Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
155 words
In a corpuscular-beam apparatus including a specimen holder having at least two degrees of freedom of translation and at least one degree of freedom of rotation, and control means for correcting the translational coordinates of the specimen holder automatically when the specimen holder is rotated and retaining a predetermined specimen point in its position in the apparatus, the improvement comprising said control means comprising, means for controlling the rotational movement of said specimen holder stepwise in angular increments, said angular increments being chosen small so that the translational movement of the specimen point for each angular increment may be considered linear, and means for correcting the translational coordinates of the specimen holder stepwise in linear increments prior to each stepwise rotation of said specimen holder, each of said linear increments comprising a linear function of the instantaneous values of said translational coordinates and of said angular increments of said rotational movement of said specimen holder.
Claim 2
Dependent Claim
155 words
In a corpuscular-beam apparatus including a specimen holder having at least two degrees of freedom of translation and at least one degree of freedom of rotation, and control means for correcting the translational coordinates of the specimen holder automatically when the specimen holder is rotated and retaining a predetermined specimen point in its position in the apparatus, the improvement comprising said control means comprising, means for controlling the rotational movement of said specimen holder stepwise in angular increments, said angular increments being chosen small so that the translational movement of the specimen point for each angular increment may be considered linear, and means for correcting the translational coordinates of the specimen holder stepwise in linear increments prior to each stepwise rotation of said specimen holder, each of said linear increments comprising a linear function of the instantaneous values of said translational coordinates and of said angular increments of said rotational movement of said specimen holder.
Claim 3
Dependent Claim
63 words
The apparatus recited in claim 1, further comprising a servo system coupled to said control means and said specimen holder, said servo system comprising a setpoint transmitter, a control amplifier coupled to said transmitter, a d-c motor coupled to said amplifier, and an actual-value transducer, coupled to said control amplifer, for transmitting the actual coordinates of the specimen holder to said control amplifier.
Claim 4
Dependent Claim
18 words
The apparatus recited in claim 2, wherein said setpoint transmitter comprises an integrator for storing the setpoint coordinates.
Claim 5
Dependent Claim
33 words
The apparatus recited in claim 3, further comprising switch means, coupled between said actual-value transducer and said integrator, for setting the content of said integrator at the output level of said actual-value transducer.
Claim 6
Dependent Claim
28 words
The apparatus recited in claim 2, further comprising means for disabling said control means when a predetermined difference between the setpoint value and the actual value is exceeded.
Claim 7
Dependent Claim
22 words
The apparatus recited in claim 1, wherein said angular and linear increments are a function of the magnification of the corpuscular-beam apparatus.