US4589961A
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Aluminum mask anodization with lift-off for patterning Josephson junction devices
Assignee: Unisys Corp
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Filing: 1984-08-31
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Granted: 1986-05-20
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Expires: 2004-08-31
Abstract
Abstract In an improvement to the Selective Non-Anodizing Process (SNAP) an anodizable layer, nominally 100 nm of aluminum, is deposited on top of a 300 nm niobium--6 nm silicon--30 nm niobium tri-layer upon a substrate of oxidized silicon. The structure is then masked with photoresist and etched with an (aluminum) etchant, nominally phosphoric plus acetic plus nitric acid, which is selective to etch aluminum but not niobium. The structure, now containing a hard layer of aluminum plus an uppermost layer of photoresist over the regions where Josephson junctions will be formed, is then anodized by voltage ramping from 0 to 50 volts each 10 seconds in a saturate solution of ammonium penta borate in an equal solution of ethylene glycol and water. Both the uppermost niobium of the tri-layer and the aluminum are anodized save where protected by the photoresist. A protective insulator layer, nominally silicon mono oxide, is deposited by sputtering after which the mask of photoresist over aluminum is removed by the lift-off technique etching both anodized and remaining non-anodized aluminum. To the well-defined islands of niobium in a plane of anodized niobium, upper contact electrodes are formed by conventional deposition, photo lithographic, and etching techniques. This method so fabricating Josephson junction devices well-protects and defines the junctions under development while simultaneously reducing and simplifying the number of steps required in the patterning of the insulator layer.
Inventors
- 👤 Meir Gershenson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:59
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0912
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
437 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction Devices according both (1) masking of anodizing with a mask material harder and more durable that photoresist, and also (2) usage of the lift-off technique, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then first depositing a layer of anodizable material which anodizable material is harder and more durable than photoresist; then masking said layer of anodizable material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then first etching said workpiece tri-layer with deposited and masked layer of anodizable material with an etchant which is selective to etch said anodizable material but not said top-layer superconductor, said masking plus said first etching leaving a mask combinatorially of said photoresist on top of said anodizable material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material until said top-layer superconductor and also said layer of said anodizable material in the area not protected by said photoresist are both anodized; then second depositing a layer of insulator material; then removing said mask combinatorially of said photoresist on top of said anodizable material in accordance with the lift-off technique by second etching both anodized and remaining non-anodized of said anodizable material; wherein what is produced by said starting, said depositing, said masking, said first etching, said anodizing, and said removing is well-defined islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; whereby firstly accorded by said starting, said depositing, said masking, said first etching, and said anodizing is that said anodizing has been masked in said regions where Josephson tunneling barriers will be formed not only by said photoresist, but also by said layer of anodizable material which is harder and more durable than photoresist, which anodizable material is a layer deposited immediately above said top-layer superconductor; whereby secondly accorded by said starting, said depositing, said masking, said first etching, said anodizing, said second depositing and said removing is that entire said layers which are above said mask of anodizable material, including said layer of insulator material, are removed in the area above said mask by the lift-off technique when said anodizable material, both anodized and non-anodized, is removed.
Claim 2
Dependent Claim
437 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction Devices according both (1) masking of anodizing with a mask material harder and more durable that photoresist, and also (2) usage of the lift-off technique, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then first depositing a layer of anodizable material which anodizable material is harder and more durable than photoresist; then masking said layer of anodizable material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then first etching said workpiece tri-layer with deposited and masked layer of anodizable material with an etchant which is selective to etch said anodizable material but not said top-layer superconductor, said masking plus said first etching leaving a mask combinatorially of said photoresist on top of said anodizable material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material until said top-layer superconductor and also said layer of said anodizable material in the area not protected by said photoresist are both anodized; then second depositing a layer of insulator material; then removing said mask combinatorially of said photoresist on top of said anodizable material in accordance with the lift-off technique by second etching both anodized and remaining non-anodized of said anodizable material; wherein what is produced by said starting, said depositing, said masking, said first etching, said anodizing, and said removing is well-defined islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; whereby firstly accorded by said starting, said depositing, said masking, said first etching, and said anodizing is that said anodizing has been masked in said regions where Josephson tunneling barriers will be formed not only by said photoresist, but also by said layer of anodizable material which is harder and more durable than photoresist, which anodizable material is a layer deposited immediately above said top-layer superconductor; whereby secondly accorded by said starting, said depositing, said masking, said first etching, said anodizing, said second depositing and said removing is that entire said layers which are above said mask of anodizable material, including said layer of insulator material, are removed in the area above said mask by the lift-off technique when said anodizable material, both anodized and non-anodized, is removed.
Claim 3
Dependent Claim
39 words
The improvement method of claim 1 wherein said starting further comprises: starting with a workpiece tri-layer of top-layer niobium on top of a barrier layer of silicon on top of a niobium layer upon a substrate of anodized silicon.
Claim 4
Dependent Claim
30 words
The improvement method of claim 1 wherein said first depositing further comprises: first depositing a layer of the anodizable material aluminium which aluminum is harder and more durable than photoresist.
Claim 5
Dependent Claim
44 words
The improvement method of claim 3 wherein said first etching further comprises: first etching said workpiece tri-layer with deposited and masked aluminum with an etchant solution of phosphoric acid plus acetic acid plus nitric acid which is selective to etch aluminum but not niobium.
Claim 6
Dependent Claim
30 words
The improvement method of claim 1 wherein said first depositing further comprises: first depositing a layer of the anodizable material tantalum which tantalum is harder and more durable than photoresist.
Claim 7
Dependent Claim
30 words
The improvement method of claim 1 which between said first depositing and said masking further comprises: treating said layer of anodizable material with a substance promoting the adhesion of photoresist.
Claim 8
Dependent Claim
31 words
The improvement method of claim 3 which between said first depositing and said masking further comprises: treating said layer of aluminum with Hexamethyldisilazane in order to promote the adhesion of photoresist.
Claim 9
Dependent Claim
32 words
The improvement method of claim 3 which between said first depositing and said masking further comprises: treating said layer of aluminum by plasma cleaning in order to promote the adhesion of photoresist.
Claim 10
Dependent Claim
97 words
The improvement method of claim 1 wherein said anodizing step further comprises: anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material by a constant current source repetitively ramping from approximately 0 volts to approximtely 50 volts in approximately 10 seconds in a saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol until the current measured of said constant current source changes in indication that entire said unmasked top-layer superconductor of said tri-layer has been anodized, and said barrier insulator layer has been reached by ongoing anodization.
Claim 11
Dependent Claim
31 words
The improvement method of claim 9 wherein said anodizing step further comprises anodizing with a hot saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol.
Claim 12
Dependent Claim
21 words
The improvement method of claim 1 wherein said second depositing further comprises: second depositing a layer of silicon mono oxide (SiO).
Claim 13
Dependent Claim
22 words
The improvement method of claim 1 wherein said second depositing further comprises: second depositing a layer of silicon dioxide (SiO 2 ).
Claim 14
Dependent Claim
19 words
The improvement method of claim 1 whrein said second depositing further comprises: second depositing a layer of silicon nitride.
Claim 15
Dependent Claim
339 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction devices according that the masking of anodizing shall be with a mask material harder and more durable than photoresist, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then depositing a layer of anodizable material which anodizable material is harder and more durable than photoresist; then masking said layer of anodizable material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then first etching said workpiece tri-layer with deposited and masked layer of anodizable material with an etchant which is selective to etch said anodizable material but not said top-layer superconductor, said masking plus said etching leaving a mask combinatorially of said photoresist on top of said anodizable material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material until said top-layer superconductor and also said layer of said anodizable material in the area not protected by said photoresist are both anodized; then removing said mask combinatorially of said photoresist on top of said anodizable material by second etching both anodized and remaining non-anodized of said anodizable material; wherein what is produced by said starting, said depositing, said masking, said first etching, said anodizing, and said removing is well-defined islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; whereby said starting, said depositing, said masking, said first etching, and said anodizing has accorded that said anodizing has been masked in said regions where Josephson tunneling barriers will be formed not only by said photoresist, but also by a mask of anodizable material which is harder and more durable than photoresist.
Claim 16
Dependent Claim
339 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction devices according that the masking of anodizing shall be with a mask material harder and more durable than photoresist, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then depositing a layer of anodizable material which anodizable material is harder and more durable than photoresist; then masking said layer of anodizable material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then first etching said workpiece tri-layer with deposited and masked layer of anodizable material with an etchant which is selective to etch said anodizable material but not said top-layer superconductor, said masking plus said etching leaving a mask combinatorially of said photoresist on top of said anodizable material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material until said top-layer superconductor and also said layer of said anodizable material in the area not protected by said photoresist are both anodized; then removing said mask combinatorially of said photoresist on top of said anodizable material by second etching both anodized and remaining non-anodized of said anodizable material; wherein what is produced by said starting, said depositing, said masking, said first etching, said anodizing, and said removing is well-defined islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; whereby said starting, said depositing, said masking, said first etching, and said anodizing has accorded that said anodizing has been masked in said regions where Josephson tunneling barriers will be formed not only by said photoresist, but also by a mask of anodizable material which is harder and more durable than photoresist.
Claim 17
Dependent Claim
39 words
The improvement method of claim 14 wherein said starting further comprises: starting with a workpiece tri-layer of top-layer niobium on top of a barrier layer of silicon on top of a niobium layer upon a substrate of anodized silicon.
Claim 18
Dependent Claim
29 words
The improvement method of claim 14 wherein said first depositing further comprises: first depositing a layer of anodizable material aluminum which aluminum is harder and more durable than photoresist.
Claim 19
Dependent Claim
44 words
The improvement method of claim 16 wherein said first etching further comprises: first etching said workpiece tri-layer with deposited and masked aluminum with an etchant solution of phosphoric acid plus acetic acid plus nitric acid which is selective to etch aluminum but not niobium.
Claim 20
Dependent Claim
30 words
The improvement method of claim 14 wherein said first depositing further comprises: first depositing a layer of the anodizable material tantalum which tantalum is harder and more durable than photoresist.
Claim 21
Dependent Claim
30 words
The improvement method of claim 14 which between said first depositing and said masking further comprises: treating said layer of anodizable material with a substance promoting the adhesion of photoresist.
Claim 22
Dependent Claim
31 words
The improvement method of claim 16 which between said first depositing and said masking further comprises: treating said layer of aluminum with Hexamethyldisilazane in order to promote the adhesion of photoresist.
Claim 23
Dependent Claim
32 words
The improvement method of claim 16 which between said first depositing and said masking further comprises: treating said layer of aluminum by plasma cleaning in order to promote the adhesion of photoresist.
Claim 24
Dependent Claim
96 words
The improvement method of claim 16 wherein said anodizing step further comprises: anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material by constant current source repetitively ramping from approximately 0 volts to approximately 50 volts in approximately 10 seconds in a saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol until the current measured of said constant current source changes in indication that entire said unmasked top-layer superconductor of said tri-layer has been anodized, and said barrier insulator layer has been reached by ongoing anodization.
Claim 25
Dependent Claim
31 words
The improvement method of claim 22 wherein said anodizing step further comprises anodizing with a hot saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol.
Claim 26
Dependent Claim
285 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction Devices according usage of the lift-off technique, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then first depositing a layer of material suitable for being lifted-off by etching; then masking said layer of material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then etching said layer of material with an etchant which is selective to etch said material but not said top-layer superconductor, said masking plus said etching leaving a mask combinatorially of said photoresist on top of said material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of said material top-layer superconductor in the area not protected by said photoresist is etched; then second depositing a layer of insulator material; then removing said mask combinatorially of said photoresist on top of said material by the lift-off technique; wherein what is produced by said starting, said first depositing, said masking, said etching, said anodizing, said second depositing and said removing is islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; wherein by said removing in accordance with said lift-off technique said layer of insulator material has been removed from over said islands of superconductor which are each suitable to be an upper Josephson Junction electrode.
Claim 27
Dependent Claim
285 words
An improvement to the Selective Non-Anodizing Process (SNAP) for patterning Josephson Junction Devices according usage of the lift-off technique, said improvement method comprising: starting with a workpiece tri-layer of top-layer superconductor on top of a barrier insulator layer on top of a superconductor layer upon a substrate; then first depositing a layer of material suitable for being lifted-off by etching; then masking said layer of material with photoresist patterned to remain only in the regions where Josephson tunneling barriers will be formed; then etching said layer of material with an etchant which is selective to etch said material but not said top-layer superconductor, said masking plus said etching leaving a mask combinatorially of said photoresist on top of said material only in the regions where Josephson tunneling barriers will be formed; then anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of said material top-layer superconductor in the area not protected by said photoresist is etched; then second depositing a layer of insulator material; then removing said mask combinatorially of said photoresist on top of said material by the lift-off technique; wherein what is produced by said starting, said first depositing, said masking, said etching, said anodizing, said second depositing and said removing is islands of superconductor in a plane of anodized superconductor, each said island suitable to be an upper Josephson Junction electrode if upper contact electrodes are further conventionally formed by depositing of niobium, depositing of photoresist, masking, patterning by etching niobium, and removing the mask; wherein by said removing in accordance with said lift-off technique said layer of insulator material has been removed from over said islands of superconductor which are each suitable to be an upper Josephson Junction electrode.
Claim 28
Dependent Claim
39 words
The improvement method of claim 24 wherein said starting further comprises: starting with a workpiece tri-layer of top-layer niobium on top of a barrier layer of silicon on top of a niobium layer upon a substrate of anodized silicon.
Claim 29
Dependent Claim
30 words
The improvement method of claim 24 wherein said first depositing further comprises: first depositing a layer of the anodizable material aluminum which aluminum is harder and more durable than photoresist.
Claim 30
Dependent Claim
42 words
The improvement method of claim 26 wherein said etching further comprises: etching said workpiece tri-layer with deposited and masked aluminum with an etchant solution of phosphoric acid plus acetic acid plus nitric acid which is selective to etch aluminum but not niobium.
Claim 31
Dependent Claim
30 words
The improvement method of claim 24 wherein said first depositing further comprises: first depositing a layer of the anodizable material tantalum which tantalum is harder and more durable than photoresist.
Claim 32
Dependent Claim
30 words
The improvement method of claim 24 which between said first depositing and said masking further comprises: treating said layer of anodizable material with a substance promoting the adhesion of photoresist.
Claim 33
Dependent Claim
31 words
The improvement method of claim 26 which between said first depositing and said masking further comprises: treating said layer of aluminum with Hexamethyldisilazane in order to promote the adhesion of photoresist.
Claim 34
Dependent Claim
32 words
The improvement method of claim 26 which between said first depositing and said masking further comprises: treating said layer of aluminum by plasma cleaning in order to promote the adhesion of photoresist.
Claim 35
Dependent Claim
97 words
The improvement method of claim 24 wherein said anodizing step further comprises: anodizing said workpiece tri-layer with mask combinatorially of photoresist on top of anodizable material by a constant current source repetitively ramping from approximately 0 volts to approximately 50 volts in approximately 10 seconds in a saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol until the current measured of said constant current source changes in indication that entire said unmasked top-layer superconductor of said tri-layer has been anodized, and said barrier insulator layer has been reached by ongoing anodization.
Claim 36
Dependent Claim
31 words
The improvement method of claim 32 wherein said anodizing step further comprises anodizing with a hot saturate solution of ammonium penta borate in an equal solution of water and ethylene glycol.
Claim 37
Dependent Claim
21 words
The improvement method of claim 24 wherein said second depositing further comprises: second depositing a layer of silicon mono oxide (SiO).
Claim 38
Dependent Claim
22 words
The improvement method of claim 24 wherein said second depositing further comprises: second depositing a layer of silicon dioxide (SiO 2 ).
Claim 39
Dependent Claim
19 words
The improvement method of claim 24 wherein said second depositing further comprises: second depositing a layer of silicon nitride.
References Cited (Backward Citations)
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