US3977566A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer handling apparatus
Assignee: AT&T Inc
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Filing: 1975-10-31
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Granted: 1976-08-31
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Expires: 1995-10-31
Abstract
Abstract Semiconductor wafer handling apparatus comprising a wafer feed machine, a dispensing adapter, and a collecting adapter is disclosed. The wafer feed machine is adapted for the transfer of a plurality of semiconductor wafers from or to a wafer cassette and to dispense or collect wafers singly, in a horizontal disposition to or from a work surface. The wafer feed machine comprises a frame-like support member in which are rotatably mounted a plurality of feed screw means which are axially parallel and spaced apart so as to accept in the periphery of the screw threads a standard semiconductor wafer. The pitch of the screw threads matches the spacing of standard wafer cassettes to enable batch transfer of wafers to and from the side of the wafer feed machine. Common drive means are provided for rotating the screw feed means which produces axial movement of the wafers. The machine has a dispensing mode for which a dispensing adapter is fitted to the feed screw outlet and the feed is toward the outlet, and a collecting mode in which a collecting adapter replaces the dispensing adapter and the screw feed is in the opposite direction.
Inventors
- 👤 Donald Franklin Hill
- 👤 Juris Strautins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:30
CPC Classifications
B; B65; B65G; B65G65/00; H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3408; H10P72/3411; Y; Y10; Y10S; Y10S414/00; Y10S414/135
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
134 words
Wafer handling apparatus for transferring semiconductor wafers from spaced-apart stack form in a cassette to single wafers positioned on a horizontal work surface and the reverse process from single wafer to stack form in a cassette comprising, a wafer feed machine including feed screw means for moving wafers in the axial direction of said means, said machine including means for receiving a plurality of wafers in said feed screw means simultaneously, said wafer feed machine further having means for dispensing and receiving a single wafer at an end of said feed screw means, and wafer collecting means comprising a wafer collecting adapter cooperative with said wafer feed machine, said wafer collecting adapter including means for retrieving and feeding a semiconductor wafer into an end of said feed screw means of said wafer feed machine.
Claim 2
Dependent Claim
134 words
Wafer handling apparatus for transferring semiconductor wafers from spaced-apart stack form in a cassette to single wafers positioned on a horizontal work surface and the reverse process from single wafer to stack form in a cassette comprising, a wafer feed machine including feed screw means for moving wafers in the axial direction of said means, said machine including means for receiving a plurality of wafers in said feed screw means simultaneously, said wafer feed machine further having means for dispensing and receiving a single wafer at an end of said feed screw means, and wafer collecting means comprising a wafer collecting adapter cooperative with said wafer feed machine, said wafer collecting adapter including means for retrieving and feeding a semiconductor wafer into an end of said feed screw means of said wafer feed machine.
Claim 3
Dependent Claim
19 words
Apparatus in accordance with claim 1 in which said wafer collecting means are separable from said wafer feed machine.
Claim 4
Dependent Claim
62 words
In a wafer handling apparatus, a wafer feed machine including feed screw means for axially moving a semiconductor wafer, said feed screw means comprising a plurality of screw members rotatably mounted in substantially parallel spaced-apart arrangement, said machine including means for receiving simultaneously a stack of spaced-apart wafers within said plurality of screw members, and drive means for rotating said screw members.
Claim 5
Dependent Claim
62 words
In a wafer handling apparatus, a wafer feed machine including feed screw means for axially moving a semiconductor wafer, said feed screw means comprising a plurality of screw members rotatably mounted in substantially parallel spaced-apart arrangement, said machine including means for receiving simultaneously a stack of spaced-apart wafers within said plurality of screw members, and drive means for rotating said screw members.
Claim 6
Dependent Claim
21 words
Apparatus in accordance with claim 3 in which said feed screw means comprise two pairs of oppositely disposed counter-rotating screw members.
Claim 7
Dependent Claim
24 words
Apparatus in accordance with claim 4 in which said drive means are connected in common to said screw members to provide simultaneously uniform rotation.
Claim 8
Dependent Claim
68 words
Wafer handling apparatus for transferring semiconductor wafers from spaced-apart stack form in a cassette to single wafers positioned on a horizontal work surface comprising, feed screw means for moving said wafers in the axial direction, means for receiving a plurality of wafers simultaneously into said feed screw means from a cassette, and means for dispensing wafers singly in horizontal disposition from an end of said feed screw means.
Claim 9
Dependent Claim
68 words
Wafer handling apparatus for transferring semiconductor wafers from spaced-apart stack form in a cassette to single wafers positioned on a horizontal work surface comprising, feed screw means for moving said wafers in the axial direction, means for receiving a plurality of wafers simultaneously into said feed screw means from a cassette, and means for dispensing wafers singly in horizontal disposition from an end of said feed screw means.
Claim 10
Dependent Claim
35 words
Apparatus in accordance with claim 6 in which said means for receiving wafers include a pair of oppositely disposed combs in one face of said wafer feed machine for guiding wafers into said feed screws.
Claim 11
Dependent Claim
72 words
Wafer handling apparatus for transferring single semiconductor wafers positioned on a horizontal work surface to spaced-apart stack form in a wafer cassette comprising, feed screw means for moving said wafers in the axial direction, wafer collecting means including means for retrieving and feeding a semiconductor wafer into an end of said feed screw means, and means for transferring a plurality of wafers simultaneously from said feed screw means to a wafer cassette.
Claim 12
Dependent Claim
72 words
Wafer handling apparatus for transferring single semiconductor wafers positioned on a horizontal work surface to spaced-apart stack form in a wafer cassette comprising, feed screw means for moving said wafers in the axial direction, wafer collecting means including means for retrieving and feeding a semiconductor wafer into an end of said feed screw means, and means for transferring a plurality of wafers simultaneously from said feed screw means to a wafer cassette.
References Cited (Backward Citations)
US3160295A
Cited
US3323856A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-08-31 | 1980-03-01 | 1980-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-08-31 | 1984-03-01 | 1984-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-08-31 | 1988-03-01 | 1988-08-31 | $7700.00 | Window Closed / Lapsed |