Specimen manipulating mechanism for charged-particle beam instrument

Claim 2

A specimen manipulating mechanism adapted for use in a charged-particle beam instrument and mounted in the specimen chamber of the instrument, the manipulating mechanism being movable relative to three axes, said axes comprising a Z axis coincident with the optical axis of the charged particle beam and X and Y axes perpendicular to each other and to the Z axis, the mechanism having a tilt stage capable of tilting about the Y axis and at least two translating stages mounted on the tilt stage and capable of moving a specimen holder in at least two directions among three directions along the X, Y and Z axes, said specimen manipulating mechanism including: two or more elongate means disposed concentrically about the Y axis; driving mechanisms for moving the elongate means independently in the direction of the Y axis; and two or more lever means placed between the elongate means and the translating stages carried on the tilt stage to transmit the movements of the elongate means caused by the driving mechanisms to the stages.

Claim 3

A specimen manipulating mechanism as set forth in claim 1, wherein an X-axis stage, a Y-axis stage, and a Z-axis stage are mounted on the tilt stage for moving the specimen holder in the directions of the X, Y and Z axes, respectively, and wherein three elongate means transmit movement to the three stages via lever means.

Claim 4

A specimen manipulating mechanism as set forth in claim 1, wherein the tilt stage is mounted in the specimen chamber via a Y-axis stage, capable of moving in the direction of the Y axis, and wherein an X-axis stage and a Z-axis stage moving in the directions of the X and Z axes, respectively, are mounted on the tilt stage, the two or more elongate means being so designed as to transmit the movements thereof to the Z-axis stage and the X-axis stage via respective lever means.

Claim 5

A specimen manipulating mechanism adapted for use in a charged-particle beam instrument mounted in a specimen chamber, the manipulating mechanism being movable relative to three axes, said axes comprising a Z axis coincident with the optical axis of the charged particle beam and X and Y axes perpendicular to each other and the Z axis, said mechanism including a tilt stage capable of tilting about the Y axis, an X-axis stage and a Z-axis stage mounted on the tilt stage and capable of moving a specimen holder in the directions of X and Z axes, respectively, said specimen manipulating mechanism further including: a Y-axis stage mounted in the specimen chamber supporting the tilt stage thereon, and being moved in the direction of the Y axis; a Y-axis base fixedly secured to the Y-axis stage by a plurality of posts which extend through the wall of the specimen chamber, the base being disposed outside the specimen chamber; a plurality of bellows keeping the airtightness between the posts and the wall of the specimen chamber; two elongate means disposed concentrically about the Y axis; driving mechanisms for moving the two elongate means independently in the direction of the Y axis; and two lever means placed between the two elongate means, the X-axis stage, and the Z-axis stage and supported on the tilt stage for transmitting the movements of the elongate means caused by the driving mechanisms.

Claim 6

A specimen manipulating mechanism adapted for use in a charged-particle beam instrument mounted in a specimen chamber, the manipulating mechanism being movable relative to three axes, said axes comprising a Z axis coincident with the optical axis of the charged particle beam and X and Y axes perpendicular to each other and the Z axis, said mechanism including a tilt stage capable of tilting about the Y axis, an X-axis stage and a Z-axis stage mounted on the tilt stage and capable of moving a specimen holder in the directions of X and Z axes, respectively, said specimen manipulating mechanism further including: a Y-axis stage mounted in the specimen chamber supporting the tilt stage thereon, and being moved in the direction of the Y axis; a Y-axis base fixedly secured to the Y-axis stage by a plurality of posts which extend through the wall of the specimen chamber, the base being disposed outside the specimen chamber; a plurality of bellows keeping the airtightness between the posts and the wall of the specimen chamber; two elongate means disposed concentrically about the Y axis; driving mechanisms for moving the two elongate means independently in the direction of the Y axis; and two lever means placed between the two elongate means, the X-axis stage, and the Z-axis stage and supported on the tilt stage for transmitting the movements of the elongate means caused by the driving mechanisms.

Claim 7

The specimen manipulating mechanism as set forth in claim 1 wherein the elongate means comprises a rodlike shaft and a tubelike shaft telescoped thereover and a first lever being pivotally mounted to the tilt stage having one end thereof that bears upon the end of the rodlike shaft irrespective of the tilt of the tilt stage and a second lever being pivotally mounted to the tilt stage having one end thereof that bears upon the end of the tubelike shaft irrespective of the tilt of the tilt stage.

Claim 8

The specimen manipulating mechanism as set forth in claim 5 wherein a second tubelike shaft is telescoped over the first tubelike shaft and means mounted to the tilt stage that bears upon the second tubelike shaft irrespective of the tilt of the tilt stage.

Claim 9

The specimen manipulating mechanism as set forth in claim 5 wherein one of said first and second levers actuates an X-axis stage.

Claim 10

The specimen manipulating mechanism as set forth in claim 6 wherein one of said first, second and third levers actuates an X-axis stage.

Claim 11

The specimen manipulating mechanism as set forth in claim 5 wherein one of said first and second levers actuates a Y-axis stage relative to said tilt stage.

Claim 12

The specimen manipulating mechanism as set forth in claim 6 wherein one of said first, second and third levers actuates a Y-axis stage relative to said tilt stage.

Claim 13

The specimen manipulating mechanism as set forth in claim 5 wherein one of said first and second levers actuates a Z-axis stage relative to said tilt stage.

Claim 14

The specimen manipulating mechanism as set forth in claim 6 wherein one of said first, second and third levers actuates a Z-axis stage relative to said tilt stage.

Claim 15

The specimen manipulating mechanism as set forth in claim 4 wherein the elongate means comprises a rodlike shaft and a tubelike shaft telescoped thereover and a first lever being pivotally mounted to the tilt stage having one end thereof that bears upon an end of the rodlike shaft irrespective of the tilt of the tilt stage and a second lever being pivotally mounted to the tilt stage having one end thereof that always bears upon the tubelike shaft irrespective of the tilt of the tilt stage.

Claim 16

The specimen manipulating mechanism as set forth in claim 13 wherein one of said first and second levers actuates an X-axis stage relative to said tilt stage.

Claim 17

The specimen manipulating mechanisms as set forth in claim 13 wherein one of said first and second levers actuates a Z-axis stage relative to said tilt stage.