Device for projection copying of masks onto a workpiece

Claim 1

Device for projection copying of masks onto a workpiece, particularly onto a semiconductor substrate, for the manufacturing of integrated circuits, comprising: a projection lens through which patterns of the masks are passed for copying once or several times onto a light-sensitive layer of the workpiece, the mask and workpiece being oriented to each other in a relative way on opposite sides of said projection lens such that an orientation pattern of the mask and an adjusting mark of the workpiece are thereby brought into a predetermined spatial arrangement so that a relative position of a position-sensitive sensor as well as of the orientation pattern of the mask and at least one reference mark for the workpiece of a base table are determined before the adjusting mark is then copied onto the sensor, said workpiece being positioned on said base table, said projection lens also copying the adjusting mark of the workpiece onto the sensor with directly reflecting rays of light, which make visible the adjusting mark, being faded out, said position-sensitive sensor being installed on an underside of a frame carrying the mask, said underside being a side of said frame facing said projection lens.