies the portion of said detection signal in which the probability is high of occurrence of the part of the detection signal representative of the mark pattern; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.

Claim 16

A position detection signal processing apparatus comprising: pattern detecting means for detecting a general pattern, including a trigger pattern and a mark pattern located on a scan line on a body, by scanning the body along the scan line, said pattern detecting means producing a detection signal including at least a part representative of the mark pattern; expectation signal forming means for forming an expectation signal which specifies the portion of said detection signal in which the probability is high of occurrence of the part of the detection signal representative of the mark pattern; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.

Claim 17

The apparatus according to claim 9 or 12, wherein the detection signal is repeatedly produced by said detecting and producing means and wherein said expectation signal forming means includes summing means for forming a summation of the repeated production of the detection signal and for forming a summation signal therefrom, and discriminating means for discriminating said summation signal in accordance with a desired threshold value.

Claim 18

The apparatus according to claim 13, wherein said discriminating means is an amplitude discriminating circuit.

Claim 19

The apparatus according to claim 13, wherein said expectation signal forming means further includes sampling means for time-serially sampling the detection signal and a converting means for analog-digital-converting the output of said sampling means.

Claim 20

The apparatus according to claim 9 or 12, wherein said pattern detecting means includes an image detector for producing a video signal and an illuminator for illuminating the pattern.

Claim 21

The apparatus according to claim 16, wherein said image detector is an image pickup tube.

Claim 22

The apparatus according to claim 16, wherein said pattern detecting means scans the general pattern in a scanning direction along the scanning line for detection, and said mark pattern has elemental marks inclined with respect to said scanning direction and said trigger pattern has at least one trigger mark adjacent to said elemental marks and including an edge having the same inclination as said elemental marks.

Claim 23

The apparatus according to claim 9 or 12, further comprising: means for scanning the general pattern with a beam of radiation; and discriminating means for discriminating the first edge of the general pattern when the general pattern is scanned by said scanning means.

Claim 24

The apparatus according to claim 19, wherein the trigger pattern precedes the mark pattern, and wherein said discriminating means produces a signal in response to scanning by said scanning means of the trigger pattern before the first pulse produced in response to scanning by said scanning means of the mark pattern.

Claim 25

The apparatus according to claim 12, wherein said expectation signal forming means has first discriminating means for discriminating said detection signal in accordance with a first threshold value higher than a noise component, and said pattern signal forming means has second discriminating means for discriminating said signal in accordance with a second threshold value lower than said first threshold value.

Claim 26

The apparatus according to claim 9 or 12, wherein said body is one of a mask having a semiconductor integrated circuit pattern and a wafer provided with a photosensitive layer.

Claim 27

A position detection signal processing apparatus comprising: pattern detecting means for detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern, wherein said pattern has elemental marks inclined with respect to a scanning direction and at least one trigger mark including an edge having the same inclination as said elemental marks; expectation signal forming means for forming an expectation signal which specifies a portion of the detection signal representative of the trigger mark in order to specify the portion of the detection signal in which the probability is high of occurrence of a part of the detection signal representative of the elemental marks; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.

Claim 28

A position detection signal processing apparatus comprising: pattern detecting means for detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern, wherein said pattern has elemental marks inclined with respect to a scanning direction and at least one trigger mark including an edge having the same inclination as said elemental marks; expectation signal forming means for forming an expectation signal which specifies a portion of the detection signal representative of the trigger mark in order to specify the portion of the detection signal in which the probability is high of occurrence of a part of the detection signal representative of the elemental marks; and pattern signal forming means for forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.

Claim 29

A position detection signal processing method comprising the steps of: detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern, wherein said pattern has elemental marks inclined with respect to a scanning direction and at least one trigger mark including an edge having the same inclination as said elemental marks; forming an expectation signal which specifies a portion of the detection signal representative of the trigger mark in order to specify the portion of the detection signal in which the probability is high of occureence of a part of the detection signal representative of the elemental marks; and forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.

Claim 30

A position detection signal processing method comprising the steps of: detecting a pattern on a body and producing a detection signal including at least one part representative of the pattern, wherein said pattern has elemental marks inclined with respect to a scanning direction and at least one trigger mark including an edge having the same inclination as said elemental marks; forming an expectation signal which specifies a portion of the detection signal representative of the trigger mark in order to specify the portion of the detection signal in which the probability is high of occureence of a part of the detection signal representative of the elemental marks; and forming a pattern output signal corresponding to the pattern from said detection signal and said expectation signal.