Vapor phase deposition apparatus

Claim 2

A vapor phase deposition apparatus comprising: a reactor tube formed of quartz; a tubular liner formed of pyrolytic boron nitride (PBN) positioned within said reactor tube; means for positioning a substrate within said liner; means comprising one or more gas tubes each formed of sapphire for carrying reactant gases through an aperture for each gas tube in a wall of said liner to deposit a layer of material on said substrate; each of said gas tubes being arranged to be in snug-fit but gas-leak relation through its associated aperture in said wall of said liner establishing thereby a leakage flow path of gas around said gas tube through said aperture; and means for isolating said liner from said reactor tube by a non-reactive flushing gas passing said flushing gas around said gas tube at said aperture to prevent reactant gases from leaking into or from the interior of said liner through said leakage gas flow path.

Claim 3

A vapor phase deposition apparatus formed of an elongated tube having an upstream and downstream open end, a reaction zone spaced from the upstream end, and a deposition zone adjacent said reaction zone, first sealing means for sealing the downstream end and further including exit port means for exiting all the spent gases of said apparatus, and means for movably inserting and holding a substrate from said downstream end through said tube to said deposition zone, wherein the improvement comprises: (a) a tubular liner positioned within the reaction zone of said elongated tube and slightly spaced from said elongated tube and further having an open end facing downstream to receive said substrate and a closed end facing upstream having at least one aperture adapted to receive a first gas tube for carrying a reactant gas into said apparatus; (b) a tubular crucible positioned within said liner and along the reaction zone and having a closed end oriented to face downstream toward said downstream end of said elongated tube; (c) a boat positioned within said crucible for holding one of the constituents to be deposited; (d) said first gas tube passing through said liner aperture and extending substantially the full length over said boat to pass a first reactant gas against the closed end of said crucible and be reflected back over said one constituent in said boat to react with said first gas to provide thereby a gas of said one constituent; (e) said first gas tube being tapered for a close fit to pass through and in gas sealing relationship with said liner aperture; (f) a second sealing means for sealing the upstream end, and having an aperture for said first tube; and (g) a second gas tube passing through a second aperture of said second sealing means for carrying an non-reactive flushing gas into said apparatus to isolate said second sealing means from said liner and to pass around said tubular liner and exit through said exit port means.

Claim 4

A vapor phase deposition apparatus formed of an elongated tube having an upstream and downstream open end, a reaction zone spaced from the upstream end, and a deposition zone adjacent said reaction zone, first sealing means for sealing the downstream end and further including exit port means for exiting all the spent gases of said apparatus, and means for movably inserting and holding a substrate from said downstream end through said tube to said deposition zone, wherein the improvement comprises: (a) a tubular liner positioned within the reaction zone of said elongated tube and slightly spaced from said elongated tube and further having an open end facing downstream to receive said substrate and a closed end facing upstream having at least one aperture adapted to receive a first gas tube for carrying a reactant gas into said apparatus; (b) a tubular crucible positioned within said liner and along the reaction zone and having a closed end oriented to face downstream toward said downstream end of said elongated tube; (c) a boat positioned within said crucible for holding one of the constituents to be deposited; (d) said first gas tube passing through said liner aperture and extending substantially the full length over said boat to pass a first reactant gas against the closed end of said crucible and be reflected back over said one constituent in said boat to react with said first gas to provide thereby a gas of said one constituent; (e) said first gas tube being tapered for a close fit to pass through and in gas sealing relationship with said liner aperture; (f) a second sealing means for sealing the upstream end, and having an aperture for said first tube; and (g) a second gas tube passing through a second aperture of said second sealing means for carrying an non-reactive flushing gas into said apparatus to isolate said second sealing means from said liner and to pass around said tubular liner and exit through said exit port means.

Claim 5

An apparatus according to claim 2 wherein said elongated tube is formed of a reactant material containing emitting and reacting contaminants to said deposition process and said liner, crucible, boat and gas tubes is formed of a material that does not emit contaminants and is non-reactive to the gases of the deposition processes.

Claim 6

The apparatus of claim 3 further including a third gas tube extending through said liner and adjacent said crucible to provide a constituent gas in the vicinity of said substrate.

Claim 7

The apparatus of claim 3 wherein said second tube is spaced upstream from said tubular liner end to provide a buffer region between said liner and said upstream sealing means to receive said non-reactive flushing gas.

Claim 8

The apparatus of claim 3 wherein said elongated tube is formed of quartz and said tubular liner, crucible and boat are each respectively formed of pyrolytic boron nitride (PBN), and said gas carrying tube within said reaction zone is formed of sapphire.

Claim 9

The apparatus of claim 4 wherein said third gas tube is formed of sapphire.