US4597819A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for altering pitch in arrangement of wafers
Assignee: Tomco Manufacturing Ltd
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Filing: 1984-12-18
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Granted: 1986-07-01
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Expires: 2004-12-18
Abstract
Abstract A wafer arrangement pitch altering apparatus comprising a pair of cylindrical grooved cams parallelly disposed, a plurality of cylindrical grooves formed to intersect a given generatrix of the grooved cams with respectively equal pitches, disposed symmetrically each other around the peripheral surfaces of the cylindrical grooved cams, and intersections of the generatrix and the cylindrical grooved cams are moved at mutually dissimilar desired proportions along the axes of the cylindrical grooved cams in consequence of its rotation, plural pairs of moving elements disposed between the cylindrical grooved cams facing each other and provided with pins fitting into the cylindrical grooves on the corresponding cylindrical grooved cams, a pair of means for retaining the moving elements in a manner movable only in the axial direction of the cylindrical grooved cams, a cylindrical grooved cam driving element for rotating the cylindrical grooved cams by a prescribed angle in the mutually opposite directions, main grooves formed on the opposed surfaces of the moving elements and provided in the lower portions thereof with steplike parts adapted to receive wafers, a pair of support frames for severally holding in place the pairs of cylindrical grooved cams and retaining means, and a support frame moving element for altering the relative distance of the pair of support frames.
Inventors
- 👤 Rei Kusuhara
- 👤 Koichi Otsubo
- 👤 Yasuo Yatabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 05:52
CPC Classifications
H; H10; H10P; H10P72/00; Y; Y10; Y10T; Y10T29/00; Y10T29/53; Y10T29/5313; Y10T29/53261; Y10T74/00; Y10T74/18; Y10T74/18056; Y10T74/18296; Y10T74/18304; Y10T74/18312; Y10T74/18328
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
255 words
An apparatus for altering a pitch in the arrangement of a plurality of wafers, comprising a pair of cylindrical grooved cams disposed parallelly to each other and provided each on the circumferential surface thereof with a plurality of cylindrical grooves, a plurality of pairs of moving elements disposed as opposed to each other between said pair of cylindrical grooved cams and provided severally with pins adapted to fit into said cylindrical grooves of said cylindrical grooved cams, a pair of means for retaining said moving elements in a state movable only in the direction of the axes of said pair of cylindrical grooved cams, a cylindrical grooved cam driving element for rotating said pair of cylindrical grooved cams in mutually opposite directions by equal angles, main grooves formed in the opposed faces of said moving elements and provided in the lower parts thereof with stepped parts for engagement with wafers, a pair of support frames for retaining said pair of cylindrical grooved cams and said pair of retaining means in prescribed relative positions, and a support frame moving element for changing the distance between said pair of support frames, wherein said cylindrical grooves are formed symmetrically with respect to each other on the circumferential surfaces of the respective cylindrical grooved cams in such a manner that the moving elements will be moved at desired dissimilar proportions in the direction of the axes of said cylindrical grooved cams in consequence of the rotation of said cylindrical grooved cams and will be always separated with equal pitch.
Claim 2
Independent Claim
255 words
An apparatus for altering a pitch in the arrangement of a plurality of wafers, comprising a pair of cylindrical grooved cams disposed parallelly to each other and provided each on the circumferential surface thereof with a plurality of cylindrical grooves, a plurality of pairs of moving elements disposed as opposed to each other between said pair of cylindrical grooved cams and provided severally with pins adapted to fit into said cylindrical grooves of said cylindrical grooved cams, a pair of means for retaining said moving elements in a state movable only in the direction of the axes of said pair of cylindrical grooved cams, a cylindrical grooved cam driving element for rotating said pair of cylindrical grooved cams in mutually opposite directions by equal angles, main grooves formed in the opposed faces of said moving elements and provided in the lower parts thereof with stepped parts for engagement with wafers, a pair of support frames for retaining said pair of cylindrical grooved cams and said pair of retaining means in prescribed relative positions, and a support frame moving element for changing the distance between said pair of support frames, wherein said cylindrical grooves are formed symmetrically with respect to each other on the circumferential surfaces of the respective cylindrical grooved cams in such a manner that the moving elements will be moved at desired dissimilar proportions in the direction of the axes of said cylindrical grooved cams in consequence of the rotation of said cylindrical grooved cams and will be always separated with equal pitch.
Claim 3
Dependent Claim
17 words
An apparatus according to claim 1, wherein said main grooves have a cross section resembling a trapezoid.
Claim 4
Independent Claim
298 words
An apparatus for altering a pitch in the arrangement of a plurality of wafers, comprising a pair of cylindrical grooved cams disposed parallelly to each other and provided each on the circumferential surface thereof with a plurality of cylindrical grooves, a plurality of pairs of moving elements disposed as opposed to each other between said pair of cylindrical grooved cams and provided severally with pins adapted to fit into said cylindrical grooves of said cylindrical grooved cams, a pair of means for retaining said moving elements in a state movable only in the direction of the axes of said pair of cylindrical grooved cams, a cylindrical grooved cam driving element for rotating said pair of cylindrical grooved cams in mutually opposite directions by equal angles, a plurality of pairs of wafer engaging pieces attached fast to the opposed faces of said moving elements and formed in such a manner that the pitch of the opposed parts thereof will be smaller than the pitch of said moving elements, main grooves formed in the opposed faces of said wafer engaging pieces and provided in the lower portions thereof with stepped parts for engagement of wafers, a pair of support frames for retaining said pair of cylindrical grooved cams and said pair of retaining means in prescribed relative positions, and a support frame moving element for changing the distance between said pair of support frames, wherein said cylindrical grooves are formed symmetrically with respect to each other on the circumferential surfaces of the respective cylindrical grooved cams in such a manner that the moving elements will be moved at desired dissimilar proportions in the direction of the axes of said cylindrical grooved cams in consequence of the rotation of said cylindrical grooved cams and will be always separated with equal pitch.
Claim 5
Independent Claim
298 words
An apparatus for altering a pitch in the arrangement of a plurality of wafers, comprising a pair of cylindrical grooved cams disposed parallelly to each other and provided each on the circumferential surface thereof with a plurality of cylindrical grooves, a plurality of pairs of moving elements disposed as opposed to each other between said pair of cylindrical grooved cams and provided severally with pins adapted to fit into said cylindrical grooves of said cylindrical grooved cams, a pair of means for retaining said moving elements in a state movable only in the direction of the axes of said pair of cylindrical grooved cams, a cylindrical grooved cam driving element for rotating said pair of cylindrical grooved cams in mutually opposite directions by equal angles, a plurality of pairs of wafer engaging pieces attached fast to the opposed faces of said moving elements and formed in such a manner that the pitch of the opposed parts thereof will be smaller than the pitch of said moving elements, main grooves formed in the opposed faces of said wafer engaging pieces and provided in the lower portions thereof with stepped parts for engagement of wafers, a pair of support frames for retaining said pair of cylindrical grooved cams and said pair of retaining means in prescribed relative positions, and a support frame moving element for changing the distance between said pair of support frames, wherein said cylindrical grooves are formed symmetrically with respect to each other on the circumferential surfaces of the respective cylindrical grooved cams in such a manner that the moving elements will be moved at desired dissimilar proportions in the direction of the axes of said cylindrical grooved cams in consequence of the rotation of said cylindrical grooved cams and will be always separated with equal pitch.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-30 | 1989-12-30 | 1990-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-30 | 1993-12-30 | 1994-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-30 | 1997-12-30 | 1998-07-01 | $7700.00 | Window Closed / Lapsed |